3607478

Information

• Patent Grant
• 3607478

• References
• Source

• Patent Number

  3,607,478

• Date Filed

  Not available

• Date Issued

  Tuesday, September 21, 1971
  53 years ago

• CPC

  • C23F1/00 - Etching metallic material by chemical means
  • B24B31/027 - with additional oscillating movement
  • C23F1/08 - Apparatus
  • H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

• US Classifications

  • 438 - Semiconductor device manufacturing: process
  • 134 - Cleaning and liquid contact with solids
  • 366 - Agitating