3592773

Information

• Patent Grant
• 3592773

• References
• Source

• Patent Number

  3,592,773

• Date Filed

  Not available

• Date Issued

  Tuesday, July 13, 1971
  53 years ago

• CPC

  • C09K13/08 - containing a fluorine compound
  • Y10S148/051 - Etching
  • Y10S148/054 - Flat sheets-substrates

• US Classifications

  • 438 - Semiconductor device manufacturing: process
  • 148 - Metal treatment
  • 252 - Compositions