3630767

Information

• Patent Grant
• 3630767

• References
• Source

• Patent Number

  3,630,767

• Date Filed

  Not available

• Date Issued

  Tuesday, December 28, 1971
  53 years ago

• CPC

  • H01L21/288 - from a liquid
  • D01H7/923 - by means of rotating devices
  • Y10T428/24917 - including metal layer

• US Classifications

  • 438 - Semiconductor device manufacturing: process
  • 257 - Active solid-state devices
  • 427 - Coating processes
  • 428 - Stock material or miscellaneous articles