Claims
- 1. A semiconductor device on a support substrate comprising:
- a conductive layer that has a first edge, a second edge, a third edge, and a fourth edge, the first edge is opposed to the second edge and the third edge is opposed to the fourth edge, wherein the conductive layer is free to move in a first direction, a second direction, and a third direction, and the first direction, the second direction, and the third direction are orthogonal to each other;
- a first conductor under the conductive layer;
- a second conductor under the first edge of the conductive layer;
- a third conductor under the second edge of the conductive layer;
- a fourth conductor under the third edge of the conductive layer;
- a fifth conductor under the fourth edge of the conductive layer; and
- a sixth conductor overlying the conductive layer and substantially directly over the first conductor.
- 2. The semiconductor device of claim 1, wherein voltage potentials coupled to the first conductor and the sixth conductor suspends the conductive layer between the first conductor and the sixth conductor.
- 3. The semiconductor device of claim 1 wherein the second conductor is capacitively coupled to the conductive layer.
- 4. An integrated circuit comprising the semiconductor device of claim 1.
- 5. A positional tracking system comprising the semiconductor device of claim 1.
- 6. An automobile comprising the semiconductor device of claim 1.
- 7. An apparatus comprising:
- a conductive layer that has a first edge, a second edge, a third edge, and a fourth edge, the first edge being opposed to the second edge and the third edge being opposed to the fourth edge, wherein the conductive layer is free to move in a first direction, a second direction, and a third direction, and the first direction, the second direction, and the third direction are orthogonal to each other;
- a first conductor under the conductive layer;
- a second conductor under the first edge of the conductive layer;
- a third conductor under the second edge of the conductive layer;
- a fourth conductor under the third edge of the conductive layer;
- a fifth conductor under the fourth edge of the conductive layer; and
- a sixth conductor overlying the conductive layer and substantially directly over the first conductor.
- 8. The apparatus of claim 7, wherein a voltage potential placed between the first conductor and the sixth conductor suspends the conductive layer between the first conductor and the sixth conductor.
- 9. The apparatus of claim 7 wherein the second conductor is capacitively coupled to the conductive layer.
Parent Case Info
The present application is based on prior U.S. application Ser. No. 08/640,267, filed on Apr. 30, 1996, now U.S. Pat. No. 5,806,365, which is hereby incorporated by reference, and priority thereto for common subject matter is hereby claimed.
US Referenced Citations (7)
Divisions (1)
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Number |
Date |
Country |
Parent |
640267 |
Apr 1996 |
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