Claims
- 1. An alignment apparatus for aligning a first substrate and a second substrate, comprising:
- (a) first alignment mark means provided at a predetermined position on said first substrate and having a plurality of short line segments arranged in a stripe pattern extended in a linear direction;
- (b) second alignment mark means provided at a predetermined position on said second substrate and having a plurality of short line segments arranged in a stripe pattern extended in a linear direction;
- (c) scanning means generating a scanning beam which scans said first alignment mark means along a scanning line having a predetermined angle with respect to said linear direction of said first alignment mark means and scans said second alignment mark means along a scanning line having a predetermined angle with respect to said linear direction of said second alignment mark means;
- (d) means for receiving a part of said scanning beam divided by said first and second alignment mark means for form an output showing relative positional relation between said first and second alignment mark means;
- (e) means responsive to said output showing relative positional relation to move at least one of said first and second substrates relative to the other; and
- (f) an image-forming optical system disposed between said first end second substrates for projecting a pattern formed on said first substrate onto said second substrate, said scanning means projecting said scanning beam on said first substrate at a surface facing said image-forming optical system.
- 2. An alignment apparatus as set forth in claim 1, wherein said scanning beam has a shape elongated in a direction substantially parallel to said first alignment mark means on said first substrate and has a shape elongated in a direction substantially parallel to said second alignment mark means on said second substrate.
- 3. An alignment apparatus as set forth in claim 1, wherein said receiving means includes a first means receiving a part of said scanning beam from said first alignment mark means and a second means receiving a part of said scanning beam from said second alignment mark means.
- 4. An alignment apparatus for aligning a first substrate and a second substrate disposed optically conjugated with each other relative to an image-forming optical system, comprising:
- (a) first alignment mark means provided at a predetermined position on said first substrate, said first alignment mark means having a light reflecting area provided on a surface of said first substrate facing said image-forming optical system and a light transparent area surrounded by said light reflecting area, said light transparent area having at least a linear edge;
- (b) second alignment mark means provided at a predetermined position on said second substrate in linear form, said second alignment mark means having a plurality of short line segments arranged in a stripe pattern extended in a linear direction;
- (c) means for projecting a light beam onto said first alignment mark means from a side of said surface of said first substrate and onto said second alignment mark means through said light reflecting area and said image-forming optical system, said light beam having a shape elongated in a direction substantially parallel to said second alignment mark means on said second substrate;
- (d) means for scanning said first alignment mark means by said light beam along a scanning line having a predetermined angle with respect to the longitudinal direction of said light beam on said first substrate and scanning said second alignment mark means by said light beam along a scanning line having a predetermined angle with respect to the longitudinal direction of said light beam on said second substrate;
- (e) first receiving means for photoelectrically detecting the light beam transmitted through said transparent area;
- (f) second receiving means for photoelectrically detecting the light beam diffracted by said second alignment mark means and reflected by said light reflecting area; and
- (g) means responsive to said first and second receiving means to move to least one of said first and second substrate relative to the other.
Priority Claims (1)
Number |
Date |
Country |
Kind |
56-22951 |
Feb 1981 |
JPX |
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Parent Case Info
This is a continuation application of Ser. No. 348,716, filed Feb. 16, 1982, now abandoned.
US Referenced Citations (9)
Continuations (1)
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Number |
Date |
Country |
Parent |
348716 |
Feb 1982 |
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