3670220

Information

• Patent Grant
• 3670220

• References
• Source

• Patent Number

  3,670,220

• Date Filed

  Not available

• Date Issued

  Tuesday, June 13, 1972
  52 years ago

• CPC

  • H01L33/285 - characterised by the doping materials
  • H01L21/38 - Diffusion of impurity materials
  • H01L21/383 - using diffusion into or out of a solid from or into a gaseous phase
  • H01L21/388 - using diffusion into or out of a solid from or into a liquid phase
  • H01L33/0066 - with a substrate not being a III-V compound
  • Y10S252/95 - Doping agent source material
  • Y10S252/951 - for vapor transport

• US Classifications

  • 257 - Active solid-state devices
  • 252 - Compositions
  • 438 - Semiconductor device manufacturing: process