Adhesive composition, adhesive film, and method of producing semiconductor device

Abstract
Provided is an adhesive composition, which exhibits a melt viscosity at 40 to 80° C. of not more than 10,000 Pa·s, and which after heating for a period of 1 minute to 2 hours at a temperature within a range from 80° C. to (T+50)° C., exhibits a melt viscosity at a temperature of 100° C. to (T+30)° C. that is within a range from 100 to 10,000 Pa·s (wherein, T represents the curing start temperature for the composition). The adhesive composition is capable of forming a cured product that exhibits excellent filling of substrates with finely patterned circuits, excellent lamination performance at low temperatures, a low elastic modulus, and excellent levels of adhesion and heat resistance. The adhesive composition is useful for providing an adhesive film and for producing a semiconductor device.
Description

BRIEF DESCRIPTION OF THE DRAWINGS


FIG. 1 is a differential scanning calorimetry chart of an adhesive composition of an example 1.


Claims
  • 1. An adhesive composition, which exhibits a melt viscosity at 40 to 80° C. of not more than 10,000 Pa·s, and which after heating for a period of 1 minute to 2 hours at a temperature within a range from 80° C. to (T+50)° C., exhibits a melt viscosity at a temperature of 100° C. to (T+30)° C. that is within a range from 100 to 10,000 Pa·s, wherein T represents a curing start temperature for said composition.
  • 2. The adhesive composition according to claim 1, wherein said composition comprises (A) at least one resin selected from the group consisting of polyamic acid resins having a diorganopolysiloxane chain and phenolic hydroxyl groups within a polymer backbone, and polyimide resins that are ring-closing derivatives of said polyamic acid resins,(B) an epoxy resin,(C) an epoxy resin curing catalyst, and(D) an inorganic filler.
  • 3. The adhesive composition according to claim 2, wherein said polyimide resin of said component (A) comprises a polyimide resin obtained by reacting a tetracarboxylic dianhydride with a diamine compound that comprises a diamine represented by a formula (1) shown below:
  • 4. The adhesive composition according to claim 2, wherein said polyimide resin of said component (A) comprises a polymer backbone obtained by reacting a tetracarboxylic dianhydride with a diamine represented by a formula shown below:
  • 5. The adhesive composition according to claim 4, wherein said diamine is a diamine represented by a formula (2) shown below:
  • 6. A laminate comprising a substrate, and an adhesive film that comprises the adhesive composition defined in claim 1 provided on top of said substrate.
  • 7. A method of producing a semiconductor device using an adhesive film comprising an adhesive composition defined in claim 1, comprising the steps of: thermocompression bonding a semiconductor wafer to an substrate through said adhesive film at a temperature of 40 to 80° C., andconducting wire bonding at a temperature within a range from 80° C. to (T+50)° C. over a period of 1 minute to 2 hours, wherein T is as defined in claim 1.
Priority Claims (1)
Number Date Country Kind
2006-038788 Feb 2006 JP national