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3515663
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Information
Patent Grant
3515663
References
Source
Patent Number
3,515,663
Date Filed
Not available
Date Issued
Tuesday, June 2, 1970
54 years ago
CPC
C23C14/3478 - using electrons
C23C14/027 - Graded interfaces
H01L23/485 - consisting of layered constructions comprising conductive layers and insulating layers
H01L2924/0002 - Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
US Classifications
204 - Chemistry: electrical and wave energy
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