Claims
- 1. A method for polishing an object, comprising:
- placing a support against an inside surface of a polishing belt in a first position;
- placing said object against an outside surface of said polishing belt in a second position, wherein said second position is directly opposite of said first position;
- adjusting a pulley that supports said polishing belt by moving said pulley along a first axis, rotating said pulley around said first axis, and rotating said pulley around a second axis, wherein said second axis is perpendicular to the first axis.
- 2. The method of claim 1, wherein a normal vector of said outside surface is substantially perpendicular to a gravitational acceleration vector.
- 3. The method of claim 2, wherein said first axis is substantially horizontal to the ground.
- 4. The method of claim 1, wherein said placing said support further comprises moving said support up and down against said inside surface of said belt.
- 5. The method of claim 1, wherein said placing said support further comprises rotating said support.
- 6. The method of claim 1, wherein said placing said object further comprises moving said object up and down against said outside surface of said belt.
- 7. The method of claim 1, wherein said placing said object further comprises rotating said object.
- 8. The method of claim 1, further comprising selecting a shape and a size for said support so that said object is held in steady contact with said outside surface of said polishing belt against said support.
- 9. The method of claim 1, wherein said object is a semiconductor material.
- 10. The method of claim 1, wherein said object is a wafer.
- 11. The method of claim 1, wherein said object is a flat panel display.
- 12. The method of claim 1, wherein said object is a magnetic data storage material.
- 13. The method of claim 12, wherein said magnetic data storage material is a hard drive disk.
- 14. The method of claim 1, wherein said polishing belt is a belt having a polishing pad firmly glued thereon.
Parent Case Info
This is a divisional application of application Ser. No. 08/803,623, filed Feb. 21, 1997 entitled--APPARATUS AND METHOD FOR POLISHING A FLAT SURFACE USING A BELTED POLISHING PAD.
US Referenced Citations (11)
Divisions (1)
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Number |
Date |
Country |
Parent |
803623 |
Feb 1997 |
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