3617216

Information

• Patent Grant
• 3617216

• References
• Source

• Patent Number

  3,617,216

• Date Filed

  Not available

• Date Issued

  Tuesday, November 2, 1971
  53 years ago

• CPC

  • C01G23/07 - Producing by vapour phase processes
  • C01B13/28 - using a plasma or an electric discharge
  • C01B33/183 - by oxidation or hydrolysis in the vapour phase of silicon compounds such as halides, trichlorosilane, monosilane
  • C01P2006/60 - Optical properties
  • C01P2006/80 - Compositional purity

• US Classifications

  • 423 - Chemistry of inorganic compounds
  • 204 - Chemistry: electrical and wave energy