using electron beams

Industry

CPC
G01R31/305

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Parent Industries

GPHYSICS G01Measuring instruments G01RMEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES G01R31/00Arrangements for testing electric properties Arrangements for locating electric faults Arrangements for electrical testing characterised by what is being tested not provided for elsewhere

Current Industry

G01R31/305using electron beams

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Beam bender
- Patent number 11,011,342
- Issue date May 18, 2021
- Ebara Corporation
- Takeshi Murakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System, computer program product, and method for dissipation of an...
- Patent number 10,716,197
- Issue date Jul 14, 2020
- Applied Materials Israel Ltd.
- Guy Eytan
- G01 - MEASURING TESTING
Information Patent Grant
Circuit inspection method and sample inspection apparatus
- Patent number 10,712,384
- Issue date Jul 14, 2020
- HITACHI HIGH-TECH CORPORATION
- Akira Kageyama
- G01 - MEASURING TESTING
Information Patent Grant
Voltage contrast based fault and defect inference in logic chips
- Patent number 10,539,612
- Issue date Jan 21, 2020
- KLA-Tencor Corporation
- Brian Duffy
- G01 - MEASURING TESTING
Information Patent Grant
Systematic defects inspection method with combined eBeam inspection...
- Patent number 10,234,500
- Issue date Mar 19, 2019
- GLOBALFOUNDRIES Inc.
- Weihong Gao
- G01 - MEASURING TESTING
Information Patent Grant
System for electrical measurements of objects in a vacuumed environ...
- Patent number 9,958,501
- Issue date May 1, 2018
- APPLIEED MATERIALS ISRAEL LTD.
- Amir Wachs
- G01 - MEASURING TESTING
Information Patent Grant
Electrical inspection of electronic devices using electron-beam ind...
- Patent number 9,523,714
- Issue date Dec 20, 2016
- Photon Dynamics, Inc.
- Alexander Kadyshevitch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detecting open and short of conductors
- Patent number 9,470,751
- Issue date Oct 18, 2016
- Applied Materials Israel Ltd.
- Amir Shoham
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection apparatus, system, and method
- Patent number 9,304,160
- Issue date Apr 5, 2016
- KLA-Tencor Corporation
- Earl Jensen
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatuses for inspecting semiconductor devices using...
- Patent number 9,267,903
- Issue date Feb 23, 2016
- Samsung Electronics Co., Ltd.
- Mira Park
- G01 - MEASURING TESTING
Information Patent Grant
Method for detecting an electrical defect of contact/via plugs
- Patent number 9,244,112
- Issue date Jan 26, 2016
- Macronix International Co., Ltd.
- Hsiang-Chou Liao
- G01 - MEASURING TESTING
Information Patent Grant
Method for testing a software application
- Patent number 9,213,614
- Issue date Dec 15, 2015
- European Aernautic Defence and Space Company—EADS France
- Nadine Buard
- G01 - MEASURING TESTING
Information Patent Grant
Method of testing electronic components
- Patent number 8,947,115
- Issue date Feb 3, 2015
- Radiabeam Technologies, LLC
- James Rosenzweig
- G01 - MEASURING TESTING
Information Patent Grant
Accurate measurement of excess carrier lifetime using carrier decay...
- Patent number 8,912,799
- Issue date Dec 16, 2014
- Semiconductor Physics Laboratory Co., Ltd.
- Jacek Lagowski
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam applied apparatus
- Patent number 8,350,214
- Issue date Jan 8, 2013
- Hitachi High-Technologies Corporation
- Hiroki Otaki
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam device with retarding field analyzer
- Patent number 8,203,119
- Issue date Jun 19, 2012
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Ralf Degenhardt
- G01 - MEASURING TESTING
Information Patent Grant
Parameter extracting method
- Patent number 8,048,600
- Issue date Nov 1, 2011
- Fujitsu Semiconductor Limited
- Kozo Ogino
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspecting method and defect inspecting apparatus
- Patent number 8,040,504
- Issue date Oct 18, 2011
- Tokyo Electron Limited
- Misako Saito
- G01 - MEASURING TESTING
Information Patent Grant
Method for beam calibration and usage of a calibration body
- Patent number 8,009,299
- Issue date Aug 30, 2011
- Applied Materials GmbH
- Matthias Brunner
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting integrated circuit pattern
- Patent number 7,952,074
- Issue date May 31, 2011
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Flat panel display substrate testing system
- Patent number 7,941,237
- Issue date May 10, 2011
- Multibeam Corporation
- N. William Parker
- G01 - MEASURING TESTING
Information Patent Grant
Integrated substrate transfer module
- Patent number 7,919,972
- Issue date Apr 5, 2011
- Applied Materials, Inc.
- Shinichi Kurita
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for test structure inspection
- Patent number 7,902,849
- Issue date Mar 8, 2011
- Applied Materials Israel, Ltd.
- Eugene T. Bullock
- G01 - MEASURING TESTING
Information Patent Grant
Configurable prober for TFT LCD array test
- Patent number 7,847,566
- Issue date Dec 7, 2010
- Applied Materials, Inc.
- Matthias Brunner
- G01 - MEASURING TESTING
Information Patent Grant
System and method for detecting single event latchup in integrated...
- Patent number 7,830,165
- Issue date Nov 9, 2010
- Integrated Device Technology, Inc.
- Tan Van Chu
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam exposure method, hot spot detecting apparatus, semico...
- Patent number 7,648,809
- Issue date Jan 19, 2010
- Kabushiki Kaisha Toshiba
- Tetsuro Nakasugi
- G01 - MEASURING TESTING
Information Patent Grant
Method to reduce cross talk in a multi column e-beam test system
- Patent number 7,569,818
- Issue date Aug 4, 2009
- Applied Materials, Inc.
- Ralf Schmid
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Grant
Inspection method of contact failure of semiconductor device and se...
- Patent number 7,538,345
- Issue date May 26, 2009
- Fujitsu Microelectronics Limited
- Yasuo Matsumiya
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor device evaluation method and apparatus using the same
- Patent number 7,495,457
- Issue date Feb 24, 2009
- Elpida Memory, Inc.
- Masayoshi Danbata
- G01 - MEASURING TESTING
Information Patent Grant
Non-contact electrical connections test device
- Patent number 7,446,543
- Issue date Nov 4, 2008
- Commissariat a l'Energie Atomique
- Patrick Demars
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Sample Inspection Apparatus
- Publication number 20240255556
- Publication date Aug 1, 2024
- Hitachi High-Tech Corporation
- Tomoko SHIMAMORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STORAGE DEVICE AND INSPECTION METHOD
- Publication number 20200266113
- Publication date Aug 20, 2020
- Toshiba Memory Corporation
- Akihiko TSUGAWA
- G01 - MEASURING TESTING
Information Patent Application
BEAM BENDER
- Publication number 20190378677
- Publication date Dec 12, 2019
- EBARA CORPORATION
- Takeshi Murakami
- G01 - MEASURING TESTING
Information Patent Application
CIRCUIT INSPECTION METHOD AND SAMPLE INSPECTION APPARATUS
- Publication number 20180246166
- Publication date Aug 30, 2018
- Hitachi High-Technologies Corporation
- Akira KAGEYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Voltage Contrast Based Fault and Defect Inference in Logic Chips
- Publication number 20160341791
- Publication date Nov 24, 2016
- KLA-Tencor Corporation
- Brian Duffy
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMATIC DEFECTS INSPECTION METHOD WITH COMBINED EBEAM INSPECTION...
- Publication number 20160306009
- Publication date Oct 20, 2016
- GLOBALFOUNDRIES INC.
- Weihong GAO
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR DETECTING AN ELECTRICAL DEFECT OF CONTACT/VIA PLUGS
- Publication number 20150323583
- Publication date Nov 12, 2015
- Macronix International Co., Ltd.
- Hsiang-Chou Liao
- G01 - MEASURING TESTING
Information Patent Application
DETECTING OPEN AND SHORT OF CONDUCTORS
- Publication number 20150198648
- Publication date Jul 16, 2015
- APPLIED MATERIALS ISRAEL, LTD.
- Amir Shoham
- G01 - MEASURING TESTING
Information Patent Application
Electrical Inspection of Electronic Devices Using Electron-Beam Ind...
- Publication number 20140132299
- Publication date May 15, 2014
- Photon Dynamics, Inc.
- Alexander Kadyshevitch
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND APPARATUSES FOR INSPECTING SEMICONDUCTOR DEVICES USING...
- Publication number 20140061462
- Publication date Mar 6, 2014
- Mira PARK
- G01 - MEASURING TESTING
Information Patent Application
ACCURATE MEASUREMENT OF EXCESS CARRIER LIFETIME USING CARRIER DECAY...
- Publication number 20130169283
- Publication date Jul 4, 2013
- Semiconductor Physics Laboratory Co., Ltd.
- Jacek Lagowski
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR ANALYZING PERIPHERAL COMPONENT INTERCONNECT SOCKETS
- Publication number 20120014589
- Publication date Jan 19, 2012
- HON HAI Precision Industry CO., LTD.
- CHIH-YANG LIN
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM APPLIED APPARATUS
- Publication number 20110272576
- Publication date Nov 10, 2011
- Hitachi High-Technologies Corporation
- Hiroki Otaki
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF TESTING ELECTRONIC COMPONENTS
- Publication number 20110240888
- Publication date Oct 6, 2011
- Radiabeam Technologies, LLC
- James Rosenzweig
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR TESTING A SOFTWARE APPLICATION
- Publication number 20100280785
- Publication date Nov 4, 2010
- EUROPEAN AERONAUTIC DEFENCE AND SPACE COMPANY-EADS FRANCE
- Nadine Buard
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT INSPECTING METHOD AND DEFECT INSPECTING APPARATUS
- Publication number 20100245812
- Publication date Sep 30, 2010
- Tokyo Electron Limited
- Misako Saito
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR BEAM CALIBRATION AND USAGE OF A CALIBRATION BODY
- Publication number 20100188666
- Publication date Jul 29, 2010
- APPLIED MATERIALS GMBH
- Matthias Brunner
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Application
Charged Particle Beam Device With Retarding Field Analyzer
- Publication number 20090200463
- Publication date Aug 13, 2009
- Ralf Degenhardt
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR INSPECTING INTEGRATED CIRCUIT PATTERN
- Publication number 20080302964
- Publication date Dec 11, 2008
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Application
Flat Panel Display Substrate Testing System
- Publication number 20080232939
- Publication date Sep 25, 2008
- N. William Parker
- G02 - OPTICS
Information Patent Application
SEMICONDUCTOR DEVICE EVALUATION METHOD AND APPARATUS USING THE SAME
- Publication number 20080218193
- Publication date Sep 11, 2008
- Elpida Memory, Inc.
- Masayoshi Danbata
- G01 - MEASURING TESTING
Information Patent Application
Emission detecting analysis system and method of detecting emission...
- Publication number 20080164410
- Publication date Jul 10, 2008
- Samsung Electronics, Co., Ltd.
- Ho-Jin Lee
- G01 - MEASURING TESTING
Information Patent Application
Method and System for Testing or Measuring Electrical Elements
- Publication number 20080143355
- Publication date Jun 19, 2008
- BEAMIND
- Gerard DELABOUGLISE
- G01 - MEASURING TESTING
Information Patent Application
Integrated Substrate Transfer Module
- Publication number 20080111577
- Publication date May 15, 2008
- Shinichi Kurita
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Application
Configurable Prober for TFT LCD Array Test
- Publication number 20080061807
- Publication date Mar 13, 2008
- Matthias Brunner
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Application
Method and System for Testing or Measuring Electrical Elements, Usi...
- Publication number 20080006427
- Publication date Jan 10, 2008
- BEAMIND
- Christophe Vaucher
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and Method for Test Structure Inspection
- Publication number 20070267632
- Publication date Nov 22, 2007
- Eugene T. Bullock
- G01 - MEASURING TESTING
Information Patent Application
System and method for detecting single event latchup in integrated...
- Publication number 20070229096
- Publication date Oct 4, 2007
- Tan Van Chu
- G01 - MEASURING TESTING
Information Patent Application
METHOD TO REDUCE CROSS TALK IN A MULTI COLUMN E-BEAM TEST SYSTEM
- Publication number 20070216428
- Publication date Sep 20, 2007
- Ralf Schmid
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Application
Electron beam apparatus with detailed observation function and samp...
- Publication number 20070200569
- Publication date Aug 30, 2007
- EBARA CORPORATION
- Kenji Watanabe
- G01 - MEASURING TESTING

using electron beams

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Beam bender

System, computer program product, and method for dissipation of an...

Circuit inspection method and sample inspection apparatus

Voltage contrast based fault and defect inference in logic chips

Systematic defects inspection method with combined eBeam inspection...

System for electrical measurements of objects in a vacuumed environ...

Electrical inspection of electronic devices using electron-beam ind...

Detecting open and short of conductors

Defect inspection apparatus, system, and method

Methods and apparatuses for inspecting semiconductor devices using...

Method for detecting an electrical defect of contact/via plugs

Method for testing a software application

Method of testing electronic components

Accurate measurement of excess carrier lifetime using carrier decay...

Charged particle beam applied apparatus

Charged particle beam device with retarding field analyzer

Parameter extracting method

Defect inspecting method and defect inspecting apparatus

Method for beam calibration and usage of a calibration body

Method and apparatus for inspecting integrated circuit pattern

Flat panel display substrate testing system

Integrated substrate transfer module

Apparatus and method for test structure inspection

Configurable prober for TFT LCD array test

System and method for detecting single event latchup in integrated...

Electron beam exposure method, hot spot detecting apparatus, semico...

Method to reduce cross talk in a multi column e-beam test system

Inspection method of contact failure of semiconductor device and se...

Semiconductor device evaluation method and apparatus using the same

Non-contact electrical connections test device

Patents Applicationslast 30 patents

Sample Inspection Apparatus

SEMICONDUCTOR STORAGE DEVICE AND INSPECTION METHOD

BEAM BENDER

CIRCUIT INSPECTION METHOD AND SAMPLE INSPECTION APPARATUS

Voltage Contrast Based Fault and Defect Inference in Logic Chips

SYSTEMATIC DEFECTS INSPECTION METHOD WITH COMBINED EBEAM INSPECTION...

METHOD FOR DETECTING AN ELECTRICAL DEFECT OF CONTACT/VIA PLUGS

DETECTING OPEN AND SHORT OF CONDUCTORS

Electrical Inspection of Electronic Devices Using Electron-Beam Ind...

METHODS AND APPARATUSES FOR INSPECTING SEMICONDUCTOR DEVICES USING...

ACCURATE MEASUREMENT OF EXCESS CARRIER LIFETIME USING CARRIER DECAY...

METHOD FOR ANALYZING PERIPHERAL COMPONENT INTERCONNECT SOCKETS

CHARGED PARTICLE BEAM APPLIED APPARATUS

METHOD OF TESTING ELECTRONIC COMPONENTS

METHOD FOR TESTING A SOFTWARE APPLICATION

DEFECT INSPECTING METHOD AND DEFECT INSPECTING APPARATUS

METHOD FOR BEAM CALIBRATION AND USAGE OF A CALIBRATION BODY

Charged Particle Beam Device With Retarding Field Analyzer

METHOD AND APPARATUS FOR INSPECTING INTEGRATED CIRCUIT PATTERN

Flat Panel Display Substrate Testing System

SEMICONDUCTOR DEVICE EVALUATION METHOD AND APPARATUS USING THE SAME

Emission detecting analysis system and method of detecting emission...

Method and System for Testing or Measuring Electrical Elements

Integrated Substrate Transfer Module

Configurable Prober for TFT LCD Array Test

Method and System for Testing or Measuring Electrical Elements, Usi...

Apparatus and Method for Test Structure Inspection

System and method for detecting single event latchup in integrated...

METHOD TO REDUCE CROSS TALK IN A MULTI COLUMN E-BEAM TEST SYSTEM

Electron beam apparatus with detailed observation function and samp...