3908586

Information

• Patent Grant
• 3908586

• References
• Source

• Patent Number

  3,908,586

• Date Filed

  Not available

• Date Issued

  Tuesday, September 30, 1975
  49 years ago

• CPC

  • C30B13/12 - in the gaseous or vapour state
  • Y10S117/90 - Apparatus characterized by composition or treatment thereof
  • Y10S118/90 - Semiconductor vapor doping
  • Y10T117/1004 - with means for measuring, testing, or sensing
  • Y10T117/1088 - including heating or cooling details

• US Classifications

  • 422 - Chemical apparatus and process disinfecting, deodorizing, preserving, or sterilizing
  • 117 - Single-crystal, oriented-crystal, and epitaxy growth processes
  • 118 - Coating apparatus