Claims
- 1. A method of preparing an aluminum nitride sintered body comprising steps of:preparing a mixed powder containing at least 0.01 percent by weight and less than 0.05 percent by weight of carbon powder, at least 0.01 percent by weight and not more than 5 percent by weight of an alkaline earth metal element in terms of an oxide thereof, at least 0.01 percent by weight and not more than 10 percent by weight of a rare earth element in terms of an oxide thereof, and a remainder mainly composed of a powder of aluminum nitride; forming a compact with said mixed powder; and forming a sintered body by sintering said compact.
- 2. The method of preparing an aluminum nitride sintered body in accordance with claim 1, wherein said compact has a content of a carbon at a temperature of 1500° C. that is at least 0.01 percent by weight and less than 0.05 percent by weight during said sintering.
- 3. The method of preparing an aluminum nitride sintered body in accordance with claim 1, wherein said sintering is carried out at a sintering temperature of not more than 1700° C.
- 4. The method of preparing an aluminum nitride sintered body in accordance with claim 1, wherein said powder of aluminum nitride has a mean grain size of at least 0.5 μm and not more than 2.0 μm.
- 5. The method of preparing an aluminum nitride sintered body in accordance with claim 1, wherein said powder of aluminum nitride has a content of oxygen of at least 0.8 percent by weight and not more than 1.5 percent by weight with respect to a total weight of said powder of aluminum nitride.
- 6. A method of preparing an aluminum nitride sintered body comprising steps of:preparing a mixed powder containing at least 0.01 percent by weight and not more than 5 percent by weight of an alkaline earth metal element in terms of an oxide thereof, at least 0.01 percent by weight and not more than 10 percent by weight of a rare earth element in terms of an oxide thereof, and a remainder mainly composed of a powder of aluminum nitride; forming a compact with said mixed powder; and forming a sintered body by sintering said compact in a non-oxidizing atmosphere having a content of at least 10 percent by volume and not more than 100 percent by volume of at least one of carbon monoxide and hydrocarbon.
- 7. The method of preparing an aluminum nitride sintered body in accordance with claim 6, wherein said compact has a content of carbon at a temperature of 1500° C. that is at least 0.01 percent by weight and not more than 0.1 percent by weight during said sintering.
- 8. The method of preparing an aluminum nitride sintered body in accordance with claim 6, wherein said sintering is carried out at a sintering temperature of not more than 1700° C.
- 9. The method of preparing an aluminum nitride sintered body in accordance with claim 6, wherein said powder of aluminum nitride has a mean grain size of at least 0.5 μm and not more than 2.0 μm.
- 10. The method of preparing an aluminum nitride sintered body in accordance with claim 6, wherein said powder of aluminum nitride has a content of oxygen of at least 0.8 percent by weight and not more than 1.5 percent by weight with respect to a total weight of said powder of aluminum nitride.
- 11. The method of preparing an aluminum nitride sintered body in accordance with claim 1, wherein said mixed powder contains no more than 0.04 percent by weight of carbon powder.
Priority Claims (1)
Number |
Date |
Country |
Kind |
10-206353 |
Jul 1998 |
JP |
|
CROSS-REFERENCE TO RELATED APPLICATION
This application is a divisional of U.S. application Ser. No. 09/357,600, filed Jul. 20, 1999, now U.S. Pat. No. 6,271,163, issued Aug. 7, 2001.
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