3920882

Information

• Patent Grant
• 3920882

• References
• Source

• Patent Number

  3,920,882

• Date Filed

  Not available

• Date Issued

  Tuesday, November 18, 1975
  49 years ago

• CPC

  • C30B31/165 - Diffusion sources
  • H01L21/2225 - Diffusion sources
  • Y10S148/049 - Equivalence and options
  • Y10S252/95 - Doping agent source material
  • Y10S252/951 - for vapor transport

• US Classifications

  • 428 - Stock material or miscellaneous articles
  • 148 - Metal treatment
  • 252 - Compositions
  • 257 - Active solid-state devices
  • 427 - Coating processes
  • 438 - Semiconductor device manufacturing: process