3878079

Information

• Patent Grant
• 3878079

• References
• Source

• Patent Number

  3,878,079

• Date Filed

  Not available

• Date Issued

  Tuesday, April 15, 1975
  49 years ago

• CPC

  • C23C14/14 - Metallic material, boron or silicon
  • C03C17/09 - by deposition from the vapour phase
  • C23C14/0036 - Reactive sputtering
  • C03C2217/263 - Metals other than noble metals, Cu or Hg
  • C03C2218/15 - from the vapour phase

• US Classifications

  • 204 - Chemistry: electrical and wave energy
  • 338 - Electrical resistors