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3515954
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Information
Patent Grant
3515954
References
Source
Patent Number
3,515,954
Date Filed
Not available
Date Issued
Tuesday, June 2, 1970
54 years ago
CPC
H01L21/40 - Alloying of impurity materials
H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/383 - using diffusion into or out of a solid from or into a gaseous phase
H01L21/385 - using diffusion into or out of a solid from or into a solid phase
US Classifications
257 - Active solid-state devices
148 - Metal treatment
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