3674995

Information

• Patent Grant
• 3674995

• References
• Source

• Patent Number

  3,674,995

• Date Filed

  Not available

• Date Issued

  Tuesday, July 4, 1972
  52 years ago

• CPC

  • G01R31/305 - using electron beams
  • H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • Y10S148/003 - Anneal
  • Y10S148/018 - Compensation doping
  • Y10S148/071 - Heating, selective
  • Y10S148/093 - Laser beam treatment in general
  • Y10S148/162 - Testing steps

• US Classifications

  • 700 - Data processing: generic control systems or specific applications
  • 148 - Metal treatment
  • 257 - Active solid-state devices
  • 438 - Semiconductor device manufacturing: process