Claims
- 1. An apparatus for controlling fluid flow to a semiconductor processing tank, the apparatus comprising:
a tank; a fluid recirculation loop adapted to bleed fluid from the tank, to filter the fluid and to return the fluid to the tank; and a thermo couple coupled to the fluid recirculation loop so as to heat or cool the fluid to a predetermined temperature.
- 2. The apparatus of claim 1 wherein the tank comprises a substrate support adapted to support a semiconductor substrate; and
a transducer adapted to direct acoustic energy through fluid contained in the tank, to the surface of a semiconductor substrate supported by the substrate support.
Parent Case Info
[0001] This application is a division of U.S. patent application Ser. No. 09/580,881, filed May 30, 2000, which claims priority from U.S. provisional application Serial No. 60/136,911, filed Jun. 1, 1999, both of which are hereby incorporated by reference herein in their entirety.
Provisional Applications (1)
|
Number |
Date |
Country |
|
60136911 |
Jun 1999 |
US |
Divisions (1)
|
Number |
Date |
Country |
Parent |
09580881 |
May 2000 |
US |
Child |
10233249 |
Aug 2002 |
US |