This application is a continuation of Ser. No. 09/455,678, filed Dec. 7, 1999, now U.S. Pat. No. 6,187,149. which is a continuation in part of Ser. No. 09/095,425, filed Jun. 10, 1998, now U.S. Pat. No. 6,149,774.
| Number | Name | Date | Kind |
|---|---|---|---|
| 2408143 | Huebner | Sep 1946 | A |
| 3831606 | Damani | Aug 1974 | A |
| 3971377 | Damani | Jul 1976 | A |
| 4047525 | Kulessa et al. | Sep 1977 | A |
| 4072129 | Bright et al. | Feb 1978 | A |
| 4160257 | Carrish | Jul 1979 | A |
| 4197289 | Sturzenegger et al. | Apr 1980 | A |
| RE30401 | White | Sep 1980 | E |
| 4332789 | Mlodozeniec | Jun 1982 | A |
| 4349531 | Mlodozeniec et al. | Sep 1982 | A |
| 4502094 | Lewin et al. | Feb 1985 | A |
| 4538163 | Sheridon | Aug 1985 | A |
| 4554611 | Lewin | Nov 1985 | A |
| 4570630 | Elliott et al. | Feb 1986 | A |
| 4627432 | Newell et al. | Dec 1986 | A |
| 4628227 | Briere | Dec 1986 | A |
| 4652318 | Masuda et al. | Mar 1987 | A |
| 4664107 | Wass | May 1987 | A |
| 4685620 | Law et al. | Aug 1987 | A |
| 4795644 | Zentner | Jan 1989 | A |
| 4811731 | Newell et al. | Mar 1989 | A |
| 4860417 | Tajima et al. | Aug 1989 | A |
| 4889114 | Kladders | Dec 1989 | A |
| 4917978 | Ritt et al. | Apr 1990 | A |
| 4918468 | Miekka et al. | Apr 1990 | A |
| 4921727 | Datta et al. | May 1990 | A |
| 4921767 | Datta et al. | May 1990 | A |
| 4925701 | Jansen et al. | May 1990 | A |
| 4971257 | Birge | Nov 1990 | A |
| 4992807 | Thomson | Feb 1991 | A |
| 5014076 | Caley, Jr. et al. | May 1991 | A |
| 5027136 | Fotland et al. | Jun 1991 | A |
| 5028501 | Ritt et al. | Jul 1991 | A |
| 5031610 | Armstrong et al. | Jul 1991 | A |
| 5080380 | Nakagawa et al. | Jan 1992 | A |
| 5115803 | Sioutas | May 1992 | A |
| 5161524 | Evans | Nov 1992 | A |
| 5176132 | Drought et al. | Jan 1993 | A |
| 5186164 | Raghuprasad | Feb 1993 | A |
| 5239993 | Evans | Aug 1993 | A |
| 5243970 | Ambrosio et al. | Sep 1993 | A |
| 5263475 | Altermatt et al. | Nov 1993 | A |
| 5278588 | Kubelik | Jan 1994 | A |
| 5301666 | Lerk et al. | Apr 1994 | A |
| 5327883 | Williams et al. | Jul 1994 | A |
| 5328539 | Sato | Jul 1994 | A |
| 5377071 | Moslehi | Dec 1994 | A |
| 5463525 | Barnes et al. | Oct 1995 | A |
| 5499487 | McGill | Mar 1996 | A |
| 5522131 | Steger | Jun 1996 | A |
| 5534309 | Liu | Jul 1996 | A |
| 5619984 | Hodson et al. | Apr 1997 | A |
| 5642727 | Datta et al. | Jul 1997 | A |
| 5647347 | Van Oort | Jul 1997 | A |
| 5714007 | Pletcher et al. | Feb 1998 | A |
| 5846595 | Sun et al. | Dec 1998 | A |
| 6149774 | Sun et al. | Nov 2000 | A |
| 6187149 | Sun et al. | Feb 2001 | B1 |
| Number | Date | Country |
|---|---|---|
| 57-196211 | Feb 1982 | JP |
| PCTUS9209505 | May 1993 | WO |
| PCTUS9309751 | Apr 1994 | WO |
| PCTSE9301053 | Jun 1994 | WO |
| PCTUS9403569 | Oct 1994 | WO |
| PCT-SE9400633 | Jan 1995 | WO |
| Entry |
|---|
| J. -F. Davier et. al., Electrostatic Clamping Applied to Semiconductor Plasma Processing, I. Theoretical Modeling, J. Electrochem. Soc., vol. 140, No. 11, pp. 3245-3256 (1993). |
| J. -F. Davier et. al., Electrostatic Clamping Applied to Semiconductor Plasma Processing, II. Experimental Results, J. Electrochem. Soc., vol. 140, No. 11, pp. 3256-3261 (1993). |
| John Field, Electrostatic Wafer Clamping For Next-Generation Manufacturing, Solid State Technology, pp. 91-98 (1994). |
| Larry D. Hartsough, Electrostatic Wafer Holding, Solid State Technology, pp. 87-90 (1993). |
| Mamoru Nakasuji et. al., Low Voltage And High Speed Operating Electrostatic Wafer Chuck Using Sputtered Tanatalum Oxide Membrane, J. Vac. Sci. Technol. A, vol. 12, No. 5, pp. 2834-2839 (1994). |
| Donald A. Seanor, Triboelectrification Of Polymers in K.C. Frisch and A. Patsis, Electrical Properties of Polymers (Technomic Publications, Westport, CT), pp. 37-58 (1989). |
| Peter Singer Electrostatic Chucks in Wafer Processing, Semiconductor International pp. 57-64 (1995). |
| T. Watanabe et. al., Electrostatic Charge Distribution In The Dielectric Layer Of Alumina Electrostatic Chuck, Journal of Materials Science, vol. 29, pp. 3510-3516 (1994). |
| Toshiya Watanabe et. al., Electrostatic Force and Absorption Current of Alumina Electrostatic Chuck, Jpn. J. Appl. Phys., vol. 31, pt. 1, No. 7, pp. 2145-2150 (1992). |
| Number | Date | Country | |
|---|---|---|---|
| Parent | 09/455678 | Dec 1999 | US |
| Child | 09/772536 | US |
| Number | Date | Country | |
|---|---|---|---|
| Parent | 09/095425 | Jun 1998 | US |
| Child | 09/455678 | US |