Feed and outlet means for the gases Modifying the flow of the reactive gases

Industry

CPC
C30B25/14

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CCHEMISTRY METALLURGY C30Crystal growth C30BSINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL REFINING BY ZONE-MELTING OF MATERIAL PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH D... C30B25/00Single-crystal growth by chemical reaction of reactive gases

Current Industry

C30B25/14Feed and outlet means for the gases Modifying the flow of the reactive gases

Industries

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Patents Grantslast 30 patents

Information Patent Grant
SiC epitaxial wafer and method for manufacturing SIC epitaxial wafer
- Patent number 12,166,087
- Issue date Dec 10, 2024
- Resonac Corporation
- Naoto Ishibashi
- C30 - CRYSTAL GROWTH
Information Patent Grant
Adjustable fluid inlet assembly for a substrate processing apparatu...
- Patent number 12,110,588
- Issue date Oct 8, 2024
- Picosun Oy
- Timo Malinen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for producing 2D materials by moving forming layers dispose...
- Patent number 12,110,610
- Issue date Oct 8, 2024
- General Graphene Corp.
- James Vig Sherrill
- C30 - CRYSTAL GROWTH
Information Patent Grant
Gas-inlet element for a CVD reactor
- Patent number 12,084,767
- Issue date Sep 10, 2024
- Aixtron SE
- Oliver Schön
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Crystal growth apparatus
- Patent number 12,077,881
- Issue date Sep 3, 2024
- Ebner Industrieofenbau GmbH
- Robert Ebner
- C30 - CRYSTAL GROWTH
Information Patent Grant
Chamber architecture for epitaxial deposition and advanced epitaxia...
- Patent number 12,060,651
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Tetsuya Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Linear showerhead for growing GaN
- Patent number 12,060,652
- Issue date Aug 13, 2024
- SINO NITRIDE SEMICONDUCTOR CO., LTD.
- Ye Huang
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus and method for manufacturing hexagonal silicon crystal
- Patent number 12,054,849
- Issue date Aug 6, 2024
- Hyung Soo Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for growing high-quality heteroepitaxial monoclinic gallium...
- Patent number 12,049,709
- Issue date Jul 30, 2024
- YILDIZ TEKNIK UNIVERSITESI
- Fatih Akyol
- C30 - CRYSTAL GROWTH
Information Patent Grant
Multi-thermal CVD chambers with shared gas delivery and exhaust system
- Patent number 12,037,701
- Issue date Jul 16, 2024
- Applied Materials, Inc.
- Zhiyuan Ye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hydrogen recycle system and hydrogen recycle method
- Patent number 12,024,427
- Issue date Jul 2, 2024
- National University Corporation Tokai National Higher Education and Research...
- Shinji Kambara
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Vapor phase epitaxy method
- Patent number 11,955,334
- Issue date Apr 9, 2024
- Azur Space Solar Power GmbH
- Gregor Keller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing nitride semiconductor device
- Patent number 11,935,744
- Issue date Mar 19, 2024
- Sumitomo Electric Industries, Ltd.
- Isao Makabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High pressure spatial chemical vapor deposition system and related...
- Patent number 11,885,018
- Issue date Jan 30, 2024
- Lehigh University
- Siddha Pimputkar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single crystalline metal foil and manufacturing method therefor
- Patent number 11,879,183
- Issue date Jan 23, 2024
- Institute for Basic Science
- Rodney S. Ruoff
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Manufacturing apparatus for a group-III nitride crystal comprising...
- Patent number 11,879,184
- Issue date Jan 23, 2024
- Panasonic Holdings Corporation
- Yusuke Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase epitaxy method
- Patent number 11,859,310
- Issue date Jan 2, 2024
- Azur Space Solar Power GmbH
- Clemens Waechter
- C30 - CRYSTAL GROWTH
Information Patent Grant
Modular reactor for microwave plasma-assisted deposition
- Patent number 11,859,279
- Issue date Jan 2, 2024
- DIAM CONCEPT
- Alix Gicquel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and aggregates comprising boron nitride nanotube struc...
- Patent number 11,851,326
- Issue date Dec 26, 2023
- BNNano, Inc.
- Jason Edward Taylor
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of producing a two-dimensional material
- Patent number 11,848,206
- Issue date Dec 19, 2023
- Paragraf Ltd.
- Simon Charles Stewart Thomas
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
ALD method with multi-chambers for sic or multi-elements epitaxial...
- Patent number 11,834,754
- Issue date Dec 5, 2023
- SiEn (QingDao) Integrated Circuits Co., Ltd
- Zhaosheng Meng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas-phase reactor system-with a reaction chamber, a solid precursor...
- Patent number 11,814,747
- Issue date Nov 14, 2023
- ASM IP Holding B.V.
- John Tolle
- C30 - CRYSTAL GROWTH
Information Patent Grant
Silicon-containing product forming apparatus
- Patent number 11,795,543
- Issue date Oct 24, 2023
- Kabushiki Kaisha Toshiba
- Kenya Uchida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical source vessel with dip tube
- Patent number 11,781,221
- Issue date Oct 10, 2023
- ASM IP Holding B.V.
- Andrew Michael Yednak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, material layer deposition apparatus...
- Patent number 11,784,026
- Issue date Oct 10, 2023
- Samsung Electronics Co., Ltd.
- Woongsik Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction chamber
- Patent number 11,773,505
- Issue date Oct 3, 2023
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Gang Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for processing a substrate by oscillating a boundary layer o...
- Patent number 11,761,080
- Issue date Sep 19, 2023
- Applied Materials, Inc.
- Tsung-Han Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for applying a carbon layer to a substrate comprising introd...
- Patent number 11,746,415
- Issue date Sep 5, 2023
- CARBONCOMPETENCE GMBH
- Doris Steinmuller-Nethl
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase growth apparatus and vapor phase growth method
- Patent number 11,749,525
- Issue date Sep 5, 2023
- NUFLARE TECHNOLOGY, INC.
- Yoshiaki Daigo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Active cleaning vacuum system and method
- Patent number 11,739,439
- Issue date Aug 29, 2023
- Linton Crystal Technologies Corp.
- Richard D. Webb
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR PRODUCING NITROGEN COMPOUND
- Publication number 20240410077
- Publication date Dec 12, 2024
- NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Xuelun WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIQUID PRECURSOR CONTAINERS, LIQUID PRECURSOR SYSTEMS AND SEMICONDU...
- Publication number 20240376634
- Publication date Nov 14, 2024
- ASM IP HOLDING B.V.
- Krishnaswamy Mahadevan
- C30 - CRYSTAL GROWTH
Information Patent Application
LIQUID PRECURSOR CONTAINERS, LIQUID PRECURSOR SYSTEMS AND SEMICONDU...
- Publication number 20240376597
- Publication date Nov 14, 2024
- ASM IP HOLDING B.V.
- Fan Gao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE
- Publication number 20240371636
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wei-Min Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTION CHAMBER AND SEMICONDUCTOR EQUIPMENT
- Publication number 20240368803
- Publication date Nov 7, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Shikai LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Batch Mode Silicon Carbide Epitaxial Reactor
- Publication number 20240360589
- Publication date Oct 31, 2024
- ThinSiC Inc.
- Tirunelveli Subramaniam Ravi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MACROCELL ARCHITECTURAL STRUCTURES FOR HEAT EXCHANGE IN EPITAXIAL G...
- Publication number 20240360588
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Amir H. TAVAKOLI
- C30 - CRYSTAL GROWTH
Information Patent Application
GAS EXHAUST FRAMES INCLUDING PATHWAYS HAVING SIZE VARIATIONS, AND R...
- Publication number 20240360590
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-THERMAL CVD CHAMBERS WITH SHARED GAS DELIVERY AND EXHAUST SYSTEM
- Publication number 20240318351
- Publication date Sep 26, 2024
- Applied Materials, Inc.
- Zhiyuan YE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING DEVICE AND MANUFACTURING METHOD FOR GROUP III NITRIDE...
- Publication number 20240309551
- Publication date Sep 19, 2024
- Panasonic Holdings Corporation
- Junichi TAKINO
- C30 - CRYSTAL GROWTH
Information Patent Application
PROCESSING SYSTEMS, CHAMBERS, AND RELATED METHODS INCLUDING THERMOE...
- Publication number 20240309547
- Publication date Sep 19, 2024
- Applied Materials, Inc.
- Ala MORADIAN
- C30 - CRYSTAL GROWTH
Information Patent Application
PROCESSING SYSTEMS, CHAMBERS, AND RELATED METHODS INCLUDING TURBINE...
- Publication number 20240309548
- Publication date Sep 19, 2024
- Applied Materials, Inc.
- Awse MA'AYA
- C30 - CRYSTAL GROWTH
Information Patent Application
EPITAXIAL REACTION DEVICE
- Publication number 20240309550
- Publication date Sep 19, 2024
- Shenzhen Naso Tech Co Ltd
- Yunzhang XIAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SiC EPITAXIAL WAFER AND METHOD FOR MANUFACTURING SIC EPITAXIAL WAFER
- Publication number 20240274671
- Publication date Aug 15, 2024
- Resonac Corporation
- Naoto ISHIBASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INJECTORS, LINERS, PROCESS KITS, PROCESSING CHAMBERS, AND RELATED M...
- Publication number 20240254627
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Raja Murali DHAMODHARAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPI ISOLATION PLATE AND PARALLEL BLOCK PURGE FLOW TUNING FOR GROWTH...
- Publication number 20240254655
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPI ISOLATION PLATE WITH GAP AND ANGLE ADJUSTMENT FOR PROCESS TUNING
- Publication number 20240254654
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRE-HEAT RINGS AND PROCESSING CHAMBERS INCLUDING BLACK QUARTZ, AND...
- Publication number 20240247404
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Nimrod SMITH
- C30 - CRYSTAL GROWTH
Information Patent Application
FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD
- Publication number 20240240319
- Publication date Jul 18, 2024
- CV Research Corporation
- Hiroshi KAWAURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HYDROGEN RECYCLE SYSTEM AND HYDROGEN RECYCLE METHOD
- Publication number 20240217811
- Publication date Jul 4, 2024
- NATIONAL UNIVERSITY CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH...
- Shinji Kambara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR GROWTH DEVICE AND OPERATION METHOD THEREOF
- Publication number 20240218559
- Publication date Jul 4, 2024
- Suzhou Everbright Photonics Co., Ltd.
- Jun WANG
- C30 - CRYSTAL GROWTH
Information Patent Application
METHODS OF PROCESSING EPITAXIAL SEMICONDUCTOR WAFERS
- Publication number 20240218562
- Publication date Jul 4, 2024
- GLOBALWAFERS CO., LTD.
- Manabu Hamano
- C30 - CRYSTAL GROWTH
Information Patent Application
HIGH PRESSURE SPATIAL CHEMICAL VAPOR DEPOSITION SYSTEM AND RELATED...
- Publication number 20240209502
- Publication date Jun 27, 2024
- LEHIGH UNIVERSITY
- Siddha PIMPUTKAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER ARCHITECTURE FOR EPITAXIAL DEPOSITION AND ADVANCED EPITAXIA...
- Publication number 20240209544
- Publication date Jun 27, 2024
- Applied Materials, Inc.
- Tetsuya ISHIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR MANUFACTURING SEMICONDUCTOR WAFERS CONTAINING A GAS-PHA...
- Publication number 20240200226
- Publication date Jun 20, 2024
- Siltronic AG
- Ronny Hengst
- C30 - CRYSTAL GROWTH
Information Patent Application
SILICON CARBIDE SINGLE CRYSTAL AND MANUFACTURING METHOD OF SILICON...
- Publication number 20240191392
- Publication date Jun 13, 2024
- DENSO CORPORATION
- Akiyoshi HORIAI
- C30 - CRYSTAL GROWTH
Information Patent Application
EPITAXIAL GROWTH APPARATUS AND MULTI-LAYER GAS SUPPLY MODULE USED T...
- Publication number 20240183036
- Publication date Jun 6, 2024
- PJP TECH INC
- Bum Ho CHOI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS RECYCLING SYSTEMS, SUBSTRATE PROCESSING SYSTEMS, AND RELATED AP...
- Publication number 20240175126
- Publication date May 30, 2024
- Applied Materials, Inc.
- Mukhles SOWWAN
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
MULTI-DISC CHEMICAL VAPOR DEPOSITION SYSTEM WITH CROSS FLOW GAS INJ...
- Publication number 20240175133
- Publication date May 30, 2024
- VEECO INSTRUMENTS INC.
- Ajit Paranjpe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REFLECTOR UNIT AND FILM FORMING APPARATUS
- Publication number 20240167194
- Publication date May 23, 2024
- NUFLARE TECHNOLOGY, INC.
- Takuto UMETSU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Feed and outlet means for the gases Modifying the flow of the reactive gases

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

SiC epitaxial wafer and method for manufacturing SIC epitaxial wafer

Adjustable fluid inlet assembly for a substrate processing apparatu...

Methods for producing 2D materials by moving forming layers dispose...

Gas-inlet element for a CVD reactor

Crystal growth apparatus

Chamber architecture for epitaxial deposition and advanced epitaxia...

Linear showerhead for growing GaN

Apparatus and method for manufacturing hexagonal silicon crystal

Method for growing high-quality heteroepitaxial monoclinic gallium...

Multi-thermal CVD chambers with shared gas delivery and exhaust system

Hydrogen recycle system and hydrogen recycle method

Vapor phase epitaxy method

Method for manufacturing nitride semiconductor device

High pressure spatial chemical vapor deposition system and related...

Single crystalline metal foil and manufacturing method therefor

Manufacturing apparatus for a group-III nitride crystal comprising...

Vapor phase epitaxy method

Modular reactor for microwave plasma-assisted deposition

Compositions and aggregates comprising boron nitride nanotube struc...

Method of producing a two-dimensional material

ALD method with multi-chambers for sic or multi-elements epitaxial...

Gas-phase reactor system-with a reaction chamber, a solid precursor...

Silicon-containing product forming apparatus

Chemical source vessel with dip tube

Substrate processing apparatus, material layer deposition apparatus...

Reaction chamber

Method for processing a substrate by oscillating a boundary layer o...

Method for applying a carbon layer to a substrate comprising introd...

Vapor phase growth apparatus and vapor phase growth method

Active cleaning vacuum system and method

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR PRODUCING NITROGEN COMPOUND

LIQUID PRECURSOR CONTAINERS, LIQUID PRECURSOR SYSTEMS AND SEMICONDU...

LIQUID PRECURSOR CONTAINERS, LIQUID PRECURSOR SYSTEMS AND SEMICONDU...

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE

REACTION CHAMBER AND SEMICONDUCTOR EQUIPMENT

Batch Mode Silicon Carbide Epitaxial Reactor

MACROCELL ARCHITECTURAL STRUCTURES FOR HEAT EXCHANGE IN EPITAXIAL G...

GAS EXHAUST FRAMES INCLUDING PATHWAYS HAVING SIZE VARIATIONS, AND R...

MULTI-THERMAL CVD CHAMBERS WITH SHARED GAS DELIVERY AND EXHAUST SYSTEM

MANUFACTURING DEVICE AND MANUFACTURING METHOD FOR GROUP III NITRIDE...

PROCESSING SYSTEMS, CHAMBERS, AND RELATED METHODS INCLUDING THERMOE...

PROCESSING SYSTEMS, CHAMBERS, AND RELATED METHODS INCLUDING TURBINE...

EPITAXIAL REACTION DEVICE

SiC EPITAXIAL WAFER AND METHOD FOR MANUFACTURING SIC EPITAXIAL WAFER

INJECTORS, LINERS, PROCESS KITS, PROCESSING CHAMBERS, AND RELATED M...

EPI ISOLATION PLATE AND PARALLEL BLOCK PURGE FLOW TUNING FOR GROWTH...

EPI ISOLATION PLATE WITH GAP AND ANGLE ADJUSTMENT FOR PROCESS TUNING

PRE-HEAT RINGS AND PROCESSING CHAMBERS INCLUDING BLACK QUARTZ, AND...

FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD

HYDROGEN RECYCLE SYSTEM AND HYDROGEN RECYCLE METHOD

SEMICONDUCTOR GROWTH DEVICE AND OPERATION METHOD THEREOF

METHODS OF PROCESSING EPITAXIAL SEMICONDUCTOR WAFERS

HIGH PRESSURE SPATIAL CHEMICAL VAPOR DEPOSITION SYSTEM AND RELATED...

CHAMBER ARCHITECTURE FOR EPITAXIAL DEPOSITION AND ADVANCED EPITAXIA...

PROCESS FOR MANUFACTURING SEMICONDUCTOR WAFERS CONTAINING A GAS-PHA...

SILICON CARBIDE SINGLE CRYSTAL AND MANUFACTURING METHOD OF SILICON...

EPITAXIAL GROWTH APPARATUS AND MULTI-LAYER GAS SUPPLY MODULE USED T...

GAS RECYCLING SYSTEMS, SUBSTRATE PROCESSING SYSTEMS, AND RELATED AP...

MULTI-DISC CHEMICAL VAPOR DEPOSITION SYSTEM WITH CROSS FLOW GAS INJ...

REFLECTOR UNIT AND FILM FORMING APPARATUS