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H01J37/32825
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
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H01J37/32825
Working under atmospheric pressure or higher
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma generating apparatus and method for operating same
Patent number
12,159,766
Issue date
Dec 3, 2024
EN2CORE technology, Inc.
Sae Hoon Uhm
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Surface processing equipment and surface processing method
Patent number
12,154,768
Issue date
Nov 26, 2024
Industrial Technology Research Institute
Chih-Chieh Chen
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Antimicrobial and/or antiviral polymer surfaces and methods for the...
Patent number
12,146,221
Issue date
Nov 19, 2024
MOLECULAR PLASMA GROUP SA
Raphael Dabbous
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma treatments for flexures of hard disk drives
Patent number
12,129,567
Issue date
Oct 29, 2024
Hutchinson Technology Incorporated
Kurt F. Fischer
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for parts cleaning
Patent number
11,967,491
Issue date
Apr 23, 2024
Semes Co., Ltd.
Soon-Cheon Cho
B08 - CLEANING
Information
Patent Grant
Method for handling an implant
Patent number
11,955,321
Issue date
Apr 9, 2024
NOVA PLASMA LTD.
Amnon Lam
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma generation device and plasma head cooling method
Patent number
11,929,237
Issue date
Mar 12, 2024
FUJI CORPORATION
Shinji Takikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus and method of cleaning vacuum processin...
Patent number
11,901,162
Issue date
Feb 13, 2024
ULVAC, Inc.
Takehisa Miyaya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Remote plasma cleaning of chambers for electronics manufacturing sy...
Patent number
11,854,773
Issue date
Dec 26, 2023
Applied Materials, Inc.
Yuanhong Guo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of treating a surface of a polymer material by atmospheric...
Patent number
11,830,707
Issue date
Nov 28, 2023
Corning Incorporated
Jiangwei Feng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetically enhanced high density plasma-chemical vapor deposition...
Patent number
11,821,068
Issue date
Nov 21, 2023
IonQuest Corp.
Bassam Hanna Abraham
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for photomask processing
Patent number
11,803,118
Issue date
Oct 31, 2023
Applied Materials, Inc.
Banqiu Wu
B08 - CLEANING
Information
Patent Grant
Plasma generating apparatus and method for operating same
Patent number
11,791,133
Issue date
Oct 17, 2023
EN2CORE technology, Inc.
Sae Hoon Uhm
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, material layer deposition apparatus...
Patent number
11,784,026
Issue date
Oct 10, 2023
Samsung Electronics Co., Ltd.
Woongsik Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Pulsed plasma chamber in dual chamber configuration
Patent number
11,670,486
Issue date
Jun 6, 2023
Lam Research Corporation
Alexei Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for plasma head helium measurement
Patent number
11,651,942
Issue date
May 16, 2023
Ontos Equipment Systems, Inc.
Robert Emmett Hughlett
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Two-phased atmospheric plasma generator
Patent number
11,651,943
Issue date
May 16, 2023
Nova Engineering Films, Inc.
Sang In Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Composition for atopy or psoriasis treatment comprising liquid type...
Patent number
11,583,689
Issue date
Feb 21, 2023
Ajou University Industry-Academic Cooperation Foundation
Chul Ho Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma generating apparatus and method for operating same
Patent number
11,532,455
Issue date
Dec 20, 2022
EN2CORE technology, Inc.
Sae-Hoon Uhm
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Container, apparatus and method for handling an implant
Patent number
11,382,732
Issue date
Jul 12, 2022
NOVA PLASMA LTD.
Amnon Lam
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma source and surface treatment method
Patent number
11,352,696
Issue date
Jun 7, 2022
Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
Yves Lodewijk Maria Creyghton
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Magnetically enhanced low temperature-high density plasma-chemical...
Patent number
11,306,391
Issue date
Apr 19, 2022
IonQuest Corp.
Bassam Hanna Abraham
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Magnetically enhanced high density plasma-chemical vapor deposition...
Patent number
11,286,555
Issue date
Mar 29, 2022
IonQuest Corp.
Bassam Hanna Abraham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrically and magnetically enhanced ionized physical vapor depos...
Patent number
11,255,012
Issue date
Feb 22, 2022
IonQuest Corp.
Bassam Hanna Abraham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma-generating device
Patent number
11,195,702
Issue date
Dec 7, 2021
FUJI CORPORATION
Takahiro Jindo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of treating a surface of a polymer material by atmospheric...
Patent number
11,170,980
Issue date
Nov 9, 2021
Corning Incorporated
Jiangwei Feng
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Atmospheric plasma processing systems and methods for manufacture o...
Patent number
11,049,700
Issue date
Jun 29, 2021
Tokyo Electron Limited
Anton J. deVilliers
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Atmospheric plasma device
Patent number
11,051,389
Issue date
Jun 29, 2021
COBI PLATEC CO., LTD.
Seong Young Kim
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Atmospheric pressure plasma device
Patent number
11,011,352
Issue date
May 18, 2021
Kyungpook National University Industry-Academic Cooperation Foundation
Heung-Sik Tae
B08 - CLEANING
Information
Patent Grant
Two-phased atmospheric plasma generator
Patent number
10,998,173
Issue date
May 4, 2021
Nova Engineering Films, Inc.
Sang In Lee
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SURFACE PROCESSING EQUIPMENT
Publication number
20250006475
Publication date
Jan 2, 2025
Industrial Technology Research Institute
Chih-Chieh Chen
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
INTEGRATED ATMOSPHERIC PLASMA TREATMENT STATION IN PROCESSING TOOL
Publication number
20240213089
Publication date
Jun 27, 2024
LAM RESEARCH CORPORATION
Navaneetha Krishnan SUBBAIYAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE AND METHOD FOR PLASMA GENERATION IN A WIDE PRESSURE RANGE AN...
Publication number
20240177979
Publication date
May 30, 2024
INFICON AG
Astrid WALDNER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SURFACE MODIFICATION METHOD
Publication number
20240162018
Publication date
May 16, 2024
Sekisui Chemical Co., Ltd
Eiji MIYAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR GENERATING ATMOSPHERIC PRESSURE, LOW TEMP...
Publication number
20240066161
Publication date
Feb 29, 2024
TellaPure, LLC
Edgar Bryan Hill
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REMOTE PLASMA CLEANING OF CHAMBERS FOR ELECTRONICS MANUFACTURING SY...
Publication number
20240062999
Publication date
Feb 22, 2024
Applied Materials, Inc.
Yuanhong Guo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
YTTRIUM-FLUORIDE-BASED SPRAYED COATING, SPRAYED MEMBER, AND METHOD...
Publication number
20240026515
Publication date
Jan 25, 2024
Shin-Etsu Chemical Co., Ltd.
Ryo Iwasaki
C01 - INORGANIC CHEMISTRY
Information
Patent Application
METHODS AND APPARATUS FOR PHOTOMASK PROCESSING
Publication number
20240027894
Publication date
Jan 25, 2024
Applied Materials, Inc.
Banqiu WU
B08 - CLEANING
Information
Patent Application
PLASMA GENERATING APPARATUS AND METHOD FOR OPERATING SAME
Publication number
20240006150
Publication date
Jan 4, 2024
EN2CORE technology, Inc
Sae Hoon UHM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PRECLEAN SYSTEM FOR CLUSTER TOOL
Publication number
20230402268
Publication date
Dec 14, 2023
Applied Materials, Inc.
Songjae LEE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEMS FOR FLUXLESS BONDING USING AN ATMOSPHERIC PRESSURE PLASMA A...
Publication number
20230378123
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Company Limited
Hui-Min Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SPOT TYPE ATMOSPHERIC PRESSURE PLASMA DEVICE
Publication number
20230377847
Publication date
Nov 23, 2023
CREATING NANO TECHNOLOGIES, INC.
Yi-Ming HSU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WIDE AREA ATMOSPHERIC PRESSURE PLASMA DEVICE
Publication number
20230377846
Publication date
Nov 23, 2023
CREATING NANO TECHNOLOGIES, INC.
Yi-Ming HSU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
Publication number
20230335398
Publication date
Oct 19, 2023
Kokusai Electric Corporation
Yuki TAIRA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PULSED PLASMA CHAMBER IN DUAL CHAMBER CONFIGURATION
Publication number
20230317412
Publication date
Oct 5, 2023
LAM RESEARCH CORPORATION
Alexei Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR ETCHING LITHIUM NIOBATE AND METHOD FOR FORMING LITHIUM N...
Publication number
20230307214
Publication date
Sep 28, 2023
Korea Institute of Science and Technology
Ho Joong JUNG
B08 - CLEANING
Information
Patent Application
PLASMA DEVICE FOR GAS-BASED SURFACE TREATMENT AND WATER ACTIVATION
Publication number
20230298858
Publication date
Sep 21, 2023
The Regents of the University of Michigan
John Foster
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ATMOSPHERIC PLASMA PROCESSING METHOD AND ATMOSPHERIC PLASMA PROCESS...
Publication number
20230253194
Publication date
Aug 10, 2023
FUJIFILM CORPORATION
Akihisa YOSHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF TREATING SUBSTRATE
Publication number
20230207290
Publication date
Jun 29, 2023
SEMES CO., LTD.
Sang Lim KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate Processing Apparatus, Substrate Processing Method, Method...
Publication number
20230187180
Publication date
Jun 15, 2023
Kokusai Electric Corporation
Yasunori EJIRI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ATMOSPHERIC PRESSURE REMOTE PLASMA CVD DEVICE, FILM FORMATION METHO...
Publication number
20230110364
Publication date
Apr 13, 2023
Suntory Holdings Limited
Masanori Nishiyama
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA GENERATING APPARATUS AND METHOD FOR OPERATING SAME
Publication number
20230083958
Publication date
Mar 16, 2023
EN2CORE technology, Inc
Sae Hoon UHM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE FOR PLASMA TREATMENT OF ELECTRONIC MATERIALS
Publication number
20230049702
Publication date
Feb 16, 2023
Surfx Technologies LLC
Thomas Scott Williams
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Device For Generating A Dielectric Barrier Discharge And Method For...
Publication number
20230046192
Publication date
Feb 16, 2023
TDK Electronics AG
Dariusz Korzec
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR REDIRECTING IONS GENERATED FROM ATMOSPHER...
Publication number
20230045456
Publication date
Feb 9, 2023
TellaPure, LLC
Edgar Bryan Hill
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
A PROCESS AND APPARATUS FOR THE PREPARATION OF A BONDED SUBSTRATE
Publication number
20220340416
Publication date
Oct 27, 2022
TOP TECHNOLOGY LTD
Youngho LEE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHODS AND APPARATUS FOR PHOTOMASK PROCESSING
Publication number
20220326607
Publication date
Oct 13, 2022
Banqiu WU
B08 - CLEANING
Information
Patent Application
ANTIMICROBIAL AND/OR ANTIVIRAL POLYMER SURFACES
Publication number
20220316064
Publication date
Oct 6, 2022
MOLECULAR PLASMA GROUP SA
Raphael DABBOUS
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SURFACE PROCESSING EQUIPMENT AND SURFACE PROCESSING METHOD
Publication number
20220208533
Publication date
Jun 30, 2022
Industrial Technology Research Institute
Chih-Chieh Chen
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...
Publication number
20220195585
Publication date
Jun 23, 2022
IonQuest Corp.
Bassam Hanna ABRAHAM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...