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3558274
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Information
Patent Grant
3558274
References
Source
Patent Number
3,558,274
Date Filed
Not available
Date Issued
Tuesday, January 26, 1971
53 years ago
CPC
C01B35/06 - Boron halogen compounds
C01B13/28 - using a plasma or an electric discharge
C01B25/12 - Oxides of phosphorus
C01B33/183 - by oxidation or hydrolysis in the vapour phase of silicon compounds such as halides, trichlorosilane, monosilane
C01B35/10 - Compounds containing boron and oxygen
C01G23/07 - Producing by vapour phase processes
H05B7/08 - non-consumable
H05B7/185 - Heating gases for arc discharge
C01P2002/54 - one element only
C01P2006/60 - Optical properties
C01P2006/80 - Compositional purity
US Classifications
423 - Chemistry of inorganic compounds
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