2842467

Information

• Patent Grant
• 2842467

• References
• Source

• Patent Number

  2,842,467

• Date Filed

  Not available

• Date Issued

  Tuesday, July 8, 1958
  66 years ago

• CPC

  • C30B15/20 - Controlling or regulating
  • C30B15/18 - using direct resistance heating in addition to other methods of heating
  • H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

• US Classifications

  • 117 - Single-crystal, oriented-crystal, and epitaxy growth processes
  • 438 - Semiconductor device manufacturing: process