3022164

Information

• Patent Grant
• 3022164

• References
• Source

• Patent Number

  3,022,164

• Date Filed

  Not available

• Date Issued

  Tuesday, February 20, 1962
  63 years ago

• CPC

  • G03F3/06 - by masking

• US Classifications

  • 430 - Radiation imagery chemistry: process, composition, or product thereof