Antistatic agent, antistatic film and articles coated with antistatic film

Abstract

The object of the invention is to provide an antistatic agent exhibiting an excellent property of preventing film-thinning phenomenon and fogging in chemically amplified resists, an antistatic film using the antistatic agent and a product coated therewith.

Description

Claims

1. An antistatic agent, comprising a water-soluble electroconductive polymer, a solvent and a water-soluble polymer.

2. The antistatic agent as claimed in claim 1, wherein the water-soluble polymer is a water-soluble polymer having a polypeptide structure.

3. The antistatic agent as claimed in claim 1, wherein the water-soluble polymer has a chemical structure represented by formula (10) as a repeating unit: P1-Z-P2  (10)

4. The antistatic agent as claimed in claim 1, wherein the water-soluble polymer has at least one kind selected from repeating units represented by structure (10)a, (10)b or (10)c in a molecule.

5. The antistatic agent as claimed in claim 1, wherein the water-soluble polymer has a polypeptide structure comprising an amino acid residue (10)a as repeating unit structure: —(N(—R′)—CH(—R)—C(═O))—  (10)a.

6. The antistatic agent as claimed in claim 1, wherein the water-soluble polymer has a polyvinyl structure represented by (10)′ as repeating unit: —(CH(—Y—P2)—CH2)—  (10)′

7. The antistatic agent as claimed in claim 2, wherein the water-soluble polymer having a polypeptide structure is a protein hydrolysate.

8. The antistatic agent as claimed in claim 1, wherein the water-soluble polymer is at least one kind selected from the group consisting of polypeptide, polyvinylpyrrolidone, polyvinylcaprolactam and polyvinylalkylether.

9. The antistatic agent as claimed in claim 8, wherein the water-soluble polymer is polyvinylpyrrolidone.

10. The antistatic agent as claimed in claim 9, wherein the water-soluble polymer is polyvinylpyrrolidone having a weight average molecular weight of 100,000 or more.

11. The antistatic agent as claimed in claim 1, further comprising a surfactant.

12. The antistatic agent as claimed in claim 1, wherein the amount of the water-soluble electroconductive polymer is from 0.1 to 20 mass %, the amount of the water-soluble polymer having a polypeptide structure is 0.0001 to 10 mass % and the amount of the solvent is from 70.0 to 99.8 mass %.

13. The antistatic agent as claimed in claim 1, wherein the amount of the water-soluble electroconductive polymer is from 0.1 to 20 mass %, the amount of the water-soluble polymer having a polyvinyl structure is 0.0001 to 10 mass % and the amount of the solvent is from 70.0 to 99.8 mass %.

14. The antistatic agent as claimed in claim 11, wherein the amount of the water-soluble electroconductive polymer is from 0.1 to 20 mass %, the amount of the water-soluble polymer having a polypeptide structure is 0.0001 to 10 mass %, the amount of the surfactant is from 0.0001 to 2 mass % and the amount of the solvent is from 68.0 to 99.8 mass %.

15. The antistatic agent as claimed in claim 11, wherein the amount of the water-soluble electroconductive polymer is from 0.1 to 20 mass %, the amount of the water-soluble polymer having a polyvinyl structure is 0.0001 to 10 mass %, the amount of the surfactant is from 0.0001 to 2 mass % and the amount of the solvent is from 68.0 to 99.8 mass %.

16. The antistatic agent as claimed in claim 1, wherein the water-soluble electroconductive polymer is a π-conjugated conductive polymer having a Bronsted acid group or a salt thereof.

17. The antistatic agent as claimed in claim 16, wherein the Bronsted acid group is a sulfonic acid group.

18. The antistatic agent as claimed in claim 17, wherein the water-soluble electroconductive polymer includes a chemical structure represented by formula (1):

19. The antistatic agent as claimed in claim 17, wherein the water-soluble electroconductive polymer includes a chemical structure represented by formula (2):

20. The antistatic agent as claimed in claim 17, wherein the water-soluble electro conductive polymer includes a chemical structure represented by formula (3):

21. The antistatic agent as claimed in claim 17, wherein the water-soluble electroconductive polymer includes a chemical structure represented by formula (4):

22. The antistatic agent as claimed in claim 19, wherein water-soluble electroconductive polymer is a polymer having 5-sulfoisothianaphthene-1,3-diyl.

23. An antistatic film using the antistatic agent as claimed in claim 1.

24. An article coated with the antistatic film as claimed in claim 23.

25. The coated article as claimed in claim 24, wherein the surface to be coated is a photosensitive composition or a composition sensitive to charged particle beams which has been spread on a base substrate.

26. A pattern forming method using the antistatic film as claimed in claim 23.