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3386867
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Information
Patent Grant
3386867
References
Source
Patent Number
3,386,867
Date Filed
Not available
Date Issued
Tuesday, June 4, 1968
56 years ago
CPC
C23C14/16 - on metallic substrates or on substrates of boron or silicon
C23C14/58 - After-treatment
C23C14/5806 - Thermal treatment
C23C26/00 - Coating not provided for in groups C23C2/00 - C23C24/00
H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L47/00 - Bulk negative resistance effect devices
H01L47/005 - Processes or apparatus peculiar to the manufacture or treatment of these devices or of parts thereof
Y10S438/90 - Bulk effect device making
Y10T428/12528 - Semiconductor component
US Classifications
428 - Stock material or miscellaneous articles
148 - Metal treatment
257 - Active solid-state devices
438 - Semiconductor device manufacturing: process
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