Chemical etching

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H01L21/30604

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/30604Chemical etching

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Microelectronic devices with through-substrate interconnects and as...
- Patent number 12,368,096
- Issue date Jul 22, 2025
- Kyle K. Kirby
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Increasing source/drain dopant concentration to reduced resistance
- Patent number 12,369,342
- Issue date Jul 22, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Jing Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method
- Patent number 12,369,387
- Issue date Jul 22, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chao-Ching Cheng
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Semiconductor devices and methods of manufacturing thereof
- Patent number 12,362,189
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Ling Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure, fabrication method and three-dimensional m...
- Patent number 12,362,223
- Issue date Jul 15, 2025
- Yangtze Memory Technologies Co., Ltd.
- Teng Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Formation of gate all around device
- Patent number 12,363,948
- Issue date Jul 15, 2025
- Applied Materials, Inc.
- Myungsun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultra-thin fin structure and method of fabricating the same
- Patent number 12,363,958
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Sherry Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integration methods to fabricate internal spacers for nanowire devices
- Patent number 12,363,967
- Issue date Jul 15, 2025
- Sony Group Corporation
- Seiyon Kim
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Dielectric structures in semiconductor devices
- Patent number 12,363,933
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chien-Hung Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating a strained structure and structure formed
- Patent number 12,356,674
- Issue date Jul 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tsung-Lin Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical integrated circuit structure including edge coupling protec...
- Patent number 12,353,034
- Issue date Jul 8, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Chen-Hao Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface modification layer for conductive feature formation
- Patent number 12,347,724
- Issue date Jul 1, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jian-Jou Lian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wet bench process with in-situ pre-treatment operation
- Patent number 12,347,692
- Issue date Jul 1, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chung-Wei Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical solution-resistant protective film forming composition con...
- Patent number 12,344,758
- Issue date Jul 1, 2025
- NISSAN CHEMICAL CORPORATION
- Takafumi Endo
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Semiconductor devices with Fin-top hard mask and methods for fabric...
- Patent number 12,349,378
- Issue date Jul 1, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Ruei Jhan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low leakage device
- Patent number 12,342,613
- Issue date Jun 24, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Cheng-Ting Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing through vias using amorphization to adjust...
- Patent number 12,341,060
- Issue date Jun 24, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Ching Kang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for producing an edge structure of a semiconducto...
- Patent number 12,342,581
- Issue date Jun 24, 2025
- INFINEON TECHNOLOGIES BIPOLAR GMBH & CO. KG
- Tobias Gamon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor devices and methods of manufacturing thereof
- Patent number 12,342,565
- Issue date Jun 24, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chia-Cheng Chao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure and manufacturing method thereof
- Patent number 12,334,440
- Issue date Jun 17, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Yongxiang Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of forming gate structures with uniform gate length
- Patent number 12,336,266
- Issue date Jun 17, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shahaji B. More
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Contact with a silicide region
- Patent number 12,328,890
- Issue date Jun 10, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Wen Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
3D isolation of a segmentated 3D nanosheet channel region
- Patent number 12,328,919
- Issue date Jun 10, 2025
- Tokyo Electron Limited
- Mark I. Gardner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor substrate polishing method
- Patent number 12,327,719
- Issue date Jun 10, 2025
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Shay Reboh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated circuit device with source/drain barrier
- Patent number 12,324,201
- Issue date Jun 3, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Feng-Ching Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure and method for forming same
- Patent number 12,322,589
- Issue date Jun 3, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Xiang Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment apparatus, substrate treatment method, substrat...
- Patent number 12,322,600
- Issue date Jun 3, 2025
- SCREEN Holdings Co., Ltd.
- Hideji Naohara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating Fin-type field-effect transistor device havin...
- Patent number 12,324,224
- Issue date Jun 3, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Hung Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method
- Patent number 12,317,524
- Issue date May 27, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chia-Ling Chan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for making semiconductor device with selective etching of su...
- Patent number 12,315,723
- Issue date May 27, 2025
- ATOMERA INCORPORATED
- Marek Hytha
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LOW WARPAGE HIGH DENSITY TRENCH CAPACITOR
- Publication number 20250240981
- Publication date Jul 24, 2025
- Taiwan Semiconductor Manufacturing Co., LTD
- Jyun-Ying LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE HAVING NANOSHEET TRANSISTOR AND METHODS OF FAB...
- Publication number 20250234592
- Publication date Jul 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Bo Wei LAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CALABASH-SHAPED MIM CAPACITOR STRUCTURE AND FABRICATING METHOD OF T...
- Publication number 20250234569
- Publication date Jul 17, 2025
- UNITED MICROELECTRONICS CORP.
- Yao-Hsien Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250226206
- Publication date Jul 10, 2025
- Kokusai Electric Corporation
- Daigo YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR PROTECTING A PERIPHERAL EDGE AND BACKSIDE OF A SEMICOND...
- Publication number 20250226208
- Publication date Jul 10, 2025
- TOKYO ELECTRON LIMITED
- Shan Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PRODUCING A STRUCTURE COMPRISING AT LEAST TWO CHIPS ON A...
- Publication number 20250226225
- Publication date Jul 10, 2025
- SOITEC
- Bruno Ghyselen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20250218785
- Publication date Jul 3, 2025
- TES CO., LTD.
- Bongsoo KWON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME
- Publication number 20250218772
- Publication date Jul 3, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- JOHNNY CHIAHAO LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATION OF MULTIPLE TRANSISTORS HAVING FIN AND MESA STRUCTURES
- Publication number 20250221033
- Publication date Jul 3, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Sung-Hsin Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING A SEMICONDUCTOR STRUCTURE
- Publication number 20250212495
- Publication date Jun 26, 2025
- IMEC vzw
- Boon Teik Chan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250205760
- Publication date Jun 26, 2025
- SEMES CO., LTD.
- So Young PARK
- B08 - CLEANING
Information Patent Application
METHOD FOR FORMING HYDROPHOBIC ZONES ON A SUBSTRATE
- Publication number 20250210360
- Publication date Jun 26, 2025
- Commissariat a I'Energie Atomique et aux Energies Alternatives
- Franck Fournel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INNER SPACER STRUCTURE AND METHODS OF FORMING SUCH
- Publication number 20250212498
- Publication date Jun 26, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Che-Lun Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Formation Of Gate All Around Device
- Publication number 20250203942
- Publication date Jun 19, 2025
- Applied Materials, Inc.
- Myungsun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
- Publication number 20250201593
- Publication date Jun 19, 2025
- SCREEN Holdings Co., Ltd.
- Masaki INABA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, MANUFACTURING METHOD, AND SUBSTRATE PR...
- Publication number 20250201567
- Publication date Jun 19, 2025
- SEMES CO., LTD.
- Min Jung KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INNER SPACER STRUCTURES FOR GATE-ALL-AROUND FIELD EFFECT TRANSISTORS
- Publication number 20250203992
- Publication date Jun 19, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Mrunal Abhijith KHADERBAD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUSES AND METHODS FOR ORGANIZING DATA IN A MEMORY DEVICE
- Publication number 20250191969
- Publication date Jun 12, 2025
- Lodestar Licensing Group, LLC
- Glen E. Hush
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-ALIGNED INNER SPACER ON GATE-ALL-AROUND STRUCTURE AND METHODS...
- Publication number 20250194203
- Publication date Jun 12, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsungyu Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MONOLITHIC COMPLEMENTARY FIELD-EFFECT TRANSISTORS HAVING CARBON-DOP...
- Publication number 20250194243
- Publication date Jun 12, 2025
- Applied Materials, Inc.
- Andrew Anthony Cockburn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLANARIZATION METHOD OF WAFER
- Publication number 20250191925
- Publication date Jun 12, 2025
- NANYA TECHNOLOGY CORPORATION
- Kai ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250183042
- Publication date Jun 5, 2025
- SCREEN Holdings Co., Ltd.
- Tsung Ju LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING S...
- Publication number 20250183061
- Publication date Jun 5, 2025
- KIOXIA Corporation
- Satoshi NAKAOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250183043
- Publication date Jun 5, 2025
- TOKYO ELECTRON LIMITED
- Nobuhiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method Of Forming Backside Power Rails
- Publication number 20250185330
- Publication date Jun 5, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Yu Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR ETCHING SILICON OXIDE
- Publication number 20250174464
- Publication date May 29, 2025
- Central Glass Company, Limited
- Shoi SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PI-TYPE TRENCH GATE SILICON CARBIDE MOSFET DEVICE AND FABRICATION M...
- Publication number 20250176207
- Publication date May 29, 2025
- JSAB Technologies (Shenzhen) Ltd.
- Yong LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SEMICONDUCTOR D...
- Publication number 20250176242
- Publication date May 29, 2025
- SK HYNIX INC.
- Na Hye WON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE WITH FIN END SPACER DUMMY GATE AND METHOD OF M...
- Publication number 20250176240
- Publication date May 29, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Tai CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STACKED TRANSISTORS WITH DIFFERENT CHANNEL WIDTHS
- Publication number 20250169157
- Publication date May 22, 2025
- Adeia Semiconductor Solutions LLC
- Kangguo Cheng
- H01 - BASIC ELECTRIC ELEMENTS

Chemical etching

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Microelectronic devices with through-substrate interconnects and as...

Increasing source/drain dopant concentration to reduced resistance

Semiconductor device and method

Semiconductor devices and methods of manufacturing thereof

Semiconductor structure, fabrication method and three-dimensional m...

Formation of gate all around device

Ultra-thin fin structure and method of fabricating the same

Integration methods to fabricate internal spacers for nanowire devices

Dielectric structures in semiconductor devices

Method for fabricating a strained structure and structure formed

Optical integrated circuit structure including edge coupling protec...

Surface modification layer for conductive feature formation

Wet bench process with in-situ pre-treatment operation

Chemical solution-resistant protective film forming composition con...

Semiconductor devices with Fin-top hard mask and methods for fabric...

Low leakage device

Method for manufacturing through vias using amorphization to adjust...

Method and device for producing an edge structure of a semiconducto...

Semiconductor devices and methods of manufacturing thereof

Semiconductor structure and manufacturing method thereof

Methods of forming gate structures with uniform gate length

Contact with a silicide region

3D isolation of a segmentated 3D nanosheet channel region

Semiconductor substrate polishing method

Integrated circuit device with source/drain barrier

Semiconductor structure and method for forming same

Substrate treatment apparatus, substrate treatment method, substrat...

Method of fabricating Fin-type field-effect transistor device havin...

Semiconductor device and method

Method for making semiconductor device with selective etching of su...

Patents Applicationslast 30 patents

LOW WARPAGE HIGH DENSITY TRENCH CAPACITOR

SEMICONDUCTOR DEVICE HAVING NANOSHEET TRANSISTOR AND METHODS OF FAB...

CALABASH-SHAPED MIM CAPACITOR STRUCTURE AND FABRICATING METHOD OF T...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

METHODS FOR PROTECTING A PERIPHERAL EDGE AND BACKSIDE OF A SEMICOND...

METHOD FOR PRODUCING A STRUCTURE COMPRISING AT LEAST TWO CHIPS ON A...

SUBSTRATE PROCESSING METHOD

SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME

INTEGRATION OF MULTIPLE TRANSISTORS HAVING FIN AND MESA STRUCTURES

METHOD FOR FORMING A SEMICONDUCTOR STRUCTURE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

METHOD FOR FORMING HYDROPHOBIC ZONES ON A SUBSTRATE

INNER SPACER STRUCTURE AND METHODS OF FORMING SUCH

Formation Of Gate All Around Device

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

SUBSTRATE PROCESSING METHOD, MANUFACTURING METHOD, AND SUBSTRATE PR...

INNER SPACER STRUCTURES FOR GATE-ALL-AROUND FIELD EFFECT TRANSISTORS

APPARATUSES AND METHODS FOR ORGANIZING DATA IN A MEMORY DEVICE

SELF-ALIGNED INNER SPACER ON GATE-ALL-AROUND STRUCTURE AND METHODS...

MONOLITHIC COMPLEMENTARY FIELD-EFFECT TRANSISTORS HAVING CARBON-DOP...

PLANARIZATION METHOD OF WAFER

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING S...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Method Of Forming Backside Power Rails

METHOD AND DEVICE FOR ETCHING SILICON OXIDE

PI-TYPE TRENCH GATE SILICON CARBIDE MOSFET DEVICE AND FABRICATION M...

SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SEMICONDUCTOR D...

SEMICONDUCTOR DEVICE WITH FIN END SPACER DUMMY GATE AND METHOD OF M...

STACKED TRANSISTORS WITH DIFFERENT CHANNEL WIDTHS