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3574009
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Information
Patent Grant
3574009
References
Source
Patent Number
3,574,009
Date Filed
Not available
Date Issued
Tuesday, April 6, 1971
53 years ago
CPC
H01L21/2255 - the applied layer comprising oxides only
H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Y10S148/015 - Capping layer
Y10S148/049 - Equivalence and options
Y10S148/051 - Etching
Y10S148/085 - Isolated-integrated
Y10S148/144 - Shallow diffusion
Y10S148/145 - Shaped junctions
Y10S438/92 - Controlling diffusion profile by oxidation
US Classifications
438 - Semiconductor device manufacturing: process
065 - Glass manufacturing
148 - Metal treatment
257 - Active solid-state devices
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