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CPC
B24B37/04
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Parent Industries
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PERFORMING OPERATIONS TRANSPORTING
B24
Grinding technology
B24B
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
B24B37/00
Lapping machines or devices Accessories
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B24B37/04
designed for working plane surfaces
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Patents Grants
last 30 patents
Information
Patent Grant
Polishing liquid
Patent number
12,203,007
Issue date
Jan 21, 2025
Hoya Corporation
Hiroki Nakagawa
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Roller for location-specific wafer polishing
Patent number
12,194,591
Issue date
Jan 14, 2025
Applied Materials, Inc.
Ekaterina A. Mikhaylichenko
B24 - GRINDING POLISHING
Information
Patent Grant
Atmospheric plasma in wafer processing system optimization
Patent number
12,198,935
Issue date
Jan 14, 2025
Axus Technology, LLC
Daniel Ray Trojan
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for polishing, processing system, and method of polishing
Patent number
12,179,312
Issue date
Dec 31, 2024
Ebara Corporation
Takuya Moriura
B24 - GRINDING POLISHING
Information
Patent Grant
Method of transferring semiconductor wafer to polishing apparatus a...
Patent number
12,179,308
Issue date
Dec 31, 2024
Sumco Corporation
Ryoya Terakawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Slurry and polishing method
Patent number
12,173,219
Issue date
Dec 24, 2024
Resonac Corporation
Satoyuki Nomura
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Polishing agent for synthetic quartz glass substrate and method for...
Patent number
12,173,193
Issue date
Dec 24, 2024
Shin-Etsu Chemical Co., Ltd.
Mitsuhito Takahashi
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Chemical mechanical planarization tool
Patent number
12,172,263
Issue date
Dec 24, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Michael Yen
B24 - GRINDING POLISHING
Information
Patent Grant
Composition and method for polysilicon CMP
Patent number
12,157,834
Issue date
Dec 3, 2024
CMC MATERIALS LLC
Sarah Brosnan
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical polishing apparatus using a magnetically couple...
Patent number
12,151,336
Issue date
Nov 26, 2024
Taiwan Semiconductor Manufacturing Company Limited
Wen-Pin Ho
B24 - GRINDING POLISHING
Information
Patent Grant
Automated semiconductor substrate polishing and cleaning
Patent number
12,154,810
Issue date
Nov 26, 2024
GlobalWafers Co., Ltd.
ShinBae Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Containment and exhaust system for substrate polishing components
Patent number
12,145,236
Issue date
Nov 19, 2024
Axus Technology, LLC
Daniel Ray Trojan
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for supplying liquid, cleaning unit, and apparatus for pr...
Patent number
12,140,980
Issue date
Nov 12, 2024
Ebara Corporation
Fujihiko Toyomasu
B24 - GRINDING POLISHING
Information
Patent Grant
Multi-layered windows for use in chemical-mechanical planarization...
Patent number
12,138,735
Issue date
Nov 12, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Shih-Chung Chen
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing composition
Patent number
12,139,643
Issue date
Nov 12, 2024
Fujimi Incorporated
Yuichiro Nakagai
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing system apparatus and methods for defect reduction at a su...
Patent number
12,138,732
Issue date
Nov 12, 2024
Applied Materials, Inc.
Asheesh Jain
B24 - GRINDING POLISHING
Information
Patent Grant
Roller for location-specific wafer polishing
Patent number
12,138,733
Issue date
Nov 12, 2024
Applied Materials, Inc.
Ekaterina A. Mikhaylichenko
B24 - GRINDING POLISHING
Information
Patent Grant
CMP polishing pad with enhanced rate
Patent number
12,138,737
Issue date
Nov 12, 2024
Rohm and Haas Electronic Materials Holdings, Inc.
Mohammad T. Islam
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate polishing apparatus and polishing liquid discharge method...
Patent number
12,138,734
Issue date
Nov 12, 2024
Ebara Corporation
Tetsuji Togawa
B24 - GRINDING POLISHING
Information
Patent Grant
Method for polishing diamond crystal, and diamond crystal
Patent number
12,134,161
Issue date
Nov 5, 2024
Orbray Co., Ltd.
Seongwoo Kim
B24 - GRINDING POLISHING
Information
Patent Grant
Channel cut polishing machine
Patent number
12,134,164
Issue date
Nov 5, 2024
UChicago Argonne, LLC
Elina Kasman
B24 - GRINDING POLISHING
Information
Patent Grant
Electrical cleaning tool for wafer polishing tool system
Patent number
12,128,455
Issue date
Oct 29, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chih-Wen Liu
B08 - CLEANING
Information
Patent Grant
Replacing tool for sponge brush, method for installing sponge brush...
Patent number
12,122,014
Issue date
Oct 22, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Jinwei Dang
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical-mechanical polishing apparatus
Patent number
12,103,133
Issue date
Oct 1, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Hsi Huang
B24 - GRINDING POLISHING
Information
Patent Grant
Slurry, screening method, and polishing method
Patent number
12,104,112
Issue date
Oct 1, 2024
Resonac Corporation
Satoyuki Nomura
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Platen rotation device
Patent number
12,090,602
Issue date
Sep 17, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Bruce Cho
B24 - GRINDING POLISHING
Information
Patent Grant
Face-up wafer electrochemical planarization apparatus
Patent number
12,090,600
Issue date
Sep 17, 2024
Applied Materials, Inc.
Kevin H. Song
B24 - GRINDING POLISHING
Information
Patent Grant
High oxide film removal rate shallow trench (STI) chemical mechanic...
Patent number
12,091,581
Issue date
Sep 17, 2024
VERSUM MATERIALS US, LLC
Xiaobo Shi
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Polishing apparatus, polishing method and method for outputting vis...
Patent number
12,083,646
Issue date
Sep 10, 2024
Ebara Corporation
Hiroaki Shibue
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing method and polishing apparatus
Patent number
12,076,830
Issue date
Sep 3, 2024
Ebara Corporation
Masashi Kabasawa
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
COMPOSITION, MANUFACTURING METHOD FOR SEMICONDUCTOR ELEMENT, AND CL...
Publication number
20250017209
Publication date
Jan 16, 2025
FUJIFILM CORPORATION
Tadashi INABA
B24 - GRINDING POLISHING
Information
Patent Application
METHOD FOR POLISHING DIAMOND CRYSTAL, AND DIAMOND CRYSTAL
Publication number
20250018524
Publication date
Jan 16, 2025
ORBRAY CO., LTD.
Seongwoo KIM
B24 - GRINDING POLISHING
Information
Patent Application
CHEMICAL MECHANICAL POLISHING COMPOSITION AND METHOD FOR PREVENTING...
Publication number
20250019567
Publication date
Jan 16, 2025
Yi Guo
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
POLISHING DEVICE, SUBSTRATE TREATING APPARATUS, AND POLISHING METHOD
Publication number
20250018523
Publication date
Jan 16, 2025
SCREEN Holdings Co., Ltd.
Hiroaki ISHII
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING FLUID RECOVERY AND REUSE SYSTEM FOR SEMICONDUCTOR SUBSTRA...
Publication number
20250010431
Publication date
Jan 9, 2025
Applied Materials, Inc.
Jianjun HU
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING DEVICE, POLISHING METHOD, AND MACHINE PART
Publication number
20250010425
Publication date
Jan 9, 2025
NHK Spring Co., Ltd.
Masahiro FUJII
B24 - GRINDING POLISHING
Information
Patent Application
DOUBLE-SIDED POLISHING OF SEMICONDUCTOR WAFERS WITH DYNAMIC CONTROL
Publication number
20250001546
Publication date
Jan 2, 2025
GLOBALWAFERS CO., LTD.
Yung Hsing Chu
B24 - GRINDING POLISHING
Information
Patent Application
FACE-UP WAFER ELECTROCHEMICAL PLANARIZATION APPARATUS
Publication number
20250001547
Publication date
Jan 2, 2025
Applied Materials, Inc.
Kevin H. Song
B24 - GRINDING POLISHING
Information
Patent Application
SLURRY, SCREENING METHOD, AND POLISHING METHOD
Publication number
20240425737
Publication date
Dec 26, 2024
Resonac Corporation
Satoyuki NOMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE SUCTION MEMBER, ELASTIC SEAL ASSEMBLY, TOP RING, AND SUBS...
Publication number
20240416480
Publication date
Dec 19, 2024
EBARA CORPORATION
Kazuhiro TAJIMA
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING APPARATUS AND POLISHING METHOD
Publication number
20240399529
Publication date
Dec 5, 2024
Fujikoshi Machinery Corp.
Yuya KANNO
B24 - GRINDING POLISHING
Information
Patent Application
Triazole- And/Or Triazolium-Based Polymers And Copolymers As Additi...
Publication number
20240400861
Publication date
Dec 5, 2024
VERSUM MATERIALS US, LLC
Gregor Larbig
B24 - GRINDING POLISHING
Information
Patent Application
SYSTEM AND METHOD FOR CONTROLLING CHEMICAL MECHANICAL PLANARIZATION
Publication number
20240404894
Publication date
Dec 5, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Wei HSU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
POLISHING COMPOSITION
Publication number
20240400862
Publication date
Dec 5, 2024
Fujimi Incorporated
Yoshio MORI
B24 - GRINDING POLISHING
Information
Patent Application
MAINTAINING VALVE COMPONENTS
Publication number
20240399528
Publication date
Dec 5, 2024
Saudi Arabian Oil Company
Hassan Shaker Ali Al-Sinan
B24 - GRINDING POLISHING
Information
Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Publication number
20240391049
Publication date
Nov 28, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yi-Cheng LIN
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING LIQUID, POLISHING METHOD, COMPONENT MANUFACTURING METHOD,...
Publication number
20240392162
Publication date
Nov 28, 2024
Resonac Corporation
Shogo ARATA
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING COMPOSITION
Publication number
20240392164
Publication date
Nov 28, 2024
Fujimi Incorporated
Yoshio MORI
B24 - GRINDING POLISHING
Information
Patent Application
MULTI-LAYERED WINDOWS FOR USE IN CHEMICAL-MECHANICAL PLANARIZATION...
Publication number
20240383095
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Shih-Chung Chen
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING TOOL AND METHOD
Publication number
20240383092
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Te-Chien Hou
B24 - GRINDING POLISHING
Information
Patent Application
VACUUM ASSEMBLY FOR CHEMICAL MECHANICAL POLISHING
Publication number
20240383100
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Chen Wei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PROCESSING SUBSTRATE AND APPARATUS FOR PROCESSING SUBSTRATE
Publication number
20240383000
Publication date
Nov 21, 2024
EBARA CORPORATION
Jumpei FUJIKATA
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
APPARATUS AND METHODS FOR CHEMICAL MECHANICAL POLISHING
Publication number
20240383093
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Te-Chien HOU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR GRINDING SEMICONDUCTOR WAFERS
Publication number
20240379342
Publication date
Nov 14, 2024
Siltronic AG
Stephan OBERHANS
B24 - GRINDING POLISHING
Information
Patent Application
METHOD AND SYSTEM FOR SLURRY QUALITY MONITORING
Publication number
20240375238
Publication date
Nov 14, 2024
Taiwan Semiconductor Manufacturing company Ltd.
CHIH-CHIANG TSENG
B24 - GRINDING POLISHING
Information
Patent Application
SIMPLIFIED CARRIER REMOVABLE BY REDUCED NUMBER OF CMP PROCESSES
Publication number
20240375236
Publication date
Nov 14, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Wei Chang
B24 - GRINDING POLISHING
Information
Patent Application
PLATEN ROTATION DEVICE
Publication number
20240367286
Publication date
Nov 7, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Bruce CHO
B24 - GRINDING POLISHING
Information
Patent Application
ELECTRICAL CLEANING TOOL FOR WAFER POLISHING TOOL SYSTEM
Publication number
20240367202
Publication date
Nov 7, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Wen Liu
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING LIQUID AND POLISHING METHOD
Publication number
20240368428
Publication date
Nov 7, 2024
FUJIFILM CORPORATION
Tetsuya KAMIMURA
B24 - GRINDING POLISHING
Information
Patent Application
PROCESS CONTROL METHOD FOR PATTERN WAFER INDEX POLISHING
Publication number
20240371646
Publication date
Nov 7, 2024
Applied Materials, Inc.
Jimin ZHANG
B24 - GRINDING POLISHING