with scanning beams

Industry

CPC
H01J37/268

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/268with scanning beams

Industries

Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam device
- Patent number 11,961,699
- Issue date Apr 16, 2024
- HITACHI HIGH-TECH CORPORATION
- Hideo Morishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of controlling transmission electron microscope and transmis...
- Patent number 11,251,016
- Issue date Feb 15, 2022
- Jeol Ltd.
- Yuji Kohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam irradiation apparatus
- Patent number 11,049,688
- Issue date Jun 29, 2021
- NuFlare Technology, Inc.
- Michihiro Kawaguchi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for high speed EELS spectrum acquisition
- Patent number 11,024,484
- Issue date Jun 1, 2021
- Gatan, Inc.
- Edward Michael James
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Circuit inspection method and sample inspection apparatus
- Patent number 10,712,384
- Issue date Jul 14, 2020
- HITACHI HIGH-TECH CORPORATION
- Akira Kageyama
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam image acquisition apparatus, and electron beam image...
- Patent number 10,665,422
- Issue date May 26, 2020
- NUFLARE TECHNOLOGY, INC.
- Hidekazu Takekoshi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Scanning transmission electron microscope
- Patent number 10,636,622
- Issue date Apr 28, 2020
- Tescan Orsay Holding, A.S.
- Petras Stanislav
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of determining the deflection of an electron beam resulting...
- Patent number 10,593,511
- Issue date Mar 17, 2020
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Benedikt Haas
- G01 - MEASURING TESTING
Information Patent Grant
Scanning transmission electron microscope with an objective electro...
- Patent number 10,381,193
- Issue date Aug 13, 2019
- TESCAN Brno, s.r.o.
- Petras Stanislav
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle system and method for measuring deflection fields...
- Patent number 10,332,720
- Issue date Jun 25, 2019
- Jeol Ltd.
- Kazuya Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for weak pattern quantification
- Patent number 10,262,831
- Issue date Apr 16, 2019
- KLA-Tencor Corporation
- Andrew Cross
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle microscope with vibration detection / correction
- Patent number 9,875,879
- Issue date Jan 23, 2018
- FEI Company
- Jeroen De Boeij
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam irradiation method and scanning electron microscope
- Patent number 9,640,366
- Issue date May 2, 2017
- Hitachi High-Technologies Corporation
- Toshiyuki Yokosuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 9,502,212
- Issue date Nov 22, 2016
- Hitachi High-Technologies Corporation
- Yuzuru Mizuhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Specimen potential measuring method, and charged particle beam device
- Patent number 9,129,775
- Issue date Sep 8, 2015
- Hitachi High-Technologies Corporation
- Tatsuaki Ishijima
- G01 - MEASURING TESTING
Information Patent Grant
Methods of operating a nanoprober to electrically probe a device st...
- Patent number 8,536,526
- Issue date Sep 17, 2013
- International Business Machines Corporation
- Paul D. Bell
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam system
- Patent number 8,304,725
- Issue date Nov 6, 2012
- Hitachi High-Technologies Corporation
- Osamu Komuro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for measuring surface potential distribution, met...
- Patent number 7,869,725
- Issue date Jan 11, 2011
- Ricoh Company, Ltd.
- Hiroyuki Suhara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Charged particle beam system
- Patent number 7,851,754
- Issue date Dec 14, 2010
- Hitachi High-Technologies Corporation
- Osamu Komuro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non-destructive, below-surface defect rendering using image intensi...
- Patent number 7,835,564
- Issue date Nov 16, 2010
- International Business Machines Corporation
- Delia R. Bearup
- G01 - MEASURING TESTING
Information Patent Grant
Method and device for measuring surface potential distribution, met...
- Patent number 7,783,213
- Issue date Aug 24, 2010
- Ricoh Company, Ltd.
- Hiroyuki Suhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface-potential distribution measuring apparatus, image carrier,...
- Patent number 7,612,570
- Issue date Nov 3, 2009
- Ricoh Company, Limited
- Hiroyuki Suhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection method and inspection system using charged particle beam
- Patent number 7,526,747
- Issue date Apr 28, 2009
- Hitachi, Ltd.
- Hidetoshi Nishiyama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and device for measuring surface potential distribution, met...
- Patent number 7,400,839
- Issue date Jul 15, 2008
- Ricoh Company, Ltd.
- Hiroyuki Suhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection method and inspection apparatus using electron beam
- Patent number 7,271,385
- Issue date Sep 18, 2007
- Hitachi High-Technologies Corporation
- Yasuhiro Gunji
- G01 - MEASURING TESTING
Information Patent Grant
Electron microscope equipped with magnetic microprobe
- Patent number 7,241,995
- Issue date Jul 10, 2007
- TOHOKU UNIVERSITY
- Daisuke Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for measuring surface potential distribution
- Patent number 7,239,148
- Issue date Jul 3, 2007
- Ricoh Company, Ltd.
- Hiroyuki Suhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film transistor array inspection apparatus
- Patent number 6,995,576
- Issue date Feb 7, 2006
- Shimadzu Corporation
- Daisuke Imai
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and inspection system using charged particle beam
- Patent number 6,931,620
- Issue date Aug 16, 2005
- Hitachi, Ltd.
- Hidetoshi Nishiyama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and apparatus for defect localization
- Patent number 6,664,541
- Issue date Dec 16, 2003
- KLA-Tencor Technologies Corporation
- Mehran Nasser-Ghodsi
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20230274907
- Publication date Aug 31, 2023
- HITACHI HIGH-TECH CORPORATION
- Teruo KOHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Microscope
- Publication number 20230238212
- Publication date Jul 27, 2023
- Hitachi High-Tech Corporation
- Hiroyasu SHICHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Automated Sample Alignment For Microscopy
- Publication number 20230020742
- Publication date Jan 19, 2023
- FEI Company
- John FLANAGAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20220068593
- Publication date Mar 3, 2022
- Hitachi High-Tech Corporation
- Hideo Morishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR HIGH SPEED EELS SPECTRUM ACQUISITION
- Publication number 20210090856
- Publication date Mar 25, 2021
- GATAN, INC.
- Edward Michael JAMES
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONDUCTIVE FIXATION FOR ELECTRON MICROSCOPY
- Publication number 20200373121
- Publication date Nov 26, 2020
- University of Kansas
- Eduardo ROSA-MOLINAR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Controlling Transmission Electron Microscope and Transmis...
- Publication number 20200312612
- Publication date Oct 1, 2020
- JEOL Ltd.
- Yuji Kohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM IRRADIATION APPARATUS
- Publication number 20200105499
- Publication date Apr 2, 2020
- NuFlare Technology, Inc.
- Michihiro KAWAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Beam Image Acquisition Apparatus, and Electron Beam Image...
- Publication number 20190096631
- Publication date Mar 28, 2019
- NUFLARE TECHNOLOGY, INC.
- Hidekazu Takekoshi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Scanning Transmission Electron Microscope With An Objective Electro...
- Publication number 20180269030
- Publication date Sep 20, 2018
- TESCAN ORSAY HOLDING, a.s.
- Petras Stanislav
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning Transmission Electron Microscope
- Publication number 20180269031
- Publication date Sep 20, 2018
- TESCAN Brno, s.r.o.
- Petras Stanislav
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for Weak Pattern Quantification
- Publication number 20180174797
- Publication date Jun 21, 2018
- KLA-Tencor Corporation
- Andrew Cross
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Electron Beam Irradiation Method and Scanning Electron Microscope
- Publication number 20130009057
- Publication date Jan 10, 2013
- Hitachi High-Technologies Corporation
- Toshiyuki Yokosuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPECIMEN POTENTIAL MEASURING METHOD, AND CHARGED PARTICLE BEAM DEVICE
- Publication number 20120119085
- Publication date May 17, 2012
- Hitachi High-Technologies Corporation
- Tatsuaki Ishijima
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM
- Publication number 20110057101
- Publication date Mar 10, 2011
- Hitachi High-Technologies Corporation
- Osamu Komuro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR MEASURING SURFACE POTENTIAL DISTRIBUTION, MET...
- Publication number 20100239319
- Publication date Sep 23, 2010
- Hiroyuki Suhara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS OF OPERATING A NANOPROBER TO ELECTRICALLY PROBE A DEVICE ST...
- Publication number 20100163727
- Publication date Jul 1, 2010
- International Business Machines Corporation
- Paul D. Bell
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION METHOD AND INSPECTION SYSTEM USING CHARGED PARTICLE BEAM
- Publication number 20090189075
- Publication date Jul 30, 2009
- Hitachi, Ltd
- Hidetoshi Nishiyama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
NON-DESTRUCTIVE, BELOW-SURFACE DEFECT RENDERING USING IMAGE INTENSI...
- Publication number 20080270081
- Publication date Oct 30, 2008
- International Business Machines Corporation
- Delia R. Bearup
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND DEVICE FOR MEASURING SURFACE POTENTIAL DISTRIBUTION, MET...
- Publication number 20080253792
- Publication date Oct 16, 2008
- Hiroyuki Suhara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SURFACE-POTENTIAL DISTRIBUTION MEASURING APPARATUS, IMAGE CARRIER,...
- Publication number 20080056746
- Publication date Mar 6, 2008
- Hiroyuki Suhara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Charged particle beam system
- Publication number 20070221845
- Publication date Sep 27, 2007
- Hitachi High-Technologies Corporation
- Osamu Komuro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR MEASURING SURFACE POTENTIAL DISTRIBUTION, MET...
- Publication number 20070217800
- Publication date Sep 20, 2007
- Hiroyuki Suhara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Inspection method and inspection apparatus using electron beam
- Publication number 20060076490
- Publication date Apr 13, 2006
- Yasuhiro Gunji
- G01 - MEASURING TESTING
Information Patent Application
Electron microscope equipped with magnetic microprobe
- Publication number 20050274889
- Publication date Dec 15, 2005
- TOHOKU UNIVERSITY
- Daisuke Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inspection method and inspection system using charged particle beam
- Publication number 20050236648
- Publication date Oct 27, 2005
- Hitachi, Ltd.
- Hidetoshi Nishiyama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and device for measuring surface potential distribution, met...
- Publication number 20050163517
- Publication date Jul 28, 2005
- Hiroyuki Suhara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Thin film transistor array inspection apparatus
- Publication number 20050139771
- Publication date Jun 30, 2005
- SHIMADZU CORPORATION
- Daisuke Imai
- G01 - MEASURING TESTING
Information Patent Application
Inspection method and inspection apparatus using electron beam
- Publication number 20050040331
- Publication date Feb 24, 2005
- Yasuhiro Gunji
- G01 - MEASURING TESTING
Information Patent Application
Inspection method and inspection apparatus using electron beam
- Publication number 20040026633
- Publication date Feb 12, 2004
- Yasuhiro Gunji
- G01 - MEASURING TESTING

with scanning beams

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Charged particle beam device

Method of controlling transmission electron microscope and transmis...

Charged particle beam irradiation apparatus

Method for high speed EELS spectrum acquisition

Circuit inspection method and sample inspection apparatus

Electron beam image acquisition apparatus, and electron beam image...

Scanning transmission electron microscope

Method of determining the deflection of an electron beam resulting...

Scanning transmission electron microscope with an objective electro...

Charged particle system and method for measuring deflection fields...

Method and system for weak pattern quantification

Charged particle microscope with vibration detection / correction

Electron beam irradiation method and scanning electron microscope

Charged particle beam apparatus

Specimen potential measuring method, and charged particle beam device

Methods of operating a nanoprober to electrically probe a device st...

Charged particle beam system

Method and device for measuring surface potential distribution, met...

Charged particle beam system

Non-destructive, below-surface defect rendering using image intensi...

Method and device for measuring surface potential distribution, met...

Surface-potential distribution measuring apparatus, image carrier,...

Inspection method and inspection system using charged particle beam

Method and device for measuring surface potential distribution, met...

Inspection method and inspection apparatus using electron beam

Electron microscope equipped with magnetic microprobe

Method and device for measuring surface potential distribution

Thin film transistor array inspection apparatus

Inspection method and inspection system using charged particle beam

Methods and apparatus for defect localization

Patents Applicationslast 30 patents

CHARGED PARTICLE BEAM DEVICE

Electron Microscope

Automated Sample Alignment For Microscopy

CHARGED PARTICLE BEAM DEVICE

METHOD FOR HIGH SPEED EELS SPECTRUM ACQUISITION

CONDUCTIVE FIXATION FOR ELECTRON MICROSCOPY

Method of Controlling Transmission Electron Microscope and Transmis...

CHARGED PARTICLE BEAM IRRADIATION APPARATUS

Electron Beam Image Acquisition Apparatus, and Electron Beam Image...

Scanning Transmission Electron Microscope With An Objective Electro...

Scanning Transmission Electron Microscope

Method and System for Weak Pattern Quantification

Electron Beam Irradiation Method and Scanning Electron Microscope

SPECIMEN POTENTIAL MEASURING METHOD, AND CHARGED PARTICLE BEAM DEVICE

CHARGED PARTICLE BEAM SYSTEM

METHOD AND DEVICE FOR MEASURING SURFACE POTENTIAL DISTRIBUTION, MET...

METHODS OF OPERATING A NANOPROBER TO ELECTRICALLY PROBE A DEVICE ST...

INSPECTION METHOD AND INSPECTION SYSTEM USING CHARGED PARTICLE BEAM

NON-DESTRUCTIVE, BELOW-SURFACE DEFECT RENDERING USING IMAGE INTENSI...

METHOD AND DEVICE FOR MEASURING SURFACE POTENTIAL DISTRIBUTION, MET...

SURFACE-POTENTIAL DISTRIBUTION MEASURING APPARATUS, IMAGE CARRIER,...

Charged particle beam system

METHOD AND DEVICE FOR MEASURING SURFACE POTENTIAL DISTRIBUTION, MET...

Inspection method and inspection apparatus using electron beam

Electron microscope equipped with magnetic microprobe

Inspection method and inspection system using charged particle beam

Method and device for measuring surface potential distribution, met...

Thin film transistor array inspection apparatus

Inspection method and inspection apparatus using electron beam

Inspection method and inspection apparatus using electron beam