3461836

Information

• Patent Grant
• 3461836

• References
• Source

• Patent Number

  3,461,836

• Date Filed

  Not available

• Date Issued

  Tuesday, August 19, 1969
  55 years ago

• CPC

  • C30B25/14 - Feed and outlet means for the gases Modifying the flow of the reactive gases
  • H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • Y10T29/5183 - Welding strip ends

• US Classifications

  • 118 - Coating apparatus
  • 029 - Metal working