3475315

Information

• Patent Grant
• 3475315

• References
• Source

• Patent Number

  3,475,315

• Date Filed

  Not available

• Date Issued

  Tuesday, October 28, 1969
  55 years ago

• CPC

  • C23C14/3478 - using electrons
  • H01J37/34 - operating with cathodic sputtering

• US Classifications

  • 204 - Chemistry: electrical and wave energy