Information
-
Patent Grant
-
6223961
-
Patent Number
6,223,961
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Date Filed
Thursday, April 22, 199925 years ago
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Date Issued
Tuesday, May 1, 200123 years ago
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Inventors
-
Original Assignees
-
Examiners
- Rachuba; M.
- Choi; Stephen
Agents
- McDonnell Boehnen Hulbert & Berghoff
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CPC
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US Classifications
Field of Search
US
- 225 96
- 225 965
- 225 103
- 225 104
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International Classifications
-
Abstract
Apparatus for cleaving a crystalline segment, including a pair of aligning pins facing a first cleave plane formed on a first side of a crystalline segment, an impact pin facing a second cleave plane formed on a second side of the crystalline segment opposite to the first side, the crystalline segment having a cleave line extending between and generally perpendicular to the opposing cleave planes, and an actuator connected to at least one of the aligning pins and the impact pin, for causing relative movement of the aligning pins and the impact pin towards each other, such that the aligning pins abut against the first cleave plane and the impact pin abuts against the second cleave plane.
Description
FIELD OF THE INVENTION
The present invention relates generally to methods and apparatus for cleaving crystals, and particularly to methods and apparatus for cleaving crystals in preparation for defect analysis, such as by scanning electron microscopy (SEM).
BACKGROUND OF INVENTION
Cleaving apparatus for cleaving crystals or wafers are known. For example, U.S. Pat. Nos. 3,680,213 to Reichert, 4,228,937 to Tocci, and 4,775,085 to Ishizuka et al. describe various apparatus suitable for breaking or cleaving semiconductor wafers or crystals. In particular, accurate cleaving of wafers is disclosed in PCT published patent application WO 93/04497, corresponding to U.S. patent application Ser. No. 08/193,188, assigned to the present applicant/assignee, the disclosures of which are incorporated herein by reference.
An important application of cleaving is in preparing wafers for scanning electron microscopy (SEM), which is one method used to analyze defects of semiconductor wafers. The apparatus and methods of PCT published patent application WO 93/04497 can be successfully used to prepare wafers for SEM (and even transmission electron microscopy—TEM), but are limited to a minimum size of wafer, this size being about 40×13 mm, in length and width. It is desirable to have a method and apparatus for cleaving smaller crystalline segments, such as semiconductor dice, which are not readily and accurately cleaved with prior art apparatus and techniques.
SUMMARY OF THE INVENTION
The present invention seeks to provide improved methods and apparatus for cleaving small crystalline segments, such as semiconductor dice or small segments which cannot be cleaved with prior art apparatus.
There is thus provided in accordance with a preferred embodiment of the present invention apparatus for cleaving a crystalline segment, including a pair of aligning pins facing a first cleave plane formed on a first side of a crystalline segment, an impact pin facing a second cleave plane formed on a second side of the crystalline segment opposite to the first side, the crystalline segment having a cleave line extend between and generally perpendicular to the opposing leave planes, and an actuator connected to at least one of the aligning pins and the impact pin, for causing relative movement of the aligning pins and the impact pin towards each other, such that the aligning pins abut against the first cleave plane and the impact pin abuts against the second cleave plane.
In accordance with a preferred embodiment of the present invention the impact pin is aligned with the crystalline segment such that an imaginary line extending from the cleave line towards the impact pin substantially intersects a center of the impact pin.
Further in accordance with a preferred embodiment of the present invention the aligning pins are arranged generally symmetrically on opposite sides of the cleave line.
Still further in accordance with a preferred embodiment of the present invention the impact pin is connected to the actuator and the aligning pins are stationary.
In accordance with another preferred embodiment of the present invention the aligning pins are mechanically linked to a knife by means of linkage arms, the knife being movable by the actuator to impact the first cleave plane. Preferably, in such an embodiment, the impact pin is stationary.
Further in accordance with a preferred embodiment of the present invention the linkage arms permit moving the aligning pins and the knife together, but also permit moving the knife independently of the aligning pins.
Still further in accordance with a preferred embodiment of the present invention the aligning pins apply a preload to the crystalline segment.
BRIEF DESCRIPTION OF THE DRAWINGS
The present invention will be understood and appreciated more fully from the following detailed description, taken in conjunction with the drawings in which:
FIGS. 1A-1D
are simplified illustrations of a method and apparatus for cleaving a crystalline segment in accordance with a preferred embodiment of the present invention, particular useful for coarse cleaving, wherein:
FIG. 1A
is a simplified illustration of a crystalline segment placed in a coarse cleaving apparatus;
FIG. 1B
is a simplified illustration of aligning and preloading the crystalline segment;
FIG. 1C
a simplified illustration of a knife of the cleaving apparatus impacting the crystalline segment; and
FIG. 1D
is a simplified illustration of cleaving the crystalline segment; and
FIGS. 2A-2C
are a simplified illustrations of a method and apparatus for cleaving a crystalline segment in accordance with another preferred embodiment of the present invention, particular useful for fine cleaving, wherein:
FIG. 2A
is a simplified illustration of a crystalline segment placed in a fine cleaving apparatus;
FIG. 2B
is a simplified illustration of a striking pin of the cleaving apparatus impacting the crystalline segment; and
FIG. 2C
is a simplified illustration of cleaving the crystalline segment.
DETAILED DESCRIPTION OF A PREFERRED EMBODIMENT
Reference is now made to
FIGS. 1A-1D
which illustrate a method and apparatus for cleaving a crystalline segment in accordance with a preferred embodiment of the present invention. The apparatus illustrated in
FIGS. 1A-1D
, referred to as cleaving apparatus
10
, is particular useful for coarse cleaving a crystalline segment
12
along a cleave line
14
. As is well known in the art, cleave line
14
is defined by the particular crystalline structure. Crystalline segment
12
preferably has a monocrystal structure, such as a cubic or pyramid structure, for example. Cleave line
14
is preferably substantially perpendicular to a pair of first and second cleave planes
16
and
17
. Cleave planes
16
and
17
are preferably substantially parallel to each other.
Apparatus
10
includes a cleaving knife
18
which preferably has a wedge-like tip
20
. An impact pin
22
supports segment
12
during cleaving, and is preferably aligned with knife tip
20
such that an imaginary line extending from the center of pin
22
to tip
20
is substantially aligned with cleave line
14
. In other words, an imaginary line extending from the center of pin
22
to tip
20
is substantially parallel to internal faces of the crystalline structure of segment
12
, along which faces cleaving can be accomplished.
A pair of aligning pins
24
are preferably symmetrically positioned on opposite sides of cleave line
14
. Pins
22
and
24
may be constructed of a suitably hard material, such as steel. Knife
18
is preferably coupled to an actuator
26
. Actuator
26
may be a step motor or linear actuator, for example, which moves knife
18
towards/away from crystalline segment
12
either incrementally or continuously. Pins
24
are preferably mechanically linked to knife
18
by means of linkage arms
28
which allow moving pins
24
and knife
18
together, but which also permit knife
18
to move linearly independently of pins
24
, as will be described further hereinbelow.
The steps of the cleaving process in accordance with a preferred embodiment of the present invention are now described with reference to
FIGS. 1A-1D
. In
FIG. 1A
, crystalline segment
12
is placed between impact pin
22
and aligning pins
24
. In
FIG. 1B
, actuator
26
moves knife
18
and aligning pins
24
together until aligning pins
24
abut against cleave plane
16
and pin
22
abuts against cleave plane
17
, thereby sandwiching segment
12
between pins
24
and pin
22
. This ensures that an imaginary line extending from the center of pin
22
to tip
20
is substantially aligned with cleave line
14
. In addition, pins
24
not only abut against cleave plane
16
, but also apply a preload to crystalline segment
12
. The preload may be in the range of 1-50 grams, typically 20 grams, for example.
In
FIG. 1C
, actuator
26
further advances knife
18
until knife
18
impacts cleave plane
16
. It is seen that aligning pins
24
remain against cleave plane
16
, and that linkage arms
28
flex, bend or otherwise deform to permit knife
18
to move linearly independently of pins
24
. Accordingly, linkage arms
28
may be springs, flexible arms, jointed arms or articulated arms, for example. Upon impacting cleave plane
16
, knife
18
causes cleaving of crystalline segment
12
along cleave line
14
into two segments
32
, as seen in FIG.
1
D. As is known in the art, knife tip
20
may slightly enter segment
12
at the initiation of the cleaving.
The present invention also provides fine cleaving apparatus, particularly useful for fine cleaving segments such as segments
32
produced after coarse cleaving with apparatus
10
. Reference is now made to
FIGS. 2A-2C
which illustrate apparatus
40
for cleaving a crystalline segment, such as segment
32
, in accordance with another preferred embodiment of the present invention.
Cleaving apparatus
40
includes two aligning pins
42
which are stationary, unlike aligning pins
24
of apparatus
10
. Otherwise, aligning pins
42
are preferably generally identical to aligning pins
24
. An impact pin
44
is provided for striking the segment
32
. An actuator
46
, preferably similar to actuator
26
, is connected to impact pin
44
for advancing impact pin
44
towards segment
32
.
The steps of the cleaving process in accordance with a preferred embodiment of the present invention are now described with reference to
FIGS. 2A-2C
. In
FIG. 2A
, crystalline segment
32
is placed between stationary aligning pins
42
and impact pin
44
. Prior to this placement, segment
32
is preferably prepared with a notch
48
formed at a cleave line
50
in segment
32
. Notch
48
may be formed using the methods and apparatus of PCT published patent application WO 93/04497, corresponding to U.S. patent application Ser. No. 08/193,188. Segment
32
is preferably aligned with impact pin
44
such that an imaginary line extending from the center of pin
44
to notch
48
is substantially aligned with cleave line
50
. Cleave line
50
is preferably substantially perpendicular to a cleave plane
52
.
In
FIG. 2B
, actuator
46
advances impact pin
44
towards segment
32
such that pin
44
impacts cleave plane
53
. Upon impacting cleave plane
53
, impact pin
44
causes cleaving of segment
32
along cleave line
50
into two new segments
54
, as seen in FIG.
2
C. Segments
54
may be inspected for defects using SEM, for example.
It will be appreciated by persons skilled in the art that the present invention is not limited by what has been particularly shown and described hereinabove. Rather the scope of the present invention includes both combinations and subcombinations of the features described hereinabove as well as modifications and variations thereof which would occur to a person of skill in the art upon reading the foregoing description and which are not in the prior art.
Claims
- 1. Apparatus for cleaving a crystalline segment, comprising:a knife facing a first cleave plane formed on a first side of a crystalline segment, said crystalline segment having a cleave line extending between and generally perpendicular to said opposing cleave planes; an impact pin facing a second cleave plane formed on a second side of said crystalline segment opposite to said first side, said impact pin and said knife being aligned on opposite sides of said cleave line; and an actuator connected to said knife and said impact pin, for causing relative movement of said knife and said impact pin towards each other, such that said knife abuts against said first cleave plane and said impact pin abuts against said second cleave plane, and said knife cleaves said crystalline segment generally along said cleave line.
- 2. Apparatus according to claim 1 and further comprising a pair of aligning pins facing said first cleave plane, wherein said aligning pins are arranged generally symmetrically on opposite sides of said cleave line.
- 3. Apparatus according to claim 2 wherein said impact pin is connected to said actuator and said aligning pins are stationary.
- 4. Apparatus according to claim 2 wherein said aligning pins are mechanically linked to said knife by means of linkage arms.
- 5. Apparatus according to claim 4 wherein said impact pin is stationary.
- 6. Apparatus according to claim 4 wherein said linkage arms permit moving said aligning pins and said knife together, but also permit moving said knife independently of said aligning pins.
- 7. Apparatus according to claim 4 wherein said aligning pins apply a preload to said crystalline segment.
Priority Claims (1)
Number |
Date |
Country |
Kind |
124199 |
Apr 1998 |
IL |
|
US Referenced Citations (10)
Foreign Referenced Citations (1)
Number |
Date |
Country |
WO 9304497 |
Mar 1993 |
WO |