Semiconductor vapor doping

Industry

CPC
Y10S118/90

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10USPC classification Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10S118/00Coating apparatus

Current Industry

Y10S118/90Semiconductor vapor doping

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor device and semiconductor device production system
- Patent number 10,879,272
- Issue date Dec 29, 2020
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor device and semiconductor device production system
- Patent number 10,515,983
- Issue date Dec 24, 2019
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor device and semiconductor device production system
- Patent number 10,361,222
- Issue date Jul 23, 2019
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor device and semiconductor device production system
- Patent number 9,899,419
- Issue date Feb 20, 2018
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor device and semiconductor device production system
- Patent number 9,178,069
- Issue date Nov 3, 2015
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate drying processing apparatus, method, and program recordin...
- Patent number 7,581,335
- Issue date Sep 1, 2009
- Tokyo Electron Limited
- Hiroshi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and semiconductor device production system
- Patent number 7,582,162
- Issue date Sep 1, 2009
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor device having thin film transistor with position cont...
- Patent number 7,148,507
- Issue date Dec 12, 2006
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for processing a semiconductor
- Patent number 7,097,712
- Issue date Aug 29, 2006
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Valve assemblies for use with a reactive precursor in semiconductor...
- Patent number 7,000,636
- Issue date Feb 21, 2006
- Micron Technology, Inc.
- Ross S. Dando
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing reactive precursor valve assembly
- Patent number 6,935,372
- Issue date Aug 30, 2005
- Micron Technology, Inc.
- Ross S. Dando
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device formed over a surface with a drepession portio...
- Patent number 6,841,797
- Issue date Jan 11, 2005
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor manufacturing method, substrate processing method, an...
- Patent number 6,828,235
- Issue date Dec 7, 2004
- Hitachi Kokusai Electric Inc.
- Satoshi Takano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical vapor deposition methods and atomic layer deposition methods
- Patent number 6,800,134
- Issue date Oct 5, 2004
- Micron Technology, Inc.
- Ross S. Dando
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactor for processing a semiconductor wafer
- Patent number 6,794,291
- Issue date Sep 21, 2004
- Semitool, Inc.
- Steven L. Peace
- B08 - CLEANING
Information Patent Grant
Reactor for processing a semiconductor wafer
- Patent number 6,692,613
- Issue date Feb 17, 2004
- Semitool, Inc.
- Steven L. Peace
- B08 - CLEANING
Information Patent Grant
Apparatus for processing a workpiece
- Patent number 6,680,253
- Issue date Jan 20, 2004
- Semitool, Inc.
- Paul Z. Wirth
- B08 - CLEANING
Information Patent Grant
Method and apparatus for directing constituents through a processin...
- Patent number 6,586,343
- Issue date Jul 1, 2003
- Applied Materials, Inc.
- Henry Ho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reactor for processing a semiconductor wafer
- Patent number 6,447,633
- Issue date Sep 10, 2002
- Semitdol, Inc.
- Steven L. Peace
- B08 - CLEANING
Information Patent Grant
Reactor for processing a semiconductor wafer
- Patent number 6,423,642
- Issue date Jul 23, 2002
- Semitool, Inc.
- Steven L. Peace
- B08 - CLEANING
Information Patent Grant
Method and apparatus for formation of in-situ doped amorphous semic...
- Patent number 6,410,434
- Issue date Jun 25, 2002
- Advanced Micro Devices, Inc.
- Balaraman Mani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing process for a semiconductor device
- Patent number 6,333,266
- Issue date Dec 25, 2001
- NEC Corporation
- Satoru Sugiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for recovering and recirculating a deuterium-cont...
- Patent number 6,328,801
- Issue date Dec 11, 2001
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Daniel Gary
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Method for forming a thin film of a composite metal compound and ap...
- Patent number 6,328,865
- Issue date Dec 11, 2001
- Shincron Co., Ltd.
- Shigeharu Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diamond thin film or the like, method for forming and modifying the...
- Patent number 6,287,889
- Issue date Sep 11, 2001
- Applied Diamond, Inc.
- Shoji Miyake
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for forming a thin film of a composite metal compound and ap...
- Patent number 6,207,536
- Issue date Mar 27, 2001
- Shincron Co., Ltd.
- Shigeharu Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for weighting a diffusion furnace cantilever
- Patent number 5,372,649
- Issue date Dec 13, 1994
- Sony Electronics, Inc.
- Jon A. Gwin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming doped shallow electrical junctions
- Patent number 5,310,711
- Issue date May 10, 1994
- Hewlett-Packard Company
- Clifford I. Drowley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for forming shallow electrical junctions
- Patent number 5,256,162
- Issue date Oct 26, 1993
- Hewlett-Packard Company
- Clifford I. Drowley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Isolation passageway including annular region
- Patent number 4,723,507
- Issue date Feb 9, 1988
- Energy Conversion Devices, Inc.
- Herbert L. Ovshinsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM
- Publication number 20210118916
- Publication date Apr 22, 2021
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM
- Publication number 20200135770
- Publication date Apr 30, 2020
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM
- Publication number 20190341404
- Publication date Nov 7, 2019
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM
- Publication number 20180190677
- Publication date Jul 5, 2018
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM
- Publication number 20100029068
- Publication date Feb 4, 2010
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Drying apparatus, drying method, substrate processing apparatus, su...
- Publication number 20070113423
- Publication date May 24, 2007
- Hiroshi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device and semiconductor device production system
- Publication number 20070070346
- Publication date Mar 29, 2007
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Semiconductor processing reactive precursor valve assembly
- Publication number 20050121088
- Publication date Jun 9, 2005
- Ross S. Dando
- C30 - CRYSTAL GROWTH
Information Patent Application
Semiconductor device and semiconductor device production system
- Publication number 20050098784
- Publication date May 12, 2005
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method for processing a semiconductor wafer
- Publication number 20050032391
- Publication date Feb 10, 2005
- Semitool, Inc.
- Steven L. Peace
- B08 - CLEANING
Information Patent Application
Valve assemblies for use with a reactive precursor in semiconductor...
- Publication number 20040084147
- Publication date May 6, 2004
- Ross S. Dando
- C30 - CRYSTAL GROWTH
Information Patent Application
Semiconductor device and semiconductor device production system
- Publication number 20030218169
- Publication date Nov 27, 2003
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Chemical vapor deposition methods, atomic layer deposition methods,...
- Publication number 20030183156
- Publication date Oct 2, 2003
- Ross S. Dando
- C30 - CRYSTAL GROWTH
Information Patent Application
Reactor for processing a semiconductor wafer
- Publication number 20020189652
- Publication date Dec 19, 2002
- Semitool, Inc.
- Steven L. Peace
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reactor for processing a semiconductor wafer
- Publication number 20020185163
- Publication date Dec 12, 2002
- Semitool, Inc.
- Steven L. Peace
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor manufacturing method, substrate processing method, an...
- Publication number 20020020344
- Publication date Feb 21, 2002
- Satoshi Takano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for processing a workpiece
- Publication number 20020017237
- Publication date Feb 14, 2002
- Semitool, Inc.
- Paul Z. Wirth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for forming a thin film of a composite metal compound and ap...
- Publication number 20010015173
- Publication date Aug 23, 2001
- Shigeharu Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Semiconductor vapor doping

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Semiconductor device and semiconductor device production system

Semiconductor device and semiconductor device production system

Semiconductor device and semiconductor device production system

Semiconductor device and semiconductor device production system

Semiconductor device and semiconductor device production system

Substrate drying processing apparatus, method, and program recordin...

Semiconductor device and semiconductor device production system

Semiconductor device having thin film transistor with position cont...

Apparatus for processing a semiconductor

Valve assemblies for use with a reactive precursor in semiconductor...

Semiconductor processing reactive precursor valve assembly

Semiconductor device formed over a surface with a drepession portio...

Semiconductor manufacturing method, substrate processing method, an...

Chemical vapor deposition methods and atomic layer deposition methods

Reactor for processing a semiconductor wafer

Reactor for processing a semiconductor wafer

Apparatus for processing a workpiece

Method and apparatus for directing constituents through a processin...

Reactor for processing a semiconductor wafer

Reactor for processing a semiconductor wafer

Method and apparatus for formation of in-situ doped amorphous semic...

Manufacturing process for a semiconductor device

Method and system for recovering and recirculating a deuterium-cont...

Method for forming a thin film of a composite metal compound and ap...

Diamond thin film or the like, method for forming and modifying the...

Method for forming a thin film of a composite metal compound and ap...

Apparatus for weighting a diffusion furnace cantilever

Method of forming doped shallow electrical junctions

Apparatus for forming shallow electrical junctions

Isolation passageway including annular region

Patents Applicationslast 30 patents

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM

Drying apparatus, drying method, substrate processing apparatus, su...

Semiconductor device and semiconductor device production system

Semiconductor processing reactive precursor valve assembly

Semiconductor device and semiconductor device production system

Method for processing a semiconductor wafer

Valve assemblies for use with a reactive precursor in semiconductor...

Semiconductor device and semiconductor device production system

Chemical vapor deposition methods, atomic layer deposition methods,...

Reactor for processing a semiconductor wafer

Reactor for processing a semiconductor wafer

Semiconductor manufacturing method, substrate processing method, an...

Apparatus for processing a workpiece

Method for forming a thin film of a composite metal compound and ap...