3597289

Information

• Patent Grant
• 3597289

• References
• Source

• Patent Number

  3,597,289

• Date Filed

  Not available

• Date Issued

  Tuesday, August 3, 1971
  53 years ago

• CPC

  • H01L21/30604 - Chemical etching
  • Y10S148/054 - Flat sheets-substrates

• US Classifications

  • 438 - Semiconductor device manufacturing: process
  • 148 - Metal treatment
  • 257 - Active solid-state devices