Antenna effect often occurs during manufacturing of an integrated circuit. For example, the antenna effect may occur when a certain amount of electrical charges, which are introduced from certain semiconductor manufacturing processes, flows through a transistor structure into a semiconductor substrate. If the amount of electrical charges is too much, gate oxide in the transistor structure may be damaged. As a result, yield and reliability issues for an integrated circuit are decreased.
Aspects of the present disclosure are best understood from the following detailed description when read with the accompanying figures. It is noted that, in accordance with the standard practice in the industry, various features are not drawn to scale. In fact, the dimensions of the various features may be arbitrarily increased or reduced for clarity of discussion.
The following disclosure provides many different embodiments, or examples, for implementing different features of the provided subject matter. Specific examples of components and arrangements are described below to simplify the present disclosure. These are, of course, merely examples and are not intended to be limiting. For example, the formation of a first feature over or on a second feature in the description that follows may include embodiments in which the first and second features are formed in direct contact, and may also include embodiments in which additional features may be formed between the first and second features, such that the first and second features may not be in direct contact. In addition, the present disclosure may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed.
The terms used in this specification generally have their ordinary meanings in the art and in the specific context where each term is used. The use of examples in this specification, including examples of any terms discussed herein, is illustrative, and in no way limits the scope and meaning of the disclosure or of any exemplified term. Likewise, the present disclosure is not limited to various embodiments given in this specification.
Although the terms “first,” “second,” etc., may be used herein to describe various elements, these elements should not be limited by these terms. These terms are used to distinguish one element from another. For example, a first element could be termed a second element, and, similarly, a second element could be termed a first element, without departing from the scope of the embodiments. As used herein, the term “and/or” includes any and all combinations of one or more of the associated listed items.
Reference is now made to
In some embodiments, the electronic device 100 includes a circuit 120 and a diode circuit 140. In some embodiments, the circuit 120 includes various active circuits formed by one or more transistors. For example, in some embodiments, the circuit 120 is a static random access memory (SRAM). As illustratively shown in
In some conditions, excess charges may be accumulated on the I/O pins 121 and 122 during the manufacturing of the electronic device 100. For example, when a process of plasma etching is employed to fabricate the electronic device 100, the charges may be introduced from the plasma and then accumulated on the I/O pins 121 and 122. If the charges accumulated on the I/O pins 121 and 122 are too much, the I/O pins 121 and 122 may be damaged. As a result, the yield and the reliability of the electronic device 100 are reduced.
To protect the I/O pins from damage caused by the excess charges, the diode circuit 140 is arranged to be coupled between the I/O pins 121 and 122, in order to provide discharging paths P1 and P2 for discharging excess charges accumulated on the I/O pins 121 and 122. In some embodiments, the diode circuit 140 is configured to provide the discharging paths P1 and P2 while the diode circuit 140 is turned off by a voltage Vlo, in order to avoid any impact on operations of the circuit 120. The related operations will be discussed with reference to embodiments below. In some embodiments, the diode circuit 140 is referred to as “antenna diode.”
The numbers of the I/O pins shown in
The following paragraphs describe certain embodiments related to the diode circuit 140 to illustrate functions and applications thereof. However, the present disclosure is not limited to the following embodiments. Various arrangements to implement the functions and the operations of the diode circuit 140 in
Reference is now made to
In some embodiments, the diode circuit 140 in
The value of the voltage Vlo is given for illustrative purposes. Various values of the voltage Vlo, which are sufficient to turn off the transistors M1-M2, are within the contemplated scope of the present disclosure.
As illustratively shown in
In some embodiments, the I/O pins 121 and 122 in
Reference is now made to
As illustratively shown in
In this example, the portions 210A and 210C are formed on and in contact with the substrate 201. Accordingly, parasitic diodes (not shown) are formed between the substrate 201 and the portions 210A and 201C, respectively, in order to form the discharging paths P1-P2 in
The gate structures 220 and 222 are formed over the OD area 210. The gate structure 220 is between the portions 210B and 210C of the OD area 210. The gate structure 222 is between the portions 210A and 210B of the OD area 210. The gate structure 220 corresponds to the control terminal G1 of the transistor M1, and the gate structure 222 corresponds to the control terminal G2 of the transistor M2. In some embodiments, the gate structures 220 and 222 are formed with metal and polysilicon. Various suitable materials to form the gate structures 220 and 222 area within the contemplated scope of the present disclosure.
The interconnection structure 230 are arranged to provide electrical connections between the gate structure 220 and the portion 210B of the OD area 210, and between the gate structure 222 and the portion 210B of the OD area 210.
In some embodiments, the interconnection structure 230 includes contacts 231-232. The contact 231 is disposed over and coupled to the portion 210B of the OD area 210. The contact 232 is formed over the gate structures 220 and 222 and the contact 231. The gate structures 220 and 222 and the contact 231 are coupled to each other via the contact 232. In other words, the contact 232 bridges the gate structures 220 and 222 and the contact 231 together. Accordingly, with the contacts 231-232, the gate structures 220 and 222 are coupled to the portion 210B of the OD area 210. Effectively, the connection between the control terminal G1 and the second terminal S/D12 of the transistor M1 and the connection between the control terminal G2 and the second terminal S/D22 of the transistor M2 in
In some embodiments, the contact 231 is further coupled to a circuit (not shown) or an external signal source (not shown) via one or more contacts (not shown) and conductive segments (not shown), in order to receive the voltage Vlo in
The implementations of the contacts 231-232 and the arrangements of the interconnection structure 230 are given for illustrative purposes. Various implementations of the contacts 231-232 and various arrangements of the interconnection structure 230 are within the contemplated scope of the present disclosure.
In some embodiments, the diode circuit 140 further includes dummy gate structures 240 and 242. The dummy gate structures 240 and 242 are disposed over and cover edges of the OD area 210. In some embodiments, the dummy gate structure 240 and 242 do not act as gates to any semiconductor device including, for example, the transistors M1-M2. The dummy gate structures 240 and 242 and the gate structures 220 and 222 are spaced apart from each other. In some embodiments, the dummy gate structure 240 and 242 are formed to increase the density of materials to form the gate structures 220 and 222, in order to improve the yield rate. In some embodiments, the dummy gate structures 240 and 242 are able to be omitted.
In the embodiments of
In some embodiments, the terms “around”, “about” or “substantially” shall generally mean within 20 percent, within 10 percent, or within 5 percent of a given value or range. The ranges indicated by these terms are given for illustrative purposes. Various given values or ranges are within the contemplated scope of the present disclosure. The distance of the poly pitch defined in
In some approaches, two or more separate diode circuits are employed to provide discharging paths for excess charges on different I/O pins. In these approaches, as being limited by a minimum distance between active areas defined in a design rule, the width of the diode circuits are more than or equal to seven times the distance of the poly pitch. Compared with these approaches, the width of the diode circuit 140 in
Reference is now made to
As illustratively shown in
In some embodiments of
Reference is now made to
Compared with
The contact 231 is arranged at and coupled to the portion 210B of the OD area 210. In some embodiments, the interconnection structure 230 further includes a conductive segment (not shown) coupled to the contact 231, and the conductive segment is further coupled to a circuit or an external signal source (not shown), in order to receive the voltage V1. In the embodiments of
Reference is now made to
Compared with embodiments of
Reference is now made to
Compared with embodiments of
The contact 232 is arranged with respect to the gate structure 220. The contact 232 is arranged to be coupled the gate structure 220. In some embodiments, the interconnection structure 230 further includes a conductive segment (not shown) coupled to the contact 232, and the conductive segment is further coupled to a circuit or an external signal source (not shown), in order to receive the voltage Vlo.
In this example, the portions 210A and 210C are formed on and in contact with the substrate 201. Accordingly, parasitic diodes (not shown) are formed between the substrate 201 and the portions 210A and 201C, respectively, in order to form the discharging paths P1-P2 in
In the embodiments of
For ease of understanding, transistors M1-M2 in the embodiments discussed above are shown with N-type transistors. It is appreciated by those skilled in the art that the embodiments discussed above are able to be implemented with P-type transistors. For example, on condition that the transistors M1-M2 discussed above are implemented with P-type transistors, the bulk terminals thereof may correspond to an N-well on the substrate, and the voltages Vlo and/or V1 discussed above are correspondingly adjusted to be sufficient to turn off the transistors M1-M2. Various types of transistors to implement the embodiments discussed above are within the contemplated scope of the present disclosure.
The interconnection structure 230 shown in
In operation S510, a diode circuit is coupled between two I/O pins of a circuit. For illustration, as discussed in
In operation S520, transistors of the diode circuit are configured to be turned off. For illustration, as discussed in
With continued reference to
The above description of the method 500 includes exemplary operations, but the operations of the method 500 are not necessarily performed in the order described. The order of the operations of the method 500 disclosed in the present disclosure are able to be changed, or the operations are able to be executed simultaneously or partially simultaneously as appropriate, in accordance with the spirit and scope of various embodiments of the present disclosure.
As described above, the diode circuits discussed herein are able to provide discharging paths for the circuit without affecting operations of the circuit. Moreover, the diode circuits discussed herein are able to be implemented in a small chip size. Accordingly, cost of a device that utilizes the diode circuits discussed herein can be saved.
In this document, the term “coupled” may also be termed as “electrically coupled,” and the term “connected” may be termed as “electrically connected”. “Coupled” and “connected” may also be used to indicate that two or more elements cooperate or interact with each other.
In some embodiments, a device is disclosed, and the device includes a diode circuit. The diode circuit is on a substrate and coupled between a first input/output (I/O) pin and a second I/O pin of a circuit, and is configured to be turned off. The diode circuit is configured to provide a first discharging path for the first I/O pin of the circuit and a second discharging path for the second I/O pin of the circuit. The diode circuit includes a first transistor and a second transistor. The first transistor is coupled between a node and the first I/O pin. The second transistor is coupled between the node and the second I/O pin. The node is configured to receive a first voltage, and a control terminal of the first transistor and a control terminal of the second transistor are configured to receive a second voltage, wherein a voltage difference between the first voltage and the second voltage is configured to turn off the first transistor and the second transistor.
Also disclosed is a device is disclosed, and the device includes a diode circuit. The diode circuit is coupled between a first input/output (I/O) pin and a second I/O pin of a circuit, and is configured to be turned off. The diode circuit is configured to provide a first discharging path for the first I/O pin of the circuit and a second discharging path for the second I/O pin of the circuit. The diode circuit includes a transistor coupled between the first I/O pin and the second I/O pin. A control terminal of the transistor is configured to receive a voltage, in order to turn off the transistor.
Also disclosed is a method that includes operations below. One or more transistors, which are formed at an active region and adjacent to each other, is coupled between a first input/output (I/O) pin and a second I/O pin of a circuit. The one or more transistors is turned off to provide a first discharging path for the first I/O pin and to provide a second discharging path for the second I/O pin. The one or more transistors include a first transistor and a second transistor. A first voltage is transmitted to a first terminal of the first transistor and a first terminal of the second transistor. A second voltage is transmitted to a control terminal of the first transistor and a control terminal of the second transistor, in order to turn off the first transistor and the second transistor by a voltage difference between the first voltage and the second voltage. A second terminal of the first transistor is coupled to the first I/O pin, and a second terminal of the second transistor is coupled to the second I/O pin.
The foregoing outlines features of several embodiments so that those skilled in the art may better understand the aspects of the present disclosure. Those skilled in the art should appreciate that they may readily use the present disclosure as a basis for designing or modifying other processes and structures for carrying out the same purposes and/or achieving the same advantages of the embodiments introduced herein. Those skilled in the art should also realize that such equivalent constructions do not depart from the spirit and scope of the present disclosure, and that they may make various changes, substitutions, and alterations herein without departing from the spirit and scope of the present disclosure.
This application is a division of U.S. application Ser. No. 15/799,346, filed Oct. 31, 2017, which claims priority to U.S. Provisional Application Ser. No. 62/538,754, filed Jul. 30, 2017, which is herein incorporated by reference.
Number | Date | Country | |
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62538754 | Jul 2017 | US |
Number | Date | Country | |
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Parent | 15799346 | Oct 2017 | US |
Child | 17875108 | US |