3359143

Information

• Patent Grant
• 3359143

• References
• Source

• Patent Number

  3,359,143

• Date Filed

  Not available

• Date Issued

  Tuesday, December 19, 1967
  57 years ago

• CPC

  • C30B25/22 - Sandwich processes
  • H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • Y10S117/90 - Apparatus characterized by composition or treatment thereof
  • Y10S148/052 - Face to face deposition

• US Classifications

  • 117 - Single-crystal, oriented-crystal, and epitaxy growth processes
  • 148 - Metal treatment