3920482

Information

• Patent Grant
• 3920482

• References
• Source

• Patent Number

  3,920,482

• Date Filed

  Not available

• Date Issued

  Tuesday, November 18, 1975
  49 years ago

• CPC

  • H01L21/763 - Polycristalline semiconductor regions
  • H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/76232 - of trenches having a shape other than rectangular or V-shape
  • H01L21/76237 - introducing impurities in trench side or bottom walls
  • Y10S148/049 - Equivalence and options
  • Y10S148/051 - Etching
  • Y10S148/085 - Isolated-integrated
  • Y10S148/115 - Orientation

• US Classifications

  • 438 - Semiconductor device manufacturing: process
  • 148 - Metal treatment
  • 257 - Active solid-state devices