The embodiments disclosed herein relate to the field of optics, and more particularly to an apparatus and methods for optical switching using nanoscale optics.
Nano-optics is the study of optical interactions with matter on a subwavelength scale. Nano-optics has numerous applications in optical technologies such as nanolithography, optical data storage, photochemistry on a nanometer scale, solar cells, materials imaging and surface modification with subwavelength lateral resolution, local linear and nonlinear spectroscopy of biological and solid-state structures, quantum computing, quantum communication and optical networking.
As telecommunication networks continue to expand and require greater bandwidth, it is necessary to introduce new technologies to keep up with growing demands. Telecommunication technologies should not only facilitate the need for bandwidth but also be easily incorporated into exiting network infrastructure. At the same time, the technology should be flexible and versatile enough to fit the requirements of the future. While current telecommunication systems include a combination of electronic and optical data-transmission, there is movement towards optical networks due to the increased bandwidth provided by high bit-rates and parallel transmission through wavelength division multiplexing.
Optical networks use light for much of the transmission of data between nodes in an optical circuit. Optical cross-connects function as switches in these nodes by routing signals arriving at one input-port to one of a variety of output-ports. Most current optical cross-connect systems comprise high-speed electronic cores, which are complex, cumbersome, and expensive. These switches typically require a light signal to be translated into an electronic signal, which is switched or routed to an output-port before being reconverted to a light signal. Such optical-to-electronic-to-optical (OEO) devices are typically the rate-limiting component in an optical network. As such, many options are being considered to reduce the need for both OEO conversions, as well as electronic-signal processing in optical network components.
The basic premise of optical switching is that by replacing existing electronic network switches with optical ones, the need for OEO conversions is removed. The advantages of being able to avoid the OEO conversion stage are significant. Optical switching should be more economical, as there is no need for expensive high-speed electronics. Removing the complexity should also make for physically smaller switches. However, optical switching technology is still in its infancy. Semiconductor amplifiers, liquid crystals, holographic crystals, and tiny mirrors have all been proposed to implement light switching between optical fibers.
Prior art optical network devices have utilized optical switch arrays. Prior art devices are described in U.S. Pat. No. 7,035,498 entitled “Ultra-Fast All-Optical Switch Array;” U.S. Pat. No. 7,060,510 entitled “Electronic and Optoelectronic Devices and Methods for Preparing Same;” U.S. Patent Application No. 20020176650 entitled “Ultrafast All-Optical Switch Using Carbon Nanotube Polymer Composites;” U.S. Patent Application No. 20050199894 entitled “Semiconductor Device and Method Using Nanotube Contacts;” U.S. Patent Application No. 20050243410 entitled “Optical Signal Processing Device and Non-Linear Optical Component;” U.S. Patent Application No. 20060054922 entitled “Optically Controlled Electrical Switching Device Based on Wide Bandgap Semiconductors;” and U.S. Patent Application No. 20060158760 entitled “Optically Controlled Electrical-Switch Device Based Upon Carbon Nanotubes and Electrical-Switch System Using the Switch Device,” all of which are hereby incorporated by reference in their entireties for the teachings therein.
There is a need in the art for nanoscale optical networks fabricated from all-optical switches that are based on nonlinear optical materials. The all-optical switches would be easily integrated into existing and future network infrastructure, ultrafast, inexpensive and reduce the loss of bandwidth.
An apparatus and methods for optical switching using nanoscale optics are disclosed herein.
According to aspects illustrated herein, there is provided a nano-optics apparatus for use as an optical switch that includes a metallic film having a top surface, a bottom surface and a plurality of cylindrical channels containing a dielectric material wherein the metallic film acts as an outer electrode; and an array of non-linear optical components penetrating the metallic film through the plurality of cylindrical channels wherein the array acts as an array of inner electrodes. In an embodiment, the array of non-linear optical components is an array of carbon nanotubes.
According to aspects illustrated herein, there is provided a method of optical switching including positioning an optical switch at a node in an optical circuit, wherein the optical switch comprises a metallic film having a plurality of cylindrical channels containing a dielectric material and an array of non-linear optical components penetrating the metallic film through the plurality of cylindrical channels; receiving an optical signal at a portion of each non-linear optical component that protrudes from a top surface of the metallic film; transmitting the optical signal from the portion that protrudes from the top surface of the metallic film to a portion of the non-linear optical component that is embedded within the metallic film such that the optical signal propagates through the non-linear optical component; receiving an optical signal at a portion of each non-linear optical component that protrudes from a bottom surface of the metallic film; transmitting the optical signal from the portion that protrudes from the bottom surface of the metallic film to the non-linear optical component embedded within the metallic film such that the optical signal propagates through the non-linear optical component, wherein the optical signal transmitted from the portion that protrudes from the bottom surface of the metallic film produces an electric field inside the embedded portion of the non-linear optical component that switches the optical signal coming from the portion of each non-linear optical component that protrudes from a top surface of the metallic film.
According to aspects illustrated herein, there is provided a method of fabricating an ultrafast optical switch including obtaining a substrate; coating the substrate with a chromium layer; electrodepositing a catalytic transition metal on the coated substrate; growing an array of non-linear optical components on the coated substrate; etching the chromium layer; coating the coated substrate and the array of non-linear optical components with a dielectric material; and coating the coated substrate and the array of non-linear optical components with a metal material.
The presently disclosed embodiments will be further explained with reference to the attached drawings, wherein like structures are referred to by like numerals throughout the several views. The drawings are not necessarily to scale, the emphasis having instead been generally placed upon illustrating the principles of the presently disclosed embodiments.
While the above-identified drawings set forth presently disclosed embodiments, other embodiments are also contemplated, as noted in the discussion. This disclosure presents illustrative embodiments by way of representation and not limitation. Numerous other modifications and embodiments can be devised by those skilled in the art which fall within the scope and spirit of the principles of the presently disclosed embodiments.
The embodiments disclosed herein relate to the field of nano-optics and more particularly to an apparatus and methods for optical switching using nanoscale optics and methods of fabricating ultrafast optical switches. The optical switches may be used in for optical networking. The following definitions are used to describe the various aspects and characteristics of the presently disclosed embodiments.
As referred to herein, “nano-optics” is the study of optical interactions with matter on a subwavelength scale, i.e., nanoscale optics.
As referred to herein, “carbon nanotube”, “nanowire”, and “nanorod” are used interchangeably.
As referred to herein, “nanoscale” refers to distances and features below about 5000 nanometers (one nanometer equals one billionth of a meter).
As referred to herein, “single-walled carbon nanotubes” (SWCNTs) include one graphene sheet rolled into a cylinder. “Double-walled carbon nanotubes” (DWCNTs) include two graphene sheets in parallel, and those with multiple sheets (typically about 3 to about 30) are “multi-walled carbon nanotubes” (MWCNTs).
As referred to herein, “single-core coaxial transmission lines” (SCCTL) include one nanotube at the center. A “double-core coaxial transmission lines” (DCCTL) include two nanotubes at the center.
As referred to herein, CNTs are “aligned” wherein the longitudinal axis of individual tubules are oriented in a plane substantially parallel to one another.
As referred to herein, a “tubule” is an individual CNT.
As referred to herein, “linear CNTs” are CNTs that do not contain any branches originating from the surface of individual CNT tubules along their linear axes.
As referred to herein, an “array” is a plurality of CNT tubules that are attached to a substrate material proximally to one another.
As referred to herein, a “nanoscale coaxial line” refers to a nanoscale coaxial wire, which includes a plurality of concentric layers. In an embodiment, the nanoscale coaxial line has three concentric layers: an internal conductor, a photovoltaic coating around the core, and an outer conductor. Transmission of electromagnetic energy inside the coaxial line is wavelength-independent and happens in transverse electromagnetic (TEM) mode. In an embodiment, the internal conductor is a metallic core. In an embodiment, the outer conductor is a metallic shielding.
As referred to herein, a “nanoscale coplanar line” refers to a nanoscale coplanar structure, which includes a plurality of parallel layers. In an embodiment, the nanoscale coplanar line has three parallel layers: two metallic conductors, with a photovoltaic coating between them. Transmission of electromagnetic energy inside the coplanar line is wavelength-independent and happens in transverse electromagnetic (TEM) mode.
As referred to herein, “transverse electromagnetic (TEM)” refers to an electromagnetic mode in a transmission line for which both the electric and magnetic fields are perpendicular to the direction of propagation. Other possible modes include but are not limited to transverse electric (TE), in which only the electric field is perpendicular to the direction of propagation, and transverse magnetic (TM), in which only the magnetic field is perpendicular to the direction of propagation.
As referred to herein, a “catalytic transition metal” can be any transition metal, transition metal alloy or mixture thereof. Examples of a catalytic transition metals include, but are not limited to, nickel (Ni), silver (Ag), gold (Au), platinum (Pt), palladium (Pd), iron (Fe), ruthenium (Ru), osmium (Os), cobalt (Co), rhodium (Rh) and iridium (Ir). In a embodiment, the catalytic transition metal comprises nickel (Ni).
As referred to herein, a “catalytic transition metal alloy” can be any transition metal alloy. Preferably, a catalytic transition metal alloy is a homogeneous mixture or solid solution of two or more transition metals. Examples of a catalytic transition metal alloy include, but are not limited to, a nickel/gold (Ni/Au) alloy and a cobalt/iron (Co/Fe) alloy.
The terms “nanotubes,” “nanowires,” “nanorods,” “nanocrystals,” “nanoparticles” and “nanostructures” are employed interchangeably herein. These terms primarily refer to material structures having sizes, e.g., characterized by their largest dimension, in a range of a few nanometers (nm) to about a few microns. In applications where highly symmetric structures are generated, the sizes (largest dimensions) can be as large as tens of microns.
As referred to herein, “CVD” refers to chemical vapor deposition. In CVD, gaseous mixtures of chemicals are dissociated at high temperature (for example, CO2 into C and O2). This is the “CV” part of CVD. Some of the liberated molecules may then be deposited on a nearby substrate (the “D” in CVD), with the rest pumped away. Examples of CVD methods include but not limited to, “plasma enhanced chemical vapor deposition” (PECVD), and “hot filament chemical vapor deposition” (HFCVD).
As referred to herein, an “optical signal” refers to any electromagnetic radiation pulse including gamma rays, X-rays, ultraviolet light, visible light, infrared, microwaves, radio waves (ULF, VLF, LF, MF, HF, long, short, HAM, VHF, UHF, SHF, EHF), cosmic microwave background radiation and other forms of radiation of the electromagnetic spectrum.
An optical switch is a switch that enables signals in optical fibers or integrated optical circuits (IOCs) to be selectively switched from one circuit to another. An all optical switch is a device that allows one optical signal to control another optical signal, i.e. control of light by light. In an all-optical switch, both the input/output modules and the backplane are optical. All-optical switching enables the signal to be routed with universal interfaces capable of handling virtually any audio and video signal, whether analog or digital. In all-optical switching technology, optical signals passing through a switch are diverted to the appropriate destination without being converted to electronic signals. The various all-optical switching technologies that currently support such systems include electromechanical switches (e.g., micro-electro-mechanical systems (MEMS) or bulk optics), thermo-optic switches (e.g., phase shift, capillary, or bubble), and electro-optic switches (e.g., LiNbO3 or liquid crystal). In addition, a variety of nonlinear optical switches (e.g., semiconductor optical amplifiers) use a light beam, rather than electronics, to operate the switch.
In a nonlinear material, a light beam of sufficient strength changes the optical properties of the material which in turn affects any beams of light also propagating through the material. Therefore one beam applied to the material can control the interaction between the material and another beam. As a result, one beam can cause another beam to change direction. Materials possessing large optical nonlinearities are desirable for applications such as optical switching. The optical nonlinearities of most materials are much smaller than that needed for practical devices, motivating the search for new materials. Inorganic semiconductor particles containing a few thousand atoms, known as semiconductor nanocrystals, as well as carbon nanotubes, have greatly enhanced nonlinear optical properties compared to their bulk counterparts.
Carbon nanotubes have unique mechanical and electronic characteristics, which make them suitable for nanomechanical and nanoelectromechanical applications, in particular nanoscale electronics. The optical behavior of carbon nanotubes shows distinct non-linear optical effects, making carbon nanotubes useful for applications such as all-optical switching.
The presently disclosed embodiments generally relate to the use of non-linear optical components to fabricate a nano-optics apparatus. The nano-optics apparatus is a multifunctional nano-composite material made of a metallic film (that acts as an outer electrode) having a top surface and a bottom surface and a plurality of cylindrical channels filled with a dielectric material. An array of non-linear optical components (that act as an inner electrode) penetrate the metallic film through the plurality of cylindrical channels. The array of non-linear optical components have protruding portions that extend beyond a surface of the metallic film and an embedded portion that is within the metallic film. The protruding portions act as nano-optical antenna and are capable of receiving (collecting) and transmitting an optical signal. The embedded portion acts as a nano-coaxial transmission line (CTL) (or rectifying element) and converts the energy trapped in currents along the nano-optical antenna into a manageable signal and allows for propagation of the optical signal (external radiation) with a wavelength exceeding the perpendicular dimensions of the non-linear optical components. In an embodiment, the non-linear-optical components are carbon nanotubes. In an embodiment, the nano-optics apparatus is used as an ultrafast optical switch.
The nano-optics apparatus can concentrate light, and therefore enhance a field up to about 103 times. The array of non-linear optical components, with nano-CTL embedded in a metallic film, effectively compresses an optical signal (light) into nanoscopic dimensions. The nano-optical antennas are capable of receiving and transmitting an optical signal. The extreme compression of light in the nano-CTL leads to an asymmetric tunneling of electrons between the electrodes of the apparatus, and thus provides a rectifying action at the light frequencies, and thus conversion of the light into a direct current (DC) voltage. The extreme compression of light in the nano-CTL is quick, and is not limited by the usual parasitic capacitances that make the conventional diode rectification inefficient, if not impossible, at the light frequencies.
The nano-optical antennas described herein possess the directional characteristics of conventional antennas, proving that conventional, radio technology applies to nano-optics systems in the visible frequency range.
Nano-optical antennas 510 extending beyond a metallic film 540 are capable of receiving, transmitting, and re-emitting an optical signal (electromagnetic radiation). The incoming signal, collected by an array of the nano-optical antennas 510, is compressed into nanoscopic channels of the nano-coaxial transmission lines (cables), and is subsequently decompressed (and reemitted) on the opposite side of the film by the nano-optical antenna 510 segments. The nano-optical antennas 510 possess the directional characteristics of conventional antennas, proving that conventional, radio technology applies to the optical switch apparatus 500 in the visible frequency range. The conventional coaxial cables for light may also be developed. The nano-coaxial transmission lines do not have a cut-off frequency (in contrast to waveguides), i.e. the nano-coaxial transmission lines allow for propagation of radiation with wavelength exceeding their perpendicular dimensions. The purpose of using the nano-coaxial transmission lines in the optical switch apparatus 500 is to channel, and compress the external radiation into the confined space between the internal and external electrodes. The degree of this compression can be estimated as follows. A matched antenna collects radiation from an area of the order of λ2. Subsequently, this radiation energy can be efficiently transferred into the coaxial transmission line, where it compresses into an area of π(R2−r2), thus the power compression factor is of the order of λ2/π(R2−r2). By employing carbon nanotubes with a radius of about 5 nm (R≈5 nm), and using a perpendicular dimension of about 20 nm (R≈20 nm), the power compression factor of the order of several hundreds in the visible range is possible.
The electric field inside the coaxial line varies as 1/ρ, where ρ is the radial distance from the center, and thus can be made very large for small r. It can be shown, that the electric field enhancement is of the order of λ/ρ, and thus is of the order of about one hundred in the visible range at the carbon nanotube with r≈5 nm. An additional, dramatic field enhancement can be achieved by using carbon nanotubes with active plasmon resonances in the range of operation, e.g. gold or silver. Calculations show that there is an additional, resonant enhancement by factor as high as 104 due to the plasmon (Mie) resonances. These results explain the giant field enhancements deduced from the Raman experiments. The total field enhancement may be as high as 106 to 107, and therefore high enough to trigger nonlinear processes in the dielectric of the coaxial cable, leading to the desired switching-off the transmitted electromagnetic energy.
A top piece 600 acts as an external electrode. The external electrode 600 may short the inner electrodes of the non-linear optical components and the outer electrode, thus making the array of non-linear optical components experience the same voltage simultaneously. Thus, in this embodiment, switching of all non-linear optical components occurs simultaneously. The increased conductivity quenches the transparency of the nano-CTLs. In
A method of fabricating a nano-optics apparatus comprises preparing a plurality of nanorods on a substrate, coating the nanorods with a semiconducting material, and coating the semiconductor with a conducting material. The method yields a metal-semiconductor-metal coaxial structure.
In an embodiment, the plurality of nanorods on the substrate are oriented perpendicular to the substrate. In an embodiment, the plurality of nanorods on the substrate are oriented approximately orthogonal to the substrate. In an embodiment, the plurality of nanorods are not perpendicular to the substrate.
In an embodiment, the nanorods are carbon nanotubes. This embodiment comprises coating a substrate with a catalytic material; growing a plurality of carbon nanotubes as internal cores of nanocoax units on the substrate; oxidizing the substrate; coating the substrate with a semiconducting film; and filling with a metallic medium that wets the semiconducting film of the nanocoax units.
A nano-optics apparatus can be fabricated using the method outlined below or similar methods. A flexible or inflexible substrate such as an aluminum (Al) foil is coated with catalytic material (e.g., Ni) by any suitable technique including but not limited to wet chemical deposition, electro-chemical deposition, CVD, sputtering, evaporation and similar techniques. The processed substrate is used for a catalytic growth of carbon nanotubes. Alternatively, the substrate could be employed as an electrode for electrodeposition of any suitable nanorods as internal conductors and cores of nanocoax units, without the use of the catalytic material. The growth of the carbon nanotubes can be performed by any appropriate technique including CVD or PECVD and similar techniques. After depositing or growing of the nanorods, the remaining exposed surface of the substrate, i.e. the area free of nanorods, can be oxidized to fabricate a dielectric layer between the substrate and the outer conductor. Alternatively, the oxidation step can be skipped. Then, the entire system can be coated with a semiconducting layer by any suitable technique (e.g. CVD, electro-chemical deposition, and similar techniques), and eventually filled or coated with a metallic medium (e.g. tin (Sn) powder). In one embodiment, the metallic medium should be selected and processed to obtain a weak wetting contact between the metallic medium and the outer conductor of the nanocoax, yielding a graded diameter end. The metallic medium can be deposited by any conventional technique, e.g. spraying, painting, spin-coating, CVD, evaporation, sputtering, and similar techniques.
A method of optical switching comprises positioning an optical switch at a node in an optical circuit, wherein the optical switch comprises a metallic film having a plurality of cylindrical channels containing a dielectric material and an array of non-linear optical components penetrating the metallic film through the plurality of cylindrical channels; receiving an optical signal at a portion of each non-linear optical component that protrudes from a top surface of the metallic film; transmitting the optical signal from the portion that protrudes from the top surface of the metallic film to a portion of the non-linear optical component that is embedded within the metallic film such that the optical signal propagates through the non-linear optical component; receiving an optical signal at a portion of each non-linear optical component that protrudes from a bottom surface of the metallic film; transmitting the optical signal from the portion that protrudes from the bottom surface of the metallic film to the non-linear optical component embedded within the metallic film such that the optical signal propagates through the non-linear optical component, wherein the optical signal transmitted from the portion that protrudes from the bottom surface of the metallic film produces an electric field inside the embedded portion of the non-linear optical component that switches the optical signal coming from the portion of each non-linear optical component that protrudes from a top surface of the metallic film.
All patents, patent applications, and published references cited herein are hereby incorporated by reference in their entirety. It will be appreciated that various of the above-disclosed and other features and functions, or alternatives thereof, may be desirably combined into many other different systems or applications. Various presently unforeseen or unanticipated alternatives, modifications, variations, or improvements therein may be subsequently made by those skilled in the art which are also intended to be encompassed by the following claims.
This application claims the benefit of U.S. Provisional Application Ser. No. 60/710,948, filed Aug. 24, 2005 and U.S. Provisional Application Ser. No. 60/799,293, filed May 9, 2006, and the entirety of these applications are hereby incorporated herein by reference for the teachings therein.
The invention was supported, in whole or in part, by Contract No. DAAD16-02-C-0037 from the U.S. Army Natick Soldier Systems Center. The Government has certain rights in the invention.
Number | Name | Date | Kind |
---|---|---|---|
3312870 | Rhoades | Apr 1967 | A |
3711848 | Martens | Jan 1973 | A |
3990914 | Weinstein et al. | Nov 1976 | A |
4105470 | Skotheim | Aug 1978 | A |
4197142 | Bolton et al. | Apr 1980 | A |
4360703 | Bolton et al. | Nov 1982 | A |
4445050 | Marks | Apr 1984 | A |
4445080 | Curtiss | Apr 1984 | A |
4774554 | Dentai et al. | Sep 1988 | A |
4783605 | Tomisawa et al. | Nov 1988 | A |
4803688 | Lawandy | Feb 1989 | A |
4854876 | Heath et al. | Aug 1989 | A |
4886555 | Hackstein et al. | Dec 1989 | A |
4913744 | Hoegl et al. | Apr 1990 | A |
5009958 | Yamashita et al. | Apr 1991 | A |
5023139 | Birnboim et al. | Jun 1991 | A |
5028109 | Lawandy | Jul 1991 | A |
5084365 | Gratzel et al. | Jan 1992 | A |
5105305 | Betzig et al. | Apr 1992 | A |
5157674 | Lawandy | Oct 1992 | A |
5171373 | Hebard et al. | Dec 1992 | A |
5185208 | Yamashita et al. | Feb 1993 | A |
5211762 | Isoda et al. | May 1993 | A |
5233621 | Lawandy | Aug 1993 | A |
5250378 | Wang | Oct 1993 | A |
5253258 | Lawandy | Oct 1993 | A |
5264048 | Yoshikawa et al. | Nov 1993 | A |
5267336 | Sriram et al. | Nov 1993 | A |
5272330 | Betzig et al. | Dec 1993 | A |
5291012 | Shimizu et al. | Mar 1994 | A |
5331183 | Sariciftci et al. | Jul 1994 | A |
5332910 | Haraguchi et al. | Jul 1994 | A |
5333000 | Hietala et al. | Jul 1994 | A |
5360764 | Celotta et al. | Nov 1994 | A |
5380410 | Sawaki et al. | Jan 1995 | A |
5383038 | Lawandy | Jan 1995 | A |
5434878 | Lawandy | Jul 1995 | A |
5437736 | Cole | Aug 1995 | A |
5448582 | Lawandy | Sep 1995 | A |
5479432 | Lawandy | Dec 1995 | A |
5481630 | Lawandy | Jan 1996 | A |
5489774 | Akamine et al. | Feb 1996 | A |
5493628 | Lawandy | Feb 1996 | A |
5524011 | Lawandy | Jun 1996 | A |
5547705 | Fukuzawa et al. | Aug 1996 | A |
5548113 | Goldberg et al. | Aug 1996 | A |
5585962 | Dixon | Dec 1996 | A |
5589235 | Ogawa | Dec 1996 | A |
5604635 | Lawandy | Feb 1997 | A |
5625456 | Lawandy | Apr 1997 | A |
5689603 | Huth | Nov 1997 | A |
5694498 | Manasson et al. | Dec 1997 | A |
5747861 | Dentai | May 1998 | A |
5789742 | Wolff | Aug 1998 | A |
5796506 | Tsai | Aug 1998 | A |
5862286 | Imanishi et al. | Jan 1999 | A |
5872422 | Xu et al. | Feb 1999 | A |
5888371 | Quate | Mar 1999 | A |
5894122 | Tomita | Apr 1999 | A |
5897945 | Lieber et al. | Apr 1999 | A |
5902416 | Kern et al. | May 1999 | A |
5973444 | Xu et al. | Oct 1999 | A |
5994691 | Konada | Nov 1999 | A |
6038060 | Crowley | Mar 2000 | A |
6043496 | Tennant | Mar 2000 | A |
6052238 | Ebbesen et al. | Apr 2000 | A |
6083843 | Ohja et al. | Jul 2000 | A |
6096496 | Frankel | Aug 2000 | A |
6100525 | Eden | Aug 2000 | A |
6146227 | Mancevski | Nov 2000 | A |
6183714 | Smalley et al. | Feb 2001 | B1 |
6194711 | Tomita | Feb 2001 | B1 |
6201242 | Eden et al. | Mar 2001 | B1 |
6211532 | Yagi | Apr 2001 | B1 |
6212292 | Soares | Apr 2001 | B1 |
6233045 | Suni et al. | May 2001 | B1 |
6258401 | Crowley | Jul 2001 | B1 |
6271130 | Rajh et al. | Aug 2001 | B1 |
6278231 | Iwasaki et al. | Aug 2001 | B1 |
6283812 | Jin et al. | Sep 2001 | B1 |
6310583 | Saunders | Oct 2001 | B1 |
6322938 | Cohn | Nov 2001 | B1 |
6365466 | Krivokapic | Apr 2002 | B1 |
6410935 | Rajh et al. | Jun 2002 | B1 |
6415082 | Wach | Jul 2002 | B1 |
6445006 | Brandes et al. | Sep 2002 | B1 |
6456423 | Nayfeh et al. | Sep 2002 | B1 |
6472594 | Ichinose et al. | Oct 2002 | B1 |
6504292 | Choi et al. | Jan 2003 | B1 |
6514771 | Seul | Feb 2003 | B1 |
6515274 | Moskovits et al. | Feb 2003 | B1 |
6515325 | Farnworth et al. | Feb 2003 | B1 |
6699642 | Chung et al. | Mar 2003 | B2 |
6569575 | Biebuyck et al. | May 2003 | B1 |
6621079 | Shao et al. | Sep 2003 | B1 |
6642129 | Liu et al. | Nov 2003 | B2 |
6700550 | Crowley | Mar 2004 | B2 |
6724064 | Watanabe et al. | Apr 2004 | B2 |
6741019 | Filas et al. | May 2004 | B1 |
6749827 | Smalley et al. | Jun 2004 | B2 |
6756025 | Colbert et al. | Jun 2004 | B2 |
6782154 | Zhao et al. | Aug 2004 | B2 |
6806996 | Tatsuura et al. | Oct 2004 | B2 |
6824755 | Colbert et al. | Nov 2004 | B2 |
6833162 | Chattopadhyay et al. | Dec 2004 | B2 |
6835534 | Weiss et al. | Dec 2004 | B2 |
6864162 | Jin | Mar 2005 | B2 |
6867443 | Liu et al. | Mar 2005 | B2 |
6882051 | Majumdar et al. | Apr 2005 | B2 |
6891623 | Baudon et al. | May 2005 | B1 |
6897158 | Sharma | May 2005 | B2 |
6913713 | Chittibabu et al. | Jul 2005 | B2 |
6936233 | Smalley et al. | Aug 2005 | B2 |
6949237 | Smalley et al. | Sep 2005 | B2 |
6969897 | Kim, II | Nov 2005 | B2 |
6979709 | Smalley et al. | Dec 2005 | B2 |
6985223 | Drachev et al. | Jan 2006 | B2 |
6996147 | Majumdar et al. | Feb 2006 | B2 |
7005378 | Crocker, Jr. et al. | Feb 2006 | B2 |
7008604 | Smalley et al. | Mar 2006 | B2 |
7013708 | Cho et al. | Mar 2006 | B1 |
7035498 | Wu et al. | Apr 2006 | B2 |
7041620 | Smalley et al. | May 2006 | B2 |
7048903 | Colbert et al. | May 2006 | B2 |
7048999 | Smalley et al. | May 2006 | B2 |
7052666 | Colbert et al. | May 2006 | B2 |
7053351 | Li et al. | May 2006 | B2 |
7057832 | Wu et al. | Jun 2006 | B2 |
7060510 | Bonnell et al. | Jun 2006 | B2 |
7067098 | Colbert et al. | Jun 2006 | B2 |
7071406 | Smalley et al. | Jul 2006 | B2 |
7097820 | Colbert et al. | Aug 2006 | B2 |
7115864 | Colbert et al. | Oct 2006 | B2 |
7126183 | Forbes et al. | Oct 2006 | B2 |
7126207 | Mosley et al. | Oct 2006 | B2 |
7129567 | Kirby et al. | Oct 2006 | B2 |
7132711 | Forbes et al. | Nov 2006 | B2 |
7157372 | Trezza | Jan 2007 | B1 |
7208793 | Bhattacharyya | Apr 2007 | B2 |
7385262 | O'Keeffe et al. | Jun 2008 | B2 |
7473943 | Mostarshed et al. | Jan 2009 | B2 |
7495361 | Brouillet et al. | Feb 2009 | B2 |
20010001681 | Zhang et al. | May 2001 | A1 |
20020102196 | Smalley et al. | Aug 2002 | A1 |
20020102201 | Colbert et al. | Aug 2002 | A1 |
20020122873 | Mirkin et al. | Sep 2002 | A1 |
20020150524 | Smalley et al. | Oct 2002 | A1 |
20020159943 | Smalley et al. | Oct 2002 | A1 |
20030021967 | Sagiv et al. | Jan 2003 | A1 |
20030042487 | Sarychev et al. | Mar 2003 | A1 |
20030068432 | Dai et al. | Apr 2003 | A1 |
20030134267 | Kang et al. | Jul 2003 | A1 |
20030213922 | Gordon et al. | Nov 2003 | A1 |
20040075464 | Samuelson et al. | Apr 2004 | A1 |
20040077156 | Tsakalakos et al. | Apr 2004 | A1 |
20040131843 | Mirkin et al. | Jul 2004 | A1 |
20040169615 | Crowley | Sep 2004 | A1 |
20040232321 | Miles et al. | Nov 2004 | A1 |
20040245209 | Jung et al. | Dec 2004 | A1 |
20050181409 | Park et al. | Aug 2005 | A1 |
20050189480 | Hollingsworth | Sep 2005 | A1 |
20050191434 | Mirin et al. | Sep 2005 | A1 |
20050194035 | Jin et al. | Sep 2005 | A1 |
20050194038 | Brabec et al. | Sep 2005 | A1 |
20050199894 | Rinzler et al. | Sep 2005 | A1 |
20050211294 | Chittibabu et al. | Sep 2005 | A1 |
20050221202 | Gofron | Oct 2005 | A1 |
20050221577 | Li et al. | Oct 2005 | A1 |
20050230270 | Ren et al. | Oct 2005 | A1 |
20050243410 | Bachmann et al. | Nov 2005 | A1 |
20050255237 | Zhang et al. | Nov 2005 | A1 |
20050272856 | Cooper et al. | Dec 2005 | A1 |
20060014001 | Zhang et al. | Jan 2006 | A1 |
20060024438 | Ku et al. | Feb 2006 | A1 |
20060027543 | Cheng | Feb 2006 | A1 |
20060040057 | Sheehan et al. | Feb 2006 | A1 |
20060043257 | Cheng et al. | Mar 2006 | A1 |
20060054922 | Pettit | Mar 2006 | A1 |
20060082379 | Liu et al. | Apr 2006 | A1 |
20060110618 | Manivannan et al. | May 2006 | A1 |
20060158760 | Ambrosio et al. | Jul 2006 | A1 |
20070047056 | Kempa et al. | Mar 2007 | A1 |
20070081242 | Kempa et al. | Apr 2007 | A1 |
20070105240 | Kempa et al. | May 2007 | A1 |
20070107103 | Kempa et al. | May 2007 | A1 |
20070137697 | Kempa et al. | Jun 2007 | A1 |
20070138376 | Naughton et al. | Jun 2007 | A1 |
20070240757 | Ren et al. | Oct 2007 | A1 |
Number | Date | Country |
---|---|---|
1507298 | Feb 2005 | EP |
WO 03016901 | Feb 2003 | WO |
Number | Date | Country | |
---|---|---|---|
20070081242 A1 | Apr 2007 | US |
Number | Date | Country | |
---|---|---|---|
60710948 | Aug 2005 | US | |
60799293 | May 2006 | US |