Chemical etching

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CPC
H01L21/30604

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/30604Chemical etching

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Contact with a silicide region
- Patent number 12,328,890
- Issue date Jun 10, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Wen Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
3D isolation of a segmentated 3D nanosheet channel region
- Patent number 12,328,919
- Issue date Jun 10, 2025
- Tokyo Electron Limited
- Mark I. Gardner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor substrate polishing method
- Patent number 12,327,719
- Issue date Jun 10, 2025
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Shay Reboh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated circuit device with source/drain barrier
- Patent number 12,324,201
- Issue date Jun 3, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Feng-Ching Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure and method for forming same
- Patent number 12,322,589
- Issue date Jun 3, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Xiang Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment apparatus, substrate treatment method, substrat...
- Patent number 12,322,600
- Issue date Jun 3, 2025
- SCREEN Holdings Co., Ltd.
- Hideji Naohara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating Fin-type field-effect transistor device havin...
- Patent number 12,324,224
- Issue date Jun 3, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Hung Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method
- Patent number 12,317,524
- Issue date May 27, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chia-Ling Chan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for making semiconductor device with selective etching of su...
- Patent number 12,315,723
- Issue date May 27, 2025
- ATOMERA INCORPORATED
- Marek Hytha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Step-stacked nanowire CMOS structure for low power logic device and...
- Patent number 12,317,588
- Issue date May 27, 2025
- Samsung Electronics Co., Ltd.
- Byounghak Hong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated circuit structure with backside dielectric layer having...
- Patent number 12,308,287
- Issue date May 20, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Che-Lun Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
3D semiconductor device and array layout with isolated conductive p...
- Patent number 12,310,023
- Issue date May 20, 2025
- Macronix International Co., Ltd.
- Hang-Ting Lue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,308,258
- Issue date May 20, 2025
- SCREEN Holdings Co., Ltd.
- Tomohiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-gate device with air gap spacer and fabrication methods thereof
- Patent number 12,300,720
- Issue date May 13, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Pei-Yu Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Epitaxial structures exposed in airgaps for semiconductor devices
- Patent number 12,302,615
- Issue date May 13, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Po-Yu Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device including alternating semiconductor layers wit...
- Patent number 12,302,609
- Issue date May 13, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsin-Wen Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Devices and methods for reducing stress on circuit components
- Patent number 12,300,631
- Issue date May 13, 2025
- Analog Devices International Unlimited Company
- Padraig Fitzgerald
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge-trimming methods for wafer bonding and dicing
- Patent number 12,300,664
- Issue date May 13, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Feng-Chien Hsieh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer with devices having different top layer thickne...
- Patent number 12,302,637
- Issue date May 13, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Gulbagh Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Formulations to selectively etch silicon-germanium relative to silicon
- Patent number 12,300,498
- Issue date May 13, 2025
- Entegris, Inc.
- Steven M. Bilodeau
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Semiconductor devices
- Patent number 12,300,728
- Issue date May 13, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Sai-Hooi Yeong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integration of multiple transistors having fin and mesa structures
- Patent number 12,283,595
- Issue date Apr 22, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Sung-Hsin Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and etching apparatus
- Patent number 12,283,489
- Issue date Apr 22, 2025
- Tokyo Electron Limited
- Satoshi Toda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pattern decomposition lithography techniques
- Patent number 12,278,204
- Issue date Apr 15, 2025
- Intel Corporation
- Charles H. Wallace
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor devices having funnel-shaped gate structures
- Patent number 12,278,267
- Issue date Apr 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shu-Han Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 12,278,233
- Issue date Apr 15, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Che-Cheng Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor storage device and method of manufacturing semiconduc...
- Patent number 12,274,059
- Issue date Apr 8, 2025
- Kioxia Corporation
- Tomohiro Kuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low warpage high density trench capacitor
- Patent number 12,272,725
- Issue date Apr 8, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jyun-Ying Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon etching solution and method for producing silicon device us...
- Patent number 12,269,980
- Issue date Apr 8, 2025
- Tokuyama Corporation
- Yoshiki Seike
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Gate-all-around integrated circuit structures having embedded GeSnB...
- Patent number 12,272,727
- Issue date Apr 8, 2025
- Intel Corporation
- Cory Bomberger
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUSES AND METHODS FOR ORGANIZING DATA IN A MEMORY DEVICE
- Publication number 20250191969
- Publication date Jun 12, 2025
- Lodestar Licensing Group, LLC
- Glen E. Hush
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-ALIGNED INNER SPACER ON GATE-ALL-AROUND STRUCTURE AND METHODS...
- Publication number 20250194203
- Publication date Jun 12, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsungyu Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MONOLITHIC COMPLEMENTARY FIELD-EFFECT TRANSISTORS HAVING CARBON-DOP...
- Publication number 20250194243
- Publication date Jun 12, 2025
- Applied Materials, Inc.
- Andrew Anthony Cockburn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLANARIZATION METHOD OF WAFER
- Publication number 20250191925
- Publication date Jun 12, 2025
- NANYA TECHNOLOGY CORPORATION
- Kai ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250183042
- Publication date Jun 5, 2025
- SCREEN Holdings Co., Ltd.
- Tsung Ju LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING S...
- Publication number 20250183061
- Publication date Jun 5, 2025
- KIOXIA Corporation
- Satoshi NAKAOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method Of Forming Backside Power Rails
- Publication number 20250185330
- Publication date Jun 5, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Yu Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250183043
- Publication date Jun 5, 2025
- TOKYO ELECTRON LIMITED
- Nobuhiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PI-TYPE TRENCH GATE SILICON CARBIDE MOSFET DEVICE AND FABRICATION M...
- Publication number 20250176207
- Publication date May 29, 2025
- JSAB Technologies (Shenzhen) Ltd.
- Yong LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR ETCHING SILICON OXIDE
- Publication number 20250174464
- Publication date May 29, 2025
- Central Glass Company, Limited
- Shoi SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SEMICONDUCTOR D...
- Publication number 20250176242
- Publication date May 29, 2025
- SK HYNIX INC.
- Na Hye WON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE WITH FIN END SPACER DUMMY GATE AND METHOD OF M...
- Publication number 20250176240
- Publication date May 29, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Tai CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STACKED TRANSISTORS WITH DIFFERENT CHANNEL WIDTHS
- Publication number 20250169157
- Publication date May 22, 2025
- Adeia Semiconductor Solutions LLC
- Kangguo Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CHUCK ASSEMBLY
- Publication number 20250167037
- Publication date May 22, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Hsi Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHANT COMPOSITION FOR ETCHING SILICON GERMANIUM FILM AND METHOD O...
- Publication number 20250163323
- Publication date May 22, 2025
- Samsung Electronics Co., Ltd.
- Changjun PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING SOLUTION COMPOSITION AND ETCHING METHOD
- Publication number 20250154661
- Publication date May 15, 2025
- Hiroki INAZUMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITION, AND SEMICONDUCTOR SUBSTRATE MANUFACTURING METHOD AND E...
- Publication number 20250154410
- Publication date May 15, 2025
- Mitsubishi Gas Chemical Company, Inc.
- Toshiyuki OIE
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METHOD OF OBTAINING NANOSCALE LINE BY USING LASER
- Publication number 20250157816
- Publication date May 15, 2025
- Institute of Microelectronics, Chinese Academy of Sciences
- Jinbiao Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHODS
- Publication number 20250157825
- Publication date May 15, 2025
- Fujifilm Electronic Materials U.S.A., Inc.
- Keeyoung Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TREATMENT DEVICE AND WAFER TREATMENT METHOD
- Publication number 20250157838
- Publication date May 15, 2025
- SwaySure Technology Co., Ltd.
- Zhibo Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20250159936
- Publication date May 15, 2025
- Semiconductor Energy Laboratory Co., Ltd.
- Takahiro SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FORMING THROUGH-GLASS VIAS
- Publication number 20250157812
- Publication date May 15, 2025
- Corning Incorporated
- Jason Roy Grenier
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN FILM TRANSISTOR DEVICE AND MANUFACTURING METHOD THEREOF, COMPO...
- Publication number 20250151308
- Publication date May 8, 2025
- WUHAN BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Zhaojian WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTACT ARCHITECTURE FOR CAPACITANCE REDUCTION AND SATISFACTORY CON...
- Publication number 20250151363
- Publication date May 8, 2025
- Intel Corporation
- Rishabh MEHANDRU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FIELD EFFECT TRANSISTOR, DEVICE INCLUDING THE TRANSISTOR, AND METHO...
- Publication number 20250147013
- Publication date May 8, 2025
- iNanoBio, Inc.
- Bharath Takulapalli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE WITH METAL GATE FILL STRUCTURE
- Publication number 20250140563
- Publication date May 1, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chung-Liang CHENG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20250142879
- Publication date May 1, 2025
- Hon Young Semiconductor Corporation
- Yan-Ru CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250140581
- Publication date May 1, 2025
- TOKYO ELECTRON LIMITED
- Masami YAMASHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching Compositions
- Publication number 20250136865
- Publication date May 1, 2025
- Fujifilm Electronic Materials U.S.A., Inc.
- Keeyoung Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
USE OF TIN THIN FILM FOR BONDING AND AS MASKING FILM
- Publication number 20250132158
- Publication date Apr 24, 2025
- University of South-Eastern Norway
- Avisek ROY
- H01 - BASIC ELECTRIC ELEMENTS

Chemical etching

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Contact with a silicide region

3D isolation of a segmentated 3D nanosheet channel region

Semiconductor substrate polishing method

Integrated circuit device with source/drain barrier

Semiconductor structure and method for forming same

Substrate treatment apparatus, substrate treatment method, substrat...

Method of fabricating Fin-type field-effect transistor device havin...

Semiconductor device and method

Method for making semiconductor device with selective etching of su...

Step-stacked nanowire CMOS structure for low power logic device and...

Integrated circuit structure with backside dielectric layer having...

3D semiconductor device and array layout with isolated conductive p...

Substrate processing apparatus and substrate processing method

Multi-gate device with air gap spacer and fabrication methods thereof

Epitaxial structures exposed in airgaps for semiconductor devices

Semiconductor device including alternating semiconductor layers wit...

Devices and methods for reducing stress on circuit components

Edge-trimming methods for wafer bonding and dicing

Semiconductor wafer with devices having different top layer thickne...

Formulations to selectively etch silicon-germanium relative to silicon

Semiconductor devices

Integration of multiple transistors having fin and mesa structures

Etching method and etching apparatus

Pattern decomposition lithography techniques

Semiconductor devices having funnel-shaped gate structures

Semiconductor device and manufacturing method thereof

Semiconductor storage device and method of manufacturing semiconduc...

Low warpage high density trench capacitor

Silicon etching solution and method for producing silicon device us...

Gate-all-around integrated circuit structures having embedded GeSnB...

Patents Applicationslast 30 patents

APPARATUSES AND METHODS FOR ORGANIZING DATA IN A MEMORY DEVICE

SELF-ALIGNED INNER SPACER ON GATE-ALL-AROUND STRUCTURE AND METHODS...

MONOLITHIC COMPLEMENTARY FIELD-EFFECT TRANSISTORS HAVING CARBON-DOP...

PLANARIZATION METHOD OF WAFER

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING S...

Method Of Forming Backside Power Rails

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

PI-TYPE TRENCH GATE SILICON CARBIDE MOSFET DEVICE AND FABRICATION M...

METHOD AND DEVICE FOR ETCHING SILICON OXIDE

SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SEMICONDUCTOR D...

SEMICONDUCTOR DEVICE WITH FIN END SPACER DUMMY GATE AND METHOD OF M...

STACKED TRANSISTORS WITH DIFFERENT CHANNEL WIDTHS

WAFER CHUCK ASSEMBLY

ETCHANT COMPOSITION FOR ETCHING SILICON GERMANIUM FILM AND METHOD O...

ETCHING SOLUTION COMPOSITION AND ETCHING METHOD

COMPOSITION, AND SEMICONDUCTOR SUBSTRATE MANUFACTURING METHOD AND E...

METHOD OF OBTAINING NANOSCALE LINE BY USING LASER

ETCHING METHODS

WAFER TREATMENT DEVICE AND WAFER TREATMENT METHOD

SEMICONDUCTOR DEVICE

METHODS FOR FORMING THROUGH-GLASS VIAS

THIN FILM TRANSISTOR DEVICE AND MANUFACTURING METHOD THEREOF, COMPO...

CONTACT ARCHITECTURE FOR CAPACITANCE REDUCTION AND SATISFACTORY CON...

FIELD EFFECT TRANSISTOR, DEVICE INCLUDING THE TRANSISTOR, AND METHO...

SEMICONDUCTOR DEVICE WITH METAL GATE FILL STRUCTURE

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Etching Compositions

USE OF TIN THIN FILM FOR BONDING AND AS MASKING FILM