| Number | Date | Country | Kind |
|---|---|---|---|
| 8607653 | Mar 1986 | DEX |
| Number | Name | Date | Kind |
|---|---|---|---|
| 4164263 | Heintz et al. | Aug 1979 | |
| 4311980 | Prudenziati | Jan 1982 | |
| 4430895 | Colton | Feb 1984 | |
| 4432247 | Takeno et al. | Feb 1984 | |
| 4481497 | Kurtz et al. | Nov 1984 | |
| 4670092 | Motamedi | Jul 1987 | |
| 4689600 | Wilner | Aug 1987 | |
| 4699006 | Boxenhorn | Oct 1987 |
| Number | Date | Country |
|---|---|---|
| 1000456 | Nov 1961 | GBX |
| Entry |
|---|
| Integrated Silicon Microbeam Pl-FET Accelerometer, Pau-ling Chen et al., 1982, IEEE Transactions, vol. ED-29, No. 1, pp. 27-31. |
| Hayden, H. P., Thick Film Resonant Device, Apr. 1967, IBM Technical Disclosure Bulletin vol. 9, No. 11, p. 1651. |