Number | Name | Date | Kind |
---|---|---|---|
3445092 | Fierle et al. | May 1969 | |
4064885 | Dussault et al. | Dec 1977 | |
4103519 | Davidson | Aug 1978 | |
4183011 | Massa | Jan 1980 | |
4326553 | Hall | Apr 1982 |
Entry |
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Jensen, "Polishing Silicon Wafers", 1966, (See FIGS. 1 & 2 on p. 9). |