3916188

Information

• Patent Grant
• 3916188

• References
• Source

• Patent Number

  3,916,188

• Date Filed

  Not available

• Date Issued

  Tuesday, October 28, 1975
  49 years ago

• CPC

  • H01J49/286 - with energy analysis
  • H01J49/14 - using particle bombardment

• US Classifications

  • 250 - Radiant energy