Number | Name | Date | Kind |
---|---|---|---|
3563648 | Baggaley et al. | Feb 1971 | |
3704945 | Denis et al. | Dec 1972 | |
3722996 | Fox | Mar 1973 | |
4040736 | Johannsmeier | Aug 1977 | |
4452526 | Johannsmeier | Jun 1984 | |
4540277 | Mayer | Sep 1985 | |
4585337 | Phillips | Apr 1986 | |
4620785 | Suzuki et al. | Nov 1986 | |
4629313 | Tanimoto | Dec 1986 | |
4653903 | Torigoe et al. | Mar 1987 | |
4676630 | Matsushita | Jun 1987 | |
4687322 | Tanimoto | Aug 1987 | |
4696889 | Yevick | Sep 1987 | |
4702592 | Geiger et al. | Oct 1987 | |
4708466 | Isohata | Nov 1987 | |
4734746 | Ushida et al. | Mar 1988 |
Number | Date | Country |
---|---|---|
A59-923 | Jan 1984 | JPX |
60-109228A | Jun 1985 | JPX |
Entry |
---|
M. C. King "SPIE Symposium on Microlithography Short Course Notes: Optical Lithography" Mar. 6, 1990, International Society for Optical Engineering, pp. 192-193. |
Number | Date | Country | |
---|---|---|---|
Parent | 111427 | Oct 1987 |