3604546

Information

• Patent Grant
• 3604546

• References
• Source

• Patent Number

  3,604,546

• Date Filed

  Not available

• Date Issued

  Tuesday, September 14, 1971
  53 years ago

• CPC

  • G03F7/70691 - Handling of masks or wafers
  • G05D3/14 - using an analogue comparing device
  • H01L21/682 - Mask-wafer alignment
  • Y10T74/18352 - Trammel-pitman

• US Classifications

  • 192 - Clutches and power-stop control
  • 074 - Machine element or mechanism
  • 318 - Electricity: motive power systems
  • 464 - Rotary shafts, gudgeons, housings, and flexible couplings for rotary shafts