TREA

by oxidation or hydrolysis in the vapour phase of silicon compounds such as halides, trichlorosilane, monosilane

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Industry

  • CPC
  • C01B33/183
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Parent Industries

CCHEMISTRY METALLURGY C01Inorganic chemistry C01BNON-METALLIC ELEMENTS COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C C01B33/00Silicon Compounds thereof

Current Industry

C01B33/183by oxidation or hydrolysis in the vapour phase of silicon compounds such as halides, trichlorosilane, monosilane
Industries