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3544756
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Information
Patent Grant
3544756
References
Source
Patent Number
3,544,756
Date Filed
Not available
Date Issued
Tuesday, December 1, 1970
54 years ago
CPC
H01J37/3053 - for evaporating or etching
C03C17/09 - by deposition from the vapour phase
C03C17/245 - by deposition from the vapour phase
C23C14/30 - by electron bombardment
C03C2217/213 - SiO2
C03C2217/263 - Metals other than noble metals, Cu or Hg
C03C2218/15 - from the vapour phase
C03C2218/151 - by vacuum evaporation
US Classifications
219 - Electric heating
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