3829382

Information

• Patent Grant
• 3829382

• References
• Source

• Patent Number

  3,829,382

• Date Filed

  Not available

• Date Issued

  Tuesday, August 13, 1974
  50 years ago

• CPC

  • C30B13/12 - in the gaseous or vapour state
  • Y10S438/935 - Gas flow control

• US Classifications

  • 252 - Compositions
  • 117 - Single-crystal, oriented-crystal, and epitaxy growth processes
  • 438 - Semiconductor device manufacturing: process