3762943

Information

• Patent Grant
• 3762943

• References
• Source

• Patent Number

  3,762,943

• Date Filed

  Not available

• Date Issued

  Tuesday, October 2, 1973
  51 years ago

• CPC

  • C30B19/08 - Heating of the reaction chamber or the substrate
  • C30B19/061 - Tipping system
  • Y10S117/90 - Apparatus characterized by composition or treatment thereof
  • Y10S148/056 - Gallium arsenide

• US Classifications

  • 117 - Single-crystal, oriented-crystal, and epitaxy growth processes
  • 118 - Coating apparatus
  • 148 - Metal treatment