3549433

Information

• Patent Grant
• 3549433

• References
• Source

• Patent Number

  3,549,433

• Date Filed

  Not available

• Date Issued

  Tuesday, December 22, 1970
  54 years ago

• CPC

  • C30B31/04 - by contacting with diffusion material in the liquid state
  • H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • Y10S134/902 - Semiconductor wafer
  • Y10S438/974 - Substrate surface preparation

• US Classifications

  • 438 - Semiconductor device manufacturing: process
  • 134 - Cleaning and liquid contact with solids