3574546

Information

• Patent Grant
• 3574546

• References
• Source

• Patent Number

  3,574,546

• Date Filed

  Not available

• Date Issued

  Tuesday, April 13, 1971
  53 years ago

• CPC

  • B82Y30/00 - Nano-technology for materials or surface science
  • B01J12/002 - carried out in the plasma state
  • C01B13/28 - using a plasma or an electric discharge
  • C01B33/02 - Silicon
  • C01B33/183 - by oxidation or hydrolysis in the vapour phase of silicon compounds such as halides, trichlorosilane, monosilane
  • C01G23/07 - Producing by vapour phase processes
  • C01G25/02 - Oxides
  • C01P2004/62 - Submicrometer sized
  • C01P2004/64 - Nanometer sized
  • C01P2004/84 - one phase coated with the other
  • C01P2006/60 - Optical properties
  • C01P2006/80 - Compositional purity
  • C01P2006/82 - water content

• US Classifications

  • 423 - Chemistry of inorganic compounds